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Title: Tip-Based Nanofabrication for Scalable Manufacturing

Tip-based nanofabrication (TBN) is a family of emerging nanofabrication techniques that use a nanometer scale tip to fabricate nanostructures. Here in this review, we first introduce the history of the TBN and the technology development. We then briefly review various TBN techniques that use different physical or chemical mechanisms to fabricate features and discuss some of the state-of-the-art techniques. Subsequently, we focus on those TBN methods that have demonstrated potential to scale up the manufacturing throughput. Finally, we discuss several research directions that are essential for making TBN a scalable nano-manufacturing technology.
Authors:
 [1] ;  [2] ; ORCiD logo [3]
  1. IBM, Yorktown Heights, NY (United States). Thomas J. Watson Research Center, Dept. of Science and Solutions
  2. Daegu Gyeongbuk Inst. of Science and Technology (DGIST), Daegu (Korea)
  3. Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States). Center for Nanophase Materials Science (CNMS) and Inst. for Functional Imaging of Materials
Publication Date:
Grant/Contract Number:
AC05-00OR22725
Type:
Accepted Manuscript
Journal Name:
Micromachines
Additional Journal Information:
Journal Volume: 8; Journal Issue: 3; Journal ID: ISSN 2072-666X
Research Org:
Oak Ridge National Laboratory (ORNL), Oak Ridge, TN (United States). Center for Nanophase Materials Sciences (CNMS)
Sponsoring Org:
USDOE Laboratory Directed Research and Development (LDRD) Program
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; 77 NANOSCIENCE AND NANOTECHNOLOGY; tip-based nanofabrication; scanning probe lithography; scalable nanomanufacturing; atomic force microscope; scanning tunneling microscope
OSTI Identifier:
1356926

Hu, Huan, Kim, Hoe, and Somnath, Suhas. Tip-Based Nanofabrication for Scalable Manufacturing. United States: N. p., Web. doi:10.3390/mi8030090.
Hu, Huan, Kim, Hoe, & Somnath, Suhas. Tip-Based Nanofabrication for Scalable Manufacturing. United States. doi:10.3390/mi8030090.
Hu, Huan, Kim, Hoe, and Somnath, Suhas. 2017. "Tip-Based Nanofabrication for Scalable Manufacturing". United States. doi:10.3390/mi8030090. https://www.osti.gov/servlets/purl/1356926.
@article{osti_1356926,
title = {Tip-Based Nanofabrication for Scalable Manufacturing},
author = {Hu, Huan and Kim, Hoe and Somnath, Suhas},
abstractNote = {Tip-based nanofabrication (TBN) is a family of emerging nanofabrication techniques that use a nanometer scale tip to fabricate nanostructures. Here in this review, we first introduce the history of the TBN and the technology development. We then briefly review various TBN techniques that use different physical or chemical mechanisms to fabricate features and discuss some of the state-of-the-art techniques. Subsequently, we focus on those TBN methods that have demonstrated potential to scale up the manufacturing throughput. Finally, we discuss several research directions that are essential for making TBN a scalable nano-manufacturing technology.},
doi = {10.3390/mi8030090},
journal = {Micromachines},
number = 3,
volume = 8,
place = {United States},
year = {2017},
month = {3}
}

Works referenced in this record:

Silicon microcantilever hotplates with high temperature uniformity
journal, June 2009
  • Privorotskaya, Natalya L.; King, William P.
  • Sensors and Actuators A: Physical, Vol. 152, Issue 2, p. 160-167
  • DOI: 10.1016/j.sna.2009.03.020

Nanometer-scale flow of molten polyethylene from a heated atomic force microscope tip
journal, May 2012

Electrical, Thermal, and Mechanical Characterization of Silicon Microcantilever Heaters
journal, December 2006
  • Lee, Jungchul; Beechem, Thomas; Wright, Tanya L.
  • Journal of Microelectromechanical Systems, Vol. 15, Issue 6, p. 1644-1655
  • DOI: 10.1109/JMEMS.2006.886020

Microcantilever hotplates with temperature-compensated piezoresistive strain sensors
journal, May 2008
  • Goericke, Fabian; Lee, Jungchul; King, William P.
  • Sensors and Actuators A: Physical, Vol. 143, Issue 2, p. 181-190
  • DOI: 10.1016/j.sna.2007.10.049

New Approaches to Nanofabrication:  Molding, Printing, and Other Techniques
journal, April 2005
  • Gates, Byron D.; Xu, Qiaobing; Stewart, Michael
  • Chemical Reviews, Vol. 105, Issue 4, p. 1171-1196
  • DOI: 10.1021/cr030076o

The Evolution of Dip-Pen Nanolithography
journal, January 2004
  • Ginger, David S.; Zhang, Hua; Mirkin, Chad A.
  • Angewandte Chemie International Edition, Vol. 43, Issue 1, p. 30-45
  • DOI: 10.1002/anie.200300608

Nanotopographical imaging using a heated atomic force microscope cantilever probe
journal, May 2007
  • Kim, K. J.; Park, K.; Lee, J.
  • Sensors and Actuators A: Physical, Vol. 136, Issue 1, p. 95-103
  • DOI: 10.1016/j.sna.2006.10.052

Complex Optical Surfaces Formed by Replica Molding Against Elastomeric Masters
journal, July 1996

Soft Lithography
journal, August 1998

Cantilevers with nano-heaters for thermomechanical storage application
journal, June 2003