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Title: Neutron reflectometry investigations of interfacial structures of Ti/TiN layers deposited by magnetron sputtering

Authors:
; ; ; ; ; ; ; ; ;
Publication Date:
Type:
Publisher's Accepted Manuscript
Journal Name:
Thin Solid Films
Additional Journal Information:
Journal Volume: 616; Journal Issue: C; Related Information: CHORUS Timestamp: 2017-10-04 15:07:55; Journal ID: ISSN 0040-6090
Publisher:
Elsevier
Sponsoring Org:
USDOE
Country of Publication:
Netherlands
Language:
English
OSTI Identifier:
1359952