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Title: Determining the resolution of scanning microwave impedance microscopy using atomic-precision buried donor structures

Abstract not provided.
Authors:
; ; ; ; ; ; ; ;
Publication Date:
Report Number(s):
SAND-2017-5855J; SAND-2017-6240J; SAND-2017-3618J
Journal ID: ISSN 0169-4332; PII: S0169433217319165
Grant/Contract Number:
AC04-94AL85000
Type:
Accepted Manuscript
Journal Name:
Applied Surface Science
Additional Journal Information:
Journal Volume: 423; Journal Issue: C; Journal ID: ISSN 0169-4332
Publisher:
Elsevier
Research Org:
Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
Sponsoring Org:
Work for Others (WFO); USDOE
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; scanning probe microscopy; scanning tunneling microscopy; microwave impedance microscopy; silicon surface; hydrogen resist lithography; atomically precise fabrication
OSTI Identifier:
1372363
Alternate Identifier(s):
OSTI ID: 1372362; OSTI ID: 1389596