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Title: Wafer-scale epitaxial lift-off of GaN using bandgap-selective photoenhanced wet etching

Authors:
 [1] ;  [1] ;  [1] ;  [1] ;  [2] ;  [2] ;  [3] ;  [3] ;  [4] ;  [4] ;  [4]
  1. MicroLink Devices, Inc., 6457 W. Howard St. Niles IL 60048 USA
  2. Qorvo, 500 W. Renner Rd. Richardson TX 75080 USA
  3. University of Notre Dame, 275 Fitzpatrick Hall Notre Dame IN 46556 USA
  4. Virginia Tech, 445 Old Turner Street Blacksburg VA 24061 USA
Publication Date:
Grant/Contract Number:
AR0000446
Type:
Publisher's Accepted Manuscript
Journal Name:
Physica Status Solidi B. Basic Solid State Physics
Additional Journal Information:
Journal Name: Physica Status Solidi B. Basic Solid State Physics Journal Volume: 254 Journal Issue: 8; Journal ID: ISSN 0370-1972
Publisher:
Wiley-Blackwell
Sponsoring Org:
USDOE Advanced Research Projects Agency - Energy (ARPA-E)
Country of Publication:
Germany
Language:
English
OSTI Identifier:
1374208