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Title: Phonon wave effects in the thermal transport of epitaxial TiN/(Al,Sc)N metal/semiconductor superlattices

Authors:
 [1] ;  [2] ;  [3] ;  [4] ; ORCiD logo [4] ;  [2] ;  [5]
  1. Department of Materials Science and Engineering, University of California, Berkeley, California 94720, USA
  2. School of Electrical and Computer Engineering, Purdue University, West Lafayette, Indiana 47907, USA, Birck Nanotechnology Center, Purdue University, West Lafayette, Indiana 47907, USA
  3. Department of Mechanical Engineering, University of Delaware, Newark, Delaware 19716, USA
  4. Birck Nanotechnology Center, Purdue University, West Lafayette, Indiana 47907, USA, School of Mechanical Engineering, Purdue University, West Lafayette, Indiana 47907, USA
  5. Bradley Department of Electrical and Computer Engineering and Department of Materials Science and Engineering, Virginia Tech, Blacksburg, Virginia 24061, USA
Publication Date:
Grant/Contract Number:
CBET-1048616
Type:
Publisher's Accepted Manuscript
Journal Name:
Journal of Applied Physics
Additional Journal Information:
Journal Volume: 121; Journal Issue: 1; Related Information: CHORUS Timestamp: 2018-02-14 10:51:43; Journal ID: ISSN 0021-8979
Publisher:
American Institute of Physics
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English
OSTI Identifier:
1361732