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Title: Determining the resolution of scanning microwave impedance microscopy using atomic-precision buried donor structures

Abstract not provided.
Authors:
; ; ; ; ; ; ; ;
Publication Date:
Report Number(s):
SAND-2017-5855J; SAND-2017-6240J; SAND-2017-3618J
Journal ID: ISSN 0169-4332; PII: S0169433217319165
Grant/Contract Number:
AC04-94AL85000
Type:
Accepted Manuscript
Journal Name:
Applied Surface Science
Additional Journal Information:
Journal Volume: 423; Journal Issue: C; Journal ID: ISSN 0169-4332
Publisher:
Elsevier
Research Org:
Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
Sponsoring Org:
Work for Others (WFO); USDOE
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; scanning probe microscopy; scanning tunneling microscopy; microwave impedance microscopy; silicon surface; hydrogen resist lithography; atomically precise fabrication
OSTI Identifier:
1372363
Alternate Identifier(s):
OSTI ID: 1372362; OSTI ID: 1389596

Scrymgeour, D. A., Baca, A., Fishgrab, K., Simonson, R. J., Marshall, M., Bussmann, E., Nakakura, C. Y., Anderson, M., and Misra, S.. Determining the resolution of scanning microwave impedance microscopy using atomic-precision buried donor structures. United States: N. p., Web. doi:10.1016/j.apsusc.2017.06.261.
Scrymgeour, D. A., Baca, A., Fishgrab, K., Simonson, R. J., Marshall, M., Bussmann, E., Nakakura, C. Y., Anderson, M., & Misra, S.. Determining the resolution of scanning microwave impedance microscopy using atomic-precision buried donor structures. United States. doi:10.1016/j.apsusc.2017.06.261.
Scrymgeour, D. A., Baca, A., Fishgrab, K., Simonson, R. J., Marshall, M., Bussmann, E., Nakakura, C. Y., Anderson, M., and Misra, S.. 2017. "Determining the resolution of scanning microwave impedance microscopy using atomic-precision buried donor structures". United States. doi:10.1016/j.apsusc.2017.06.261. https://www.osti.gov/servlets/purl/1372363.
@article{osti_1372363,
title = {Determining the resolution of scanning microwave impedance microscopy using atomic-precision buried donor structures},
author = {Scrymgeour, D. A. and Baca, A. and Fishgrab, K. and Simonson, R. J. and Marshall, M. and Bussmann, E. and Nakakura, C. Y. and Anderson, M. and Misra, S.},
abstractNote = {Abstract not provided.},
doi = {10.1016/j.apsusc.2017.06.261},
journal = {Applied Surface Science},
number = C,
volume = 423,
place = {United States},
year = {2017},
month = {11}
}