Review Article: Advanced nanoscale patterning and material synthesis with gas field helium and neon ion beams

Stanford, Michael G.; Lewis, Brett B.; Mahady, Kyle; Fowlkes, Jason D.; Rack, Philip D.

doi:10.1116/1.4981016

Title: Review Article: Advanced nanoscale patterning and material synthesis with gas field helium and neon ion beams

Journal Article · 20 April 2017 · Journal of Vacuum Science and Technology B

DOI: https://doi.org/10.1116/1.4981016 · OSTI ID:1361941

Stanford, Michael G.; Lewis, Brett B.; Mahady, Kyle; Fowlkes, Jason D.; Rack, Philip D.

Focused ion beam nanoscale synthesis has emerged as a critical tool for selected area nanofabrication. Helium and neon ion beams from the gas field ion source have recently demonstrated unparalleled resolution among other scanning ion beams. In this review, the authors focus on the nanoscale synthesis applications for these ion species which have been demonstrated to date. The applications and recent work can broadly be grouped into the following categories: (1) Monte Carlo simulations, (2) direct-write milling or sputtering, (3) ion beam lithography, (4) selective ion implantation or defect introduction, and (5) gas-assisted processing. A special emphasis is given toward using He+ and Ne+ for the processing of two dimensional materials, as several groups have demonstrated promising results. Finally, the authors will discuss the future outlook of He+ and Ne+ nanoprocessing techniques and applications.

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Sponsoring Organization:: USDOE

OSTI ID:: 1361941

Journal Information:: Journal of Vacuum Science and Technology B, Journal Name: Journal of Vacuum Science and Technology B Journal Issue: 3 Vol. 35; ISSN 2166-2746

Publisher:: American Vacuum SocietyCopyright Statement

Country of Publication:: United States

Language:: English

References (153)

Monolayer Molybdenum Disulfide Nanoribbons with High Optical Anisotropy Wu, Jiang‐Bin; Zhao, Huan; Li, Yuanrui Advanced Optical Materials, Vol. 4, Issue 5 https://doi.org/10.1002/adom.201500707	journal	February 2016
The history and development of the helium ion microscope: History and development of helium ion microscope Economou, Nicholas P.; Notte, John A.; Thompson, William B. Scanning, Vol. 34, Issue 2 https://doi.org/10.1002/sca.20239	journal	May 2011
The Prospects of a Subnanometer Focused Neon Ion Beam: The prospects of a subnanometer Rahman, F. H. M.; McVey, Shawn; Farkas, Louis Scanning, Vol. 34, Issue 2 https://doi.org/10.1002/sca.20268	journal	July 2011
Direct and Transmission Milling of Suspended Silicon Nitride Membranes With a Focused Helium Ion Beam: Direct and transmission milling of suspended silicon nitride Marshall, Michael M.; Yang, Jijin; Hall, Adam R. Scanning, Vol. 34, Issue 2 https://doi.org/10.1002/sca.21003	journal	February 2012
Imaging and Nanofabrication With the Helium Ion Microscope of the Van Leeuwenhoek Laboratory in Delft: Imaging and nanofabrication with a helium ion microscope Alkemade, Paul F. A.; Koster, Emma M.; van Veldhoven, Emile Scanning, Vol. 34, Issue 2 https://doi.org/10.1002/sca.21009	journal	March 2012
Understanding the Kinetics and Nanoscale Morphology of Electron-Beam-Induced Deposition via a Three-Dimensional Monte Carlo Simulation: The Effects of the Precursor Molecule and the Deposited Material Smith, Daryl A.; Fowlkes, Jason D.; Rack, Philip D. Small, Vol. 4, Issue 9 https://doi.org/10.1002/smll.200701133	journal	September 2008
In Situ Mitigation of Subsurface and Peripheral Focused Ion Beam Damage via Simultaneous Pulsed Laser Heating Stanford, Michael G.; Lewis, Brett B.; Iberi, Vighter Small, Vol. 12, Issue 13 https://doi.org/10.1002/smll.201503680	journal	February 2016
Helium Ion Microscope Fabrication Causing Changes in the Structure and Mechanical Behavior of Silicon Micropillars Wang, Yue-Cun; Tian, Lin; Liu, Fan Small, Vol. 13, Issue 1 https://doi.org/10.1002/smll.201601753	journal	October 2016
Tungsten Diselenide Patterning and Nanoribbon Formation by Gas-Assisted Focused-Helium-Ion-Beam-Induced Etching Stanford, Michael G.; Pudasaini, Pushpa R.; Cross, Nicholas Small Methods, Vol. 1, Issue 4 https://doi.org/10.1002/smtd.201600060	journal	February 2017
Introduction to Helium Ion Microscopy Joy, David C. Helium Ion Microscopy https://doi.org/10.1007/978-1-4614-8660-2_1	book	January 2013
Sputtering studies with the Monte Carlo Program TRIM.SP Biersack, J. P.; Eckstein, W. Applied Physics A Solids and Surfaces, Vol. 34, Issue 2 https://doi.org/10.1007/BF00614759	journal	June 1984
Focused helium-ion-beam-induced deposition Alkemade, P. F. A.; Miro, H. Applied Physics A, Vol. 117, Issue 4 https://doi.org/10.1007/s00339-014-8763-y	journal	September 2014
Focused helium ion beam deposited low resistivity cobalt metal lines with 10 nm resolution: implications for advanced circuit editing Wu, H.; Stern, L. A.; Xia, D. Journal of Materials Science: Materials in Electronics, Vol. 25, Issue 2 https://doi.org/10.1007/s10854-013-1522-6	journal	October 2013
A Monte Carlo computer program for the transport of energetic ions in amorphous targets Biersack, J. P.; Haggmark, L. G. Nuclear Instruments and Methods, Vol. 174, Issue 1-2, p. 257-269 https://doi.org/10.1016/0029-554X(80)90440-1	journal	August 1980
Gas-assisted etching with focused ion beam technology Casey, J. David; Doyle, Andrew F.; Lee, Randall G. Microelectronic Engineering, Vol. 24, Issue 1-4 https://doi.org/10.1016/0167-9317(94)90053-1	journal	March 1994
Gettering of metals by He induced voids in silicon Raineri, V.; Battaglia, A.; Rimini, E. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Vol. 96, Issue 1-2 https://doi.org/10.1016/0168-583X(94)00493-5	journal	March 1995
On the full-width-at-half-maximum of field ion energy distributions Ernst, N.; Bozdech, G.; Schmidt, H. Applied Surface Science, Vol. 67, Issue 1-4 https://doi.org/10.1016/0169-4332(93)90301-Q	journal	April 1993
Monte Carlo simulation of heavy ion induced kinetic electron emission from an Al surface Ohya, K. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Vol. 195, Issue 3-4 https://doi.org/10.1016/S0168-583X(02)01130-8	journal	October 2002
Comparative study of target atomic number dependence of ion induced and electron induced secondary electron emission Ohya, K. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Vol. 206 https://doi.org/10.1016/S0168-583X(03)00716-X	journal	May 2003
Gettering of transition metals by cavities in silicon formed by helium ion implantation Petersen, G. A.; Myers, S. M.; Follstaedt, D. M. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Vol. 127-128 https://doi.org/10.1016/S0168-583X(96)00944-5	journal	May 1997
Electron beam lithography: resolution limits and applications Vieu, C.; Carcenac, F.; Pépin, A. Applied Surface Science, Vol. 164, Issue 1-4 https://doi.org/10.1016/S0169-4332(00)00352-4	journal	September 2000
Hydrogen and helium bubbles in silicon Cerofolini, G. Materials Science and Engineering: R: Reports, Vol. 27, Issue 1-2 https://doi.org/10.1016/S0927-796X(00)00007-3	journal	April 2000
Monte Carlo study of secondary electron emission from SiO2 induced by focused gallium ion beams Ohya, Kaoru; Ishitani, Tohru Applied Surface Science, Vol. 237, Issue 1-4 https://doi.org/10.1016/j.apsusc.2004.06.133	journal	October 2004
Surface chemistry and optimization of focused ion beam iodine-enhanced etching of indium phosphide Callegari, Victor; Nellen, Philipp M.; Yang, Tianhe Applied Surface Science, Vol. 253, Issue 22 https://doi.org/10.1016/j.apsusc.2007.05.026	journal	September 2007
Utilizing Neon Ion Microscope for GaSb nanopatterning studies: Nanostructure formation and comparison with low energy nanopatterning El-Atwani, Osman; Huynh, Chuong; Norris, Scott Applied Surface Science, Vol. 370 https://doi.org/10.1016/j.apsusc.2016.02.109	journal	May 2016
Raman study of damage extent in graphene nanostructures carved by high energy helium ion beam Hang, Shuojin; Moktadir, Zakaria; Mizuta, Hiroshi Carbon, Vol. 72 https://doi.org/10.1016/j.carbon.2014.01.071	journal	June 2014
Defect-induced Fermi level pinning and suppression of ambipolar behaviour in graphene Moktadir, Zakaria; Hang, Shuojin; Mizuta, Hiroshi Carbon, Vol. 93 https://doi.org/10.1016/j.carbon.2015.05.049	journal	November 2015
Gas-assisted etching of niobium with focused ion beam Fu, X. L.; Li, P. G.; Jin, A. Z. Microelectronic Engineering, Vol. 78-79 https://doi.org/10.1016/j.mee.2004.12.089	journal	March 2005
Sub-5nm FIB direct patterning of nanodevices Gierak, J.; Madouri, A.; Biance, A. L. Microelectronic Engineering, Vol. 84, Issue 5-8 https://doi.org/10.1016/j.mee.2007.01.059	journal	May 2007
Focused helium ion beam milling and deposition Boden, S. A.; Moktadir, Z.; Bagnall, D. M. Microelectronic Engineering, Vol. 88, Issue 8 https://doi.org/10.1016/j.mee.2010.11.041	journal	August 2011
Sub-10nm patterning by focused He-ion beam milling for fabrication of downscaled graphene nano devices Kalhor, Nima; Boden, Stuart A.; Mizuta, Hiroshi Microelectronic Engineering, Vol. 114 https://doi.org/10.1016/j.mee.2013.09.018	journal	February 2014
Helium ion beam lithography on fullerene molecular resists for sub-10nm patterning Shi, Xiaoqing; Prewett, Philip; Huq, Ejaz Microelectronic Engineering, Vol. 155 https://doi.org/10.1016/j.mee.2016.02.045	journal	April 2016
Position-controlled marker formation by helium ion microscope for aligning a TEM tomographic tilt series Hayashida, Misa; Iijima, Tomohiko; Fujimoto, Toshiyuki Micron, Vol. 43, Issue 9 https://doi.org/10.1016/j.micron.2012.03.012	journal	September 2012
Comparison of secondary electron emission in helium ion microscope with gallium ion and electron microscopes Ohya, K.; Yamanaka, T.; Inai, K. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Vol. 267, Issue 4 https://doi.org/10.1016/j.nimb.2008.11.003	journal	February 2009
A model of secondary electron imaging in the helium ion scanning microscope Ramachandra, Ranjan; Griffin, Brendan; Joy, David Ultramicroscopy, Vol. 109, Issue 6 https://doi.org/10.1016/j.ultramic.2009.01.013	journal	May 2009
A Study of Helium Ion Beam Substrate Interaction Volume on Nanomachining Profiles in Bulk Substrates and Thin Film Membranes Livengood, R.; Tan, S.; Greenzweig, Y. Microscopy and Microanalysis, Vol. 18, Issue S2 https://doi.org/10.1017/S1431927612005892	journal	July 2012
Nano-Sculpting of Suspended CVD Graphene with Helium and Neon Ion Beams Cullen, D. A.; Swett, J.; Rondinone, A. Microscopy and Microanalysis, Vol. 21, Issue S3 https://doi.org/10.1017/S1431927615003682	journal	August 2015
A Design-of-Experiments Approach to Characterizing Beam-Induced Deposition in the Helium Ion Microscope Scipioni, Larry; Sanford, Colin; van Veldhoven, Emile Microscopy Today, Vol. 19, Issue 3 https://doi.org/10.1017/S1551929511000307	journal	April 2011
Defect Control and n -Doping of Encapsulated Graphene by Helium-Ion-Beam Irradiation Nanda, Gaurav; Goswami, Srijit; Watanabe, Kenji Nano Letters, Vol. 15, Issue 6 https://doi.org/10.1021/acs.nanolett.5b00939	journal	May 2015
Nanopatterning and Electrical Tuning of MoS ₂ Layers with a Subnanometer Helium Ion Beam Fox, Daniel S.; Zhou, Yangbo; Maguire, Pierce Nano Letters, Vol. 15, Issue 8 https://doi.org/10.1021/acs.nanolett.5b01673	journal	July 2015
Continuously Controlled Optical Band Gap in Oxide Semiconductor Thin Films Herklotz, Andreas; Rus, Stefania Florina; Ward, Thomas Zac Nano Letters, Vol. 16, Issue 3 https://doi.org/10.1021/acs.nanolett.5b04815	journal	February 2016
Inert Gas Enhanced Laser-Assisted Purification of Platinum Electron-Beam-Induced Deposits Stanford, Michael G.; Lewis, Brett B.; Noh, Joo Hyon ACS Applied Materials & Interfaces, Vol. 7, Issue 35 https://doi.org/10.1021/acsami.5b02488	journal	July 2015
Polarization Control via He-Ion Beam Induced Nanofabrication in Layered Ferroelectric Semiconductors Belianinov, Alex; Iberi, Vighter; Tselev, Alexander ACS Applied Materials & Interfaces, Vol. 8, Issue 11 https://doi.org/10.1021/acsami.5b12056	journal	March 2016
Laser-Assisted Focused He ⁺ Ion Beam Induced Etching with and without XeF ₂ Gas Assist Stanford, Michael G.; Mahady, Kyle; Lewis, Brett B. ACS Applied Materials & Interfaces, Vol. 8, Issue 42 https://doi.org/10.1021/acsami.6b09758	journal	October 2016
Atomistic-Scale Simulations of Defect Formation in Graphene under Noble Gas Ion Irradiation Yoon, Kichul; Rahnamoun, Ali; Swett, Jacob L. ACS Nano, Vol. 10, Issue 9 https://doi.org/10.1021/acsnano.6b03036	journal	August 2016
Maskless and Resist-Free Rapid Prototyping of Three-Dimensional Structures Through Electron Beam Induced Deposition (EBID) of Carbon in Combination with Metal-Assisted Chemical Etching (MaCE) of Silicon Rykaczewski, Konrad; Hildreth, Owen J.; Kulkarni, Dhaval ACS Applied Materials & Interfaces, Vol. 2, Issue 4 https://doi.org/10.1021/am1000773	journal	March 2010
Fundamental Resolution Limits during Electron-Induced Direct-Write Synthesis Arnold, Georg; Timilsina, Rajendra; Fowlkes, Jason ACS Applied Materials & Interfaces, Vol. 6, Issue 10 https://doi.org/10.1021/am5008003	journal	May 2014
Purification of Nanoscale Electron-Beam-Induced Platinum Deposits via a Pulsed Laser-Induced Oxidation Reaction Stanford, Michael G.; Lewis, Brett B.; Noh, Joo Hyon ACS Applied Materials & Interfaces, Vol. 6, Issue 23 https://doi.org/10.1021/am506246z	journal	November 2014
Neon Ion Beam Lithography (NIBL) Winston, Donald; Manfrinato, Vitor R.; Nicaise, Samuel M. Nano Letters, Vol. 11, Issue 10 https://doi.org/10.1021/nl202447n	journal	October 2011
Reaching the Theoretical Resonance Quality Factor Limit in Coaxial Plasmonic Nanoresonators Fabricated by Helium Ion Lithography Melli, M.; Polyakov, A.; Gargas, D. Nano Letters, Vol. 13, Issue 6 https://doi.org/10.1021/nl400844a	journal	May 2013
Ultrafast Nonlinear Control of Progressively Loaded, Single Plasmonic Nanoantennas Fabricated Using Helium Ion Milling Wang, Yudong; Abb, Martina; Boden, Stuart A. Nano Letters, Vol. 13, Issue 11 https://doi.org/10.1021/nl403316z	journal	October 2013
Toward Plasmonics with Nanometer Precision: Nonlinear Optics of Helium-Ion Milled Gold Nanoantennas Kollmann, Heiko; Piao, Xianji; Esmann, Martin Nano Letters, Vol. 14, Issue 8 https://doi.org/10.1021/nl5019589	journal	July 2014
Tuning the Interface Conductivity of LaAlO ₃ /SrTiO ₃ Using Ion Beams: Implications for Patterning Mathew, Sinu; Annadi, Anil; Chan, Taw Kuei ACS Nano, Vol. 7, Issue 12 https://doi.org/10.1021/nn4028135	journal	November 2013
Patterning, Characterization, and Chemical Sensing Applications of Graphene Nanoribbon Arrays Down to 5 nm Using Helium Ion Beam Lithography Abbas, Ahmad N.; Liu, Gang; Liu, Bilu ACS Nano, Vol. 8, Issue 2 https://doi.org/10.1021/nn405759v	journal	January 2014
Defect-Dominated Doping and Contact Resistance in MoS ₂ McDonnell, Stephen; Addou, Rafik; Buie, Creighton ACS Nano, Vol. 8, Issue 3 https://doi.org/10.1021/nn500044q	journal	February 2014
Etching of Graphene Devices with a Helium Ion Beam Lemme, Max C.; Bell, David C.; Williams, James R. ACS Nano, Vol. 3, Issue 9 https://doi.org/10.1021/nn900744z	journal	August 2009
Strain-induced metal–insulator phase coexistence in perovskite manganites Ahn, K. H.; Lookman, T.; Bishop, A. R. Nature, Vol. 428, Issue 6981 https://doi.org/10.1038/nature02364	journal	March 2004
The chemistry of two-dimensional layered transition metal dichalcogenide nanosheets Chhowalla, Manish; Shin, Hyeon Suk; Eda, Goki Nature Chemistry, Vol. 5, Issue 4, p. 263-275 https://doi.org/10.1038/nchem.1589	journal	April 2013
Hopping transport through defect-induced localized states in molybdenum disulphide Qiu, Hao; Xu, Tao; Wang, Zilu Nature Communications, Vol. 4, Issue 1 https://doi.org/10.1038/ncomms3642	journal	October 2013
Strain induced superconductivity in the parent compound BaFe2As2 Engelmann, J.; Grinenko, V.; Chekhonin, P. Nature Communications, Vol. 4, Issue 1 https://doi.org/10.1038/ncomms3877	journal	December 2013
The rise of graphene Geim, A. K.; Novoselov, K. S. Nature Materials, Vol. 6, Issue 3, p. 183-191 https://doi.org/10.1038/nmat1849	journal	March 2007
Graphene transistors Schwierz, Frank Nature Nanotechnology, Vol. 5, Issue 7 https://doi.org/10.1038/nnano.2010.89	journal	May 2010
Nano Josephson superconducting tunnel junctions in YBa2Cu3O7–δ directly patterned with a focused helium ion beam Cybart, Shane A.; Cho, E. Y.; Wong, T. J. Nature Nanotechnology, Vol. 10, Issue 7 https://doi.org/10.1038/nnano.2015.76	journal	April 2015
Maskless Lithography and in situ Visualization of Conductivity of Graphene using Helium Ion Microscopy Iberi, Vighter; Vlassiouk, Ivan; Zhang, X. -G. Scientific Reports, Vol. 5, Issue 1 https://doi.org/10.1038/srep11952	journal	July 2015
Quantitative secondary electron imaging for work function extraction at atomic level and layer identification of graphene Zhou, Yangbo; Fox, Daniel S.; Maguire, Pierce Scientific Reports, Vol. 6, Issue 1 https://doi.org/10.1038/srep21045	journal	February 2016
Focused helium-ion beam irradiation effects on electrical transport properties of few-layer WSe2: enabling nanoscale direct write homo-junctions Stanford, Michael G.; Pudasaini, Pushpa Raj; Belianinov, Alex Scientific Reports, Vol. 6, Issue 1 https://doi.org/10.1038/srep27276	journal	June 2016
Nanoforging Single Layer MoSe2 Through Defect Engineering with Focused Helium Ion Beams Iberi, Vighter; Liang, Liangbo; Ievlev, Anton V. Scientific Reports, Vol. 6, Issue 1 https://doi.org/10.1038/srep30481	journal	August 2016
Enhanced material purity and resolution via synchronized laser assisted electron beam induced deposition of platinum Roberts, Nicholas A.; Fowlkes, Jason D.; Magel, Gregory A. Nanoscale, Vol. 5, Issue 1 https://doi.org/10.1039/C2NR33014H	journal	January 2013
Direct observation of structural and defect evolution in C-rich SiC using in situ helium ion microscopy Liu, Wen; Cheng, Laifei; Li, Xiaoqiang Nanoscale, Vol. 8, Issue 2 https://doi.org/10.1039/C5NR06659J	journal	January 2016
Understanding the interaction between energetic ions and freestanding graphene towards practical 2D perforation Buchheim, Jakob; Wyss, Roman M.; Shorubalko, Ivan Nanoscale, Vol. 8, Issue 15 https://doi.org/10.1039/C6NR00154H	journal	January 2016
Emerging fabrication techniques for 3D nano-structuring in plasmonics and single molecule studies De Angelis, F.; Liberale, C.; Coluccio, M. L. Nanoscale, Vol. 3, Issue 7 https://doi.org/10.1039/c1nr10124b	journal	January 2011
Sub-diffraction imaging of nitrogen-vacancy centers in diamond by stimulated emission depletion and structured illumination Yang, Xusan; Tzeng, Yan-Kai; Zhu, Zhouyang RSC Advances, Vol. 4, Issue 22 https://doi.org/10.1039/c3ra47240j	journal	January 2014
Ranges of Energetic Atoms in Solids Oen, O. S.; Holmes, D. K.; Robinson, Mark T. Journal of Applied Physics, Vol. 34, Issue 2 https://doi.org/10.1063/1.1702604	journal	February 1963
Range and Damage Effects of Tunnel Trajectories in a Wurtzite Structure Beeler, J. R.; Besco, D. G. Journal of Applied Physics, Vol. 34, Issue 9 https://doi.org/10.1063/1.1729823	journal	September 1963
The sensitivity of gas sensor based on single ZnO nanowire modulated by helium ion radiation Liao, L.; Lu, H. B.; Li, J. C. Applied Physics Letters, Vol. 91, Issue 17 https://doi.org/10.1063/1.2800812	journal	October 2007
Gettering of metals by voids in silicon Raineri, V.; Fallica, P. G.; Percolla, G. Journal of Applied Physics, Vol. 78, Issue 6 https://doi.org/10.1063/1.359953	journal	September 1995
Lifetime control in silicon devices by voids induced by He ion implantation Raineri, V.; Fallica, G.; Libertino, S. Journal of Applied Physics, Vol. 79, Issue 12 https://doi.org/10.1063/1.362633	journal	June 1996
Diamond nitrogen-vacancy centers created by scanning focused helium ion beam and annealing Huang, Z.; Li, W. -D.; Santori, C. Applied Physics Letters, Vol. 103, Issue 8 https://doi.org/10.1063/1.4819339	journal	August 2013
Characterization of two-dimensional hexagonal boron nitride using scanning electron and scanning helium ion microscopy Guo, Hongxuan; Gao, Jianhua; Ishida, Nobuyuki Applied Physics Letters, Vol. 104, Issue 3 https://doi.org/10.1063/1.4862819	journal	January 2014
Focused-ion-beam induced damage in thin films of complex oxide BiFeO ₃ Siemons, W.; Beekman, C.; Fowlkes, J. D. APL Materials, Vol. 2, Issue 2 https://doi.org/10.1063/1.4866051	journal	February 2014
YBa ₂ Cu ₃ O ₇₋ _δ superconducting quantum interference devices with metallic to insulating barriers written with a focused helium ion beam Cho, E. Y.; Ma, M. K.; Huynh, Chuong Applied Physics Letters, Vol. 106, Issue 25 https://doi.org/10.1063/1.4922640	journal	June 2015
A Monte Carlo calculation of low-energy secondary electron emission from metals Koshikawa, T.; Shimizu, R. Journal of Physics D: Applied Physics, Vol. 7, Issue 9 https://doi.org/10.1088/0022-3727/7/9/318	journal	June 1974
Review of current progress in nanometrology with the helium ion microscope Postek, Michael T.; Vladár, András; Archie, Charles Measurement Science and Technology, Vol. 22, Issue 2 https://doi.org/10.1088/0957-0233/22/2/024004	journal	December 2010
Interdigitated 50 nm Ti electrode arrays fabricated using XeF ₂ enhanced focused ion beam etching Santschi, Ch; Jenke, M.; Hoffmann, P. Nanotechnology, Vol. 17, Issue 11 https://doi.org/10.1088/0957-4484/17/11/002	journal	May 2006
Simulating the effects of surface diffusion on electron beam induced deposition via a three-dimensional Monte Carlo simulation Smith, Daryl A.; Fowlkes, Jason D.; Rack, Philip D. Nanotechnology, Vol. 19, Issue 41 https://doi.org/10.1088/0957-4484/19/41/415704	journal	September 2008
Resists for sub-20-nm electron beam lithography with a focus on HSQ: state of the art Grigorescu, A. E.; Hagen, C. W. Nanotechnology, Vol. 20, Issue 29 https://doi.org/10.1088/0957-4484/20/29/292001	journal	July 2009
Precision cutting and patterning of graphene with helium ions Bell, D. C.; Lemme, M. C.; Stern, L. A. Nanotechnology, Vol. 20, Issue 45 https://doi.org/10.1088/0957-4484/20/45/455301	journal	October 2009
Monte Carlo simulation of focused helium ion beam induced deposition Smith, Daryl A.; Joy, David C.; Rack, Philip D. Nanotechnology, Vol. 21, Issue 17 https://doi.org/10.1088/0957-4484/21/17/175302	journal	April 2010
Nanopillar growth by focused helium ion-beam-induced deposition Chen, Ping; Veldhoven, Emile van; Sanford, Colin A. Nanotechnology, Vol. 21, Issue 45 https://doi.org/10.1088/0957-4484/21/45/455302	journal	October 2010
Rapid and precise scanning helium ion microscope milling of solid-state nanopores for biomolecule detection Yang, Jijin; Ferranti, David C.; Stern, Lewis A. Nanotechnology, Vol. 22, Issue 28 https://doi.org/10.1088/0957-4484/22/28/285310	journal	June 2011
Helium ion beam milling to create a nano-structured domain wall magnetoresistance spin valve Wang, Yudong; Boden, S. A.; Bagnall, D. M. Nanotechnology, Vol. 23, Issue 39 https://doi.org/10.1088/0957-4484/23/39/395302	journal	September 2012
A comparison of neon versus helium ion beam induced deposition via Monte Carlo simulations Timilsina, Rajendra; Smith, Daryl A.; Rack, Philip D. Nanotechnology, Vol. 24, Issue 11 https://doi.org/10.1088/0957-4484/24/11/115302	journal	February 2013
Synthesis of nanowires via helium and neon focused ion beam induced deposition with the gas field ion microscope Wu, H. M.; Stern, L. A.; Chen, J. H. Nanotechnology, Vol. 24, Issue 17 https://doi.org/10.1088/0957-4484/24/17/175302	journal	April 2013
Helium ion microscopy of graphene: beam damage, image quality and edge contrast Fox, D.; Zhou, Y. B.; O’Neill, A. Nanotechnology, Vol. 24, Issue 33 https://doi.org/10.1088/0957-4484/24/33/335702	journal	July 2013
Enhanced by-product desorption via laser assisted electron beam induced deposition of W(CO) ₆ with improved conductivity and resolution Roberts, Nicholas A.; Gonzalez, Carlos M.; Fowlkes, Jason D. Nanotechnology, Vol. 24, Issue 41 https://doi.org/10.1088/0957-4484/24/41/415301	journal	September 2013
Monte Carlo simulations of nanoscale focused neon ion beam sputtering Timilsina, Rajendra; Rack, Philip D. Nanotechnology, Vol. 24, Issue 49 https://doi.org/10.1088/0957-4484/24/49/495303	journal	November 2013
Monte Carlo simulations of nanoscale focused neon ion beam sputtering of copper: elucidating resolution limits and sub-surface damage Timilsina, R.; Tan, S.; Livengood, R. Nanotechnology, Vol. 25, Issue 48 https://doi.org/10.1088/0957-4484/25/48/485704	journal	November 2014
Direct-write three-dimensional nanofabrication of nanopyramids and nanocones on Si by nanotumefaction using a helium ion microscope Zhang, L.; Heinig, N. F.; Bazargan, S. Nanotechnology, Vol. 26, Issue 25 https://doi.org/10.1088/0957-4484/26/25/255303	journal	June 2015
Graphene engineering by neon ion beams Iberi, Vighter; Ievlev, Anton V.; Vlassiouk, Ivan Nanotechnology, Vol. 27, Issue 12 https://doi.org/10.1088/0957-4484/27/12/125302	journal	February 2016
Monte Carlo simulations of nanoscale Ne ⁺ ion beam sputtering: investigating the influence of surface effects, interstitial formation, and the nanostructural evolution Mahady, Kyle; Tan, Shida; Greenzweig, Yuval Nanotechnology, Vol. 28, Issue 4 https://doi.org/10.1088/1361-6528/28/4/045305	journal	December 2016
Protons, ions, electrons and the future of the SEM Joy, D. C. Journal of Physics: Conference Series, Vol. 241 https://doi.org/10.1088/1742-6596/241/1/012002	journal	July 2010
Monte Carlo simulation of topographic contrast in scanning ion microscope Ohya, K. Journal of Electron Microscopy, Vol. 53, Issue 3 https://doi.org/10.1093/jmicro/53.3.229	journal	June 2004
Simulation Study on Image Contrast and Spatial Resolution in Helium Ion Microscope Inai, K.; Ohya, K.; Ishitani, T. Journal of Electron Microscopy, Vol. 56, Issue 5 https://doi.org/10.1093/jmicro/dfm024	journal	October 2007
Theory of Secondary Electron Emission by High-Speed Ions Sternglass, E. J. Physical Review, Vol. 108, Issue 1 https://doi.org/10.1103/PhysRev.108.1	journal	October 1957
Statistics of ion-induced kinetic electron emission: A comparison between experimental and Monte Carlo–simulated results Ohya, K.; Aumayr, F.; Winter, H. Physical Review B, Vol. 46, Issue 5 https://doi.org/10.1103/PhysRevB.46.3101	journal	August 1992
Strain Doping: Reversible Single-Axis Control of a Complex Oxide Lattice via Helium Implantation Guo, Hangwen; Dong, Shuai; Rack, Philip D. Physical Review Letters, Vol. 114, Issue 25 https://doi.org/10.1103/PhysRevLett.114.256801	journal	June 2015
Energy Gaps in Graphene Nanoribbons Son, Young-Woo; Cohen, Marvin L.; Louie, Steven G. Physical Review Letters, Vol. 97, Issue 21 https://doi.org/10.1103/PhysRevLett.97.216803	journal	November 2006
Energy Band-Gap Engineering of Graphene Nanoribbons Han, Melinda Y.; Özyilmaz, Barbaros; Zhang, Yuanbo Physical Review Letters, Vol. 98, Issue 20 https://doi.org/10.1103/PhysRevLett.98.206805	journal	May 2007
Innovative localized lifetime control in high-speed IGBTs Saggio, M.; Raineri, V.; Letor, R. IEEE Electron Device Letters, Vol. 18, Issue 7 https://doi.org/10.1109/55.596928	journal	July 1997
Electron beam lithography in nanoscale fabrication: recent development Tseng, A. A.; Chen, C. D. IEEE Transactions on Electronics Packaging Manufacturing, Vol. 26, Issue 2 https://doi.org/10.1109/TEPM.2003.817714	journal	April 2003
Evaluation of neon focused ion beam milling for TEM sample preparation: TEM SAMPLE PREPARATION BY NE-MILLING Pekin, T. C.; Allen, F. I.; Minor, A. M. Journal of Microscopy, Vol. 264, Issue 1 https://doi.org/10.1111/jmi.12416	journal	May 2016
Testing new chemistries for mask repair with focused ion beam gas assisted etching Stanishevsky, Andrei; Edinger, Klaus; Orloff, Jon Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 21, Issue 6 https://doi.org/10.1116/1.1624253	journal	January 2003
Membrane folding by helium ion implantation for three-dimensional device fabrication Arora, William J.; Sijbrandij, Sybren; Stern, Lewis Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 25, Issue 6 https://doi.org/10.1116/1.2779049	journal	January 2007
Helium ion microscope invasiveness and imaging study for semiconductor applications Livengood, Richard H.; Greenzweig, Yuval; Liang, Ted Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 25, Issue 6 https://doi.org/10.1116/1.2794319	journal	January 2007
Focused ion beam iodine-enhanced etching of high aspect ratio holes in InP photonic crystals Callegari, V.; Nellen, P. M.; Kaufmann, J. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 25, Issue 6 https://doi.org/10.1116/1.2804607	journal	January 2007
Gas-assisted focused electron beam and ion beam processing and fabrication Utke, Ivo; Hoffmann, Patrik; Melngailis, John Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 26, Issue 4 https://doi.org/10.1116/1.2955728	journal	January 2008
Elemental analysis with the helium ion microscope Sijbrandij, Sybren; Thompson, Bill; Notte, John Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 26, Issue 6 https://doi.org/10.1116/1.2993262	journal	November 2008
Sub-10-nm nanolithography with a scanning helium beam Sidorkin, Vadim; van Veldhoven, Emile; van der Drift, Emile Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 27, Issue 4 https://doi.org/10.1116/1.3182742	journal	January 2009
Beam induced deposition of platinum using a helium ion microscope Sanford, Colin A.; Stern, Lewis; Barriss, Louise Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 27, Issue 6 https://doi.org/10.1116/1.3237095	journal	January 2009
Subsurface damage from helium ions as a function of dose, beam energy, and dose rate Livengood, Richard; Tan, Shida; Greenzweig, Yuval Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 27, Issue 6 https://doi.org/10.1116/1.3237101	journal	January 2009
Precision material modification and patterning with He ions Bell, David C.; Lemme, Max C.; Stern, Lewis A. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 27, Issue 6 https://doi.org/10.1116/1.3237113	journal	January 2009
Scanning-helium-ion-beam lithography with hydrogen silsesquioxane resist Winston, D.; Cord, B. M.; Ming, B. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 27, Issue 6 https://doi.org/10.1116/1.3250204	journal	January 2009
Gas field ion source and liquid metal ion source charged particle material interaction study for semiconductor nanomachining applications Tan, Shida; Livengood, Richard; Shima, Darryl Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, Vol. 28, Issue 6 https://doi.org/10.1116/1.3511509	journal	November 2010
Fabrication and initial characterization of ultrahigh aspect ratio vias in gold using the helium ion microscope Scipioni, Larry; Ferranti, David C.; Smentkowski, Vincent S. Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, Vol. 28, Issue 6 https://doi.org/10.1116/1.3517514	journal	November 2010
Model for nanopillar growth by focused helium ion-beam-induced deposition Alkemade, Paul F. A.; Chen, Ping; van Veldhoven, Emile Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, Vol. 28, Issue 6 https://doi.org/10.1116/1.3517536	journal	November 2010
Pulsed helium ion beam induced deposition: A means to high growth rates Alkemade, Paul F. A.; Miro, Hozanna; van Veldhoven, Emile Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, Vol. 29, Issue 6 https://doi.org/10.1116/1.3656347	journal	November 2011
Nanomachining with a focused neon beam: A preliminary investigation for semiconductor circuit editing and failure analysis Tan, Shida; Livengood, Richard; Hack, Paul Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, Vol. 29, Issue 6 https://doi.org/10.1116/1.3660797	journal	November 2011
Structural characterization of He ion microscope platinum deposition and sub-surface silicon damage Drezner, Yariv; Greenzweig, Yuval; Fishman, Daniel Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, Vol. 30, Issue 4 https://doi.org/10.1116/1.4732074	journal	July 2012
Combined helium ion beam and nanoimprint lithography attains 4 nm half-pitch dense patterns Li, Wen-Di; Wu, Wei; Stanley Williams, Richard Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, Vol. 30, Issue 6 https://doi.org/10.1116/1.4758768	journal	November 2012
Tungsten-based pillar deposition by helium ion microscope and beam-induced substrate damage Kohama, Kazuyuki; Iijima, Tomohiko; Hayashida, Misa Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, Vol. 31, Issue 3 https://doi.org/10.1116/1.4800983	journal	May 2013
Helium ion microscopy Hlawacek, Gregor; Veligura, Vasilisa; van Gastel, Raoul Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, Vol. 32, Issue 2 https://doi.org/10.1116/1.4863676	journal	March 2014
Focused helium and neon ion beam induced etching for advanced extreme ultraviolet lithography mask repair Gonzalez, Carlos M.; Timilsina, Rajendra; Li, Guoliang Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, Vol. 32, Issue 2 https://doi.org/10.1116/1.4868027	journal	March 2014
Mechanism and applications of helium transmission milling in thin membranes Tan, Shida; Klein, Kate; Shima, Darryl Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, Vol. 32, Issue 6 https://doi.org/10.1116/1.4900728	journal	November 2014
Temperature dependence of maskless ion beam assisted etching of InP and Si using focused ion beam Ochiai, Yukinori Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 5, Issue 1 https://doi.org/10.1116/1.583918	journal	January 1987
In situ development of ion bombarded poly(methylmethacrylate) resist in a reactive gas ambient Gamo, Kenji Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 6, Issue 3 https://doi.org/10.1116/1.584294	journal	May 1988
Ion beam assisted etching of GaAs by low energy focused ion beam Kosugi, T. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 9, Issue 5 https://doi.org/10.1116/1.585667	journal	September 1991
Characteristics of gas-assisted focused ion beam etching Young, R. J. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 11, Issue 2 https://doi.org/10.1116/1.586708	journal	March 1993
H2O enhanced focused ion beam micromachining Stark, T. J. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 13, Issue 6 https://doi.org/10.1116/1.588395	journal	November 1995
Gas assisted etching of copper with focused ion beams Edinger, K. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 17, Issue 6 https://doi.org/10.1116/1.590954	journal	January 1999
Enhancement of Ferroelectricity in Strained BaTiO₃ Thin Films Choi, K. J.; Biegalski, M.; Li, Y. L. Science, Vol. 306, Issue 5698, p. 1005-1009 https://doi.org/10.1126/science.1103218	journal	November 2004
Orbital Physics in Transition-Metal Oxides Tokura, Y. Science, Vol. 288, Issue 5465 https://doi.org/10.1126/science.288.5465.462	journal	April 2000
Focused Ga Ion Beam Etching of Si in Chlorine Gas Komuro, Masanori; Watanabe, Norikazu; Hiroshima, Hiroshi Japanese Journal of Applied Physics, Vol. 29, Issue Part 1, No. 10 https://doi.org/10.1143/JJAP.29.2288	journal	October 1990
Distribution of Interstitials and Vacancies Produced by an Incident and Fast Neutron Yoshida, Masayuki Journal of the Physical Society of Japan, Vol. 16, Issue 1 https://doi.org/10.1143/JPSJ.16.44	journal	January 1961
Materials for Flexible, Stretchable Electronics: Graphene and 2D Materials Kim, Sang Jin; Choi, Kyoungjun; Lee, Bora Annual Review of Materials Research, Vol. 45, Issue 1 https://doi.org/10.1146/annurev-matsci-070214-020901	journal	July 2015
Origin of the Difference in the Resistivity of As-Grown Focused-Ion- and Focused-Electron-Beam-Induced Pt Nanodeposits De Teresa, J. M.; Córdoba, R.; Fernández-Pacheco, A. Journal of Nanomaterials, Vol. 2009 https://doi.org/10.1155/2009/936863	journal	January 2009
Voids in Silicon by He Implantation: From Basic to Applications Raineri, V.; Saggio, M.; Rimini, E. Journal of Materials Research, Vol. 15, Issue 7 https://doi.org/10.1557/JMR.2000.0211	journal	July 2000
Novel nanosample preparation with a helium ion microscope Rudneva, Maria; van Veldhoven, Emile; Malladi, Sairam K. Journal of Materials Research, Vol. 28, Issue 8 https://doi.org/10.1557/jmr.2013.30	journal	April 2013
A Tunable Strain Sensor Using Nanogranular Metals Schwalb, Christian H.; Grimm, Christina; Baranowski, Markus Sensors, Vol. 10, Issue 11 https://doi.org/10.3390/s101109847	journal	November 2010
Membrane Thickness Dependence of Nanopore Formation with a Focused Helium Ion Beam Sawafta, Furat; Carlsen, Autumn; Hall, Adam Sensors, Vol. 14, Issue 5 https://doi.org/10.3390/s140508150	journal	May 2014
Nano-structuring, surface and bulk modification with a focused helium ion beam Fox, Daniel; Chen, Yanhui; Faulkner, Colm C. Beilstein Journal of Nanotechnology, Vol. 3 https://doi.org/10.3762/bjnano.3.67	journal	January 2012
Digging gold: keV He ⁺ ion interaction with Au Veligura, Vasilisa; Hlawacek, Gregor; Berkelaar, Robin P. Beilstein Journal of Nanotechnology, Vol. 4 https://doi.org/10.3762/bjnano.4.53	journal	January 2013
Fabrication of carbon nanomembranes by helium ion beam lithography Zhang, Xianghui; Vieker, Henning; Beyer, André Beilstein Journal of Nanotechnology, Vol. 5 https://doi.org/10.3762/bjnano.5.20	journal	February 2014
Recent Advances in Nanofabrication Techniques and Applications Cui, Bo https://doi.org/10.5772/859	book	December 2011

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