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This content will become publicly available on July 13, 2018

Title: Effect of a dielectric layer on plasma uniformity in high frequency electronegative capacitive discharges

Authors:
 [1] ;  [2] ;  [1] ;  [1]
  1. Department of Electrical Engineering, University of California, Berkeley, California 94720
  2. Department of Electrical Engineering, University of California, Berkeley, California 94720 and School of Physics and Optoelectronics Engineering, Dalian University of Technology, Dalian 116024, People's Republic of China
Publication Date:
Grant/Contract Number:
SC0001939
Type:
Publisher's Accepted Manuscript
Journal Name:
Journal of Vacuum Science and Technology. A, Vacuum, Surfaces and Films
Additional Journal Information:
Journal Volume: 35; Journal Issue: 5; Related Information: CHORUS Timestamp: 2018-02-14 19:02:49; Journal ID: ISSN 0734-2101
Publisher:
American Vacuum Society
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English
OSTI Identifier:
1369497