skip to main content

DOE PAGESDOE PAGES

Title: Tip-Based Nanofabrication for Scalable Manufacturing

Tip-based nanofabrication (TBN) is a family of emerging nanofabrication techniques that use a nanometer scale tip to fabricate nanostructures. Here in this review, we first introduce the history of the TBN and the technology development. We then briefly review various TBN techniques that use different physical or chemical mechanisms to fabricate features and discuss some of the state-of-the-art techniques. Subsequently, we focus on those TBN methods that have demonstrated potential to scale up the manufacturing throughput. Finally, we discuss several research directions that are essential for making TBN a scalable nano-manufacturing technology.
Authors:
 [1] ;  [2] ; ORCiD logo [3]
  1. IBM, Yorktown Heights, NY (United States). Thomas J. Watson Research Center, Dept. of Science and Solutions
  2. Daegu Gyeongbuk Inst. of Science and Technology (DGIST), Daegu (Korea)
  3. Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States). Center for Nanophase Materials Science (CNMS) and Inst. for Functional Imaging of Materials
Publication Date:
Grant/Contract Number:
AC05-00OR22725
Type:
Accepted Manuscript
Journal Name:
Micromachines
Additional Journal Information:
Journal Volume: 8; Journal Issue: 3; Journal ID: ISSN 2072-666X
Research Org:
Oak Ridge National Laboratory (ORNL), Oak Ridge, TN (United States). Center for Nanophase Materials Sciences (CNMS)
Sponsoring Org:
USDOE Laboratory Directed Research and Development (LDRD) Program
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; 77 NANOSCIENCE AND NANOTECHNOLOGY; tip-based nanofabrication; scanning probe lithography; scalable nanomanufacturing; atomic force microscope; scanning tunneling microscope
OSTI Identifier:
1356926