a-Si:H TFT-silicon hybrid low-energy x-ray detector
Abstract
Direct conversion crystalline silicon X-ray imagers are used for low-energy X-ray photon (4-20 keV) detection in scientific research applications such as protein crystallography. In this paper, we demonstrate a novel pixel architecture that integrates a crystalline silicon X-ray detector with a thin-film transistor amorphous silicon pixel readout circuit. We describe a simplified two-mask process to fabricate a complete imaging array and present preliminary results that show the fabricated pixel to be sensitive to 5.89-keV photons from a low activity Fe-55 gamma source. Furthermore, this paper presented can expedite the development of high spatial resolution, low cost, direct conversion imagers for X-ray diffraction and crystallography applications.
- Authors:
-
[1];
- Argonne National Lab. (ANL), Argonne, IL (United States)
- Univ. of Waterloo, Waterloo, ON (Canada)
- Publication Date:
- Research Org.:
- Argonne National Lab. (ANL), Argonne, IL (United States)
- Sponsoring Org.:
- Natural Sciences and Engineering Research Council of Canada (NSERC); USDOE
- OSTI Identifier:
- 1367158
- Grant/Contract Number:
- AC02-06CH11357
- Resource Type:
- Accepted Manuscript
- Journal Name:
- IEEE Transactions on Electron Devices
- Additional Journal Information:
- Journal Volume: 64; Journal Issue: 4; Journal ID: ISSN 0018-9383
- Publisher:
- IEEE
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY; silicon radiation detectors; thin film transistors; x-ray image sensors
Citation Formats
Shin, Kyung -Wook, and Karim, Karim S. a-Si:H TFT-silicon hybrid low-energy x-ray detector. United States: N. p., 2017.
Web. doi:10.1109/TED.2017.2671365.
Shin, Kyung -Wook, & Karim, Karim S. a-Si:H TFT-silicon hybrid low-energy x-ray detector. United States. https://doi.org/10.1109/TED.2017.2671365
Shin, Kyung -Wook, and Karim, Karim S. Wed .
"a-Si:H TFT-silicon hybrid low-energy x-ray detector". United States. https://doi.org/10.1109/TED.2017.2671365. https://www.osti.gov/servlets/purl/1367158.
@article{osti_1367158,
title = {a-Si:H TFT-silicon hybrid low-energy x-ray detector},
author = {Shin, Kyung -Wook and Karim, Karim S.},
abstractNote = {Direct conversion crystalline silicon X-ray imagers are used for low-energy X-ray photon (4-20 keV) detection in scientific research applications such as protein crystallography. In this paper, we demonstrate a novel pixel architecture that integrates a crystalline silicon X-ray detector with a thin-film transistor amorphous silicon pixel readout circuit. We describe a simplified two-mask process to fabricate a complete imaging array and present preliminary results that show the fabricated pixel to be sensitive to 5.89-keV photons from a low activity Fe-55 gamma source. Furthermore, this paper presented can expedite the development of high spatial resolution, low cost, direct conversion imagers for X-ray diffraction and crystallography applications.},
doi = {10.1109/TED.2017.2671365},
journal = {IEEE Transactions on Electron Devices},
number = 4,
volume = 64,
place = {United States},
year = {2017},
month = {3}
}
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