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Title: Review Article: Advanced nanoscale patterning and material synthesis with gas field helium and neon ion beams

Authors:
 [1] ;  [1] ;  [1] ;  [2] ;  [2]
  1. Department of Materials Science and Engineering, University of Tennessee, Knoxville, Tennessee 37996
  2. Department of Materials Science and Engineering, University of Tennessee, Knoxville, Tennessee 37996 and Center for Nanophase Materials Sciences, Oak Ridge National Laboratory, Oak Ridge, Tennessee 37831
Publication Date:
Grant/Contract Number:
DOE DE-SC0002136
Type:
Published Article
Journal Name:
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
Additional Journal Information:
Journal Volume: 35; Journal Issue: 3; Related Information: CHORUS Timestamp: 2017-06-08 13:01:59; Journal ID: ISSN 2166-2746
Publisher:
American Vacuum Society
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English
OSTI Identifier:
1361941
Alternate Identifier(s):
OSTI ID: 1420590