a-Si:H TFT-silicon hybrid low-energy x-ray detector
- Argonne National Lab. (ANL), Argonne, IL (United States)
- Univ. of Waterloo, Waterloo, ON (Canada)
Direct conversion crystalline silicon X-ray imagers are used for low-energy X-ray photon (4-20 keV) detection in scientific research applications such as protein crystallography. In this paper, we demonstrate a novel pixel architecture that integrates a crystalline silicon X-ray detector with a thin-film transistor amorphous silicon pixel readout circuit. We describe a simplified two-mask process to fabricate a complete imaging array and present preliminary results that show the fabricated pixel to be sensitive to 5.89-keV photons from a low activity Fe-55 gamma source. Furthermore, this paper presented can expedite the development of high spatial resolution, low cost, direct conversion imagers for X-ray diffraction and crystallography applications.
- Research Organization:
- Argonne National Laboratory (ANL), Argonne, IL (United States)
- Sponsoring Organization:
- Natural Sciences and Engineering Research Council of Canada (NSERC); USDOE
- Grant/Contract Number:
- AC02-06CH11357
- OSTI ID:
- 1367158
- Journal Information:
- IEEE Transactions on Electron Devices, Vol. 64, Issue 4; ISSN 0018-9383
- Publisher:
- IEEECopyright Statement
- Country of Publication:
- United States
- Language:
- English
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