Impact of laser anneal on NiPt silicide texture and chemical composition
- Authors:
-
[1]
; [2]
; [3]
; [4]
; [4]
; [4]
; [4]
; [4]
; [5]
- STMicroelectronics, 850 rue Jean Monnet, 38926 Crolles Cedex, France, Univ. Grenoble Alpes, CNRS, LTM, F-38000 Grenoble, France
- IBM, 850 rue Jean Monnet, 38926 Crolles Cedex, France
- IBM T. J. Watson Research Center, 1101 Kitchawan Road, Yorktown Heights, New York 10598, USA
- STMicroelectronics, 850 rue Jean Monnet, 38926 Crolles Cedex, France
- Univ. Grenoble Alpes, CNRS, LTM, F-38000 Grenoble, France
- Publication Date:
- Grant/Contract Number:
- AC02- 98CH10886
- Type:
- Publisher's Accepted Manuscript
- Journal Name:
- Journal of Applied Physics
- Additional Journal Information:
- Journal Volume: 121; Journal Issue: 22; Related Information: CHORUS Timestamp: 2018-02-14 11:20:22; Journal ID: ISSN 0021-8979
- Publisher:
- American Institute of Physics
- Sponsoring Org:
- USDOE
- Country of Publication:
- United States
- Language:
- English
- OSTI Identifier:
- 1372507