skip to main content

DOE PAGESDOE PAGES

Title: Prediction of recrystallization times in electroplated copper thin films

Authors:
; ; ; ; ; ; ;
Publication Date:
Grant/Contract Number:
AC02-98CH10886
Type:
Publisher's Accepted Manuscript
Journal Name:
Thin Solid Films
Additional Journal Information:
Journal Volume: 615; Journal Issue: C; Related Information: CHORUS Timestamp: 2017-10-04 15:39:29; Journal ID: ISSN 0040-6090
Publisher:
Elsevier
Sponsoring Org:
USDOE
Country of Publication:
Netherlands
Language:
English
OSTI Identifier:
1359949