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Title: Sputtering of pure boron using a magnetron without a radio-frequency supply

Authors:
 [1] ; ORCiD logo [2] ; ORCiD logo [3] ;  [1]
  1. Institute of High Current Electronics SB RAS, 2/3 Academichesky Ave., Tomsk 634055, Russia, Tomsk State University of Control Systems and Radioelectronics, 40 Lenin Ave., Tomsk 634050, Russia
  2. Lawrence Berkeley National Laboratory, 1 Cyclotron Road, Berkeley, California 94720, USA
  3. Institute of High Current Electronics SB RAS, 2/3 Academichesky Ave., Tomsk 634055, Russia
Publication Date:
Grant/Contract Number:
AC02-05CH11231
Type:
Publisher's Accepted Manuscript
Journal Name:
Review of Scientific Instruments
Additional Journal Information:
Journal Volume: 88; Journal Issue: 4; Related Information: CHORUS Timestamp: 2018-02-14 20:23:53; Journal ID: ISSN 0034-6748
Publisher:
American Institute of Physics
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English
OSTI Identifier:
1361821