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Title: Vacuum Gap Microstrip Microwave Resonators for 2.5-D Integration in Quantum Computing

We demonstrate vacuum gap λ/2 microwave resonators as a route toward higher integration in superconducting qubit circuits. The resonators are fabricated from pieces on two silicon chips bonded together with an In-Sb bond. Measurements of the devices yield resonant frequencies in good agreement with simulations. Furthermore, we discuss creating low loss circuits in this geometry.
Authors:
ORCiD logo [1] ;  [1] ;  [1]
  1. Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
Publication Date:
Report Number(s):
SAND2017-1982J
Journal ID: ISSN 1051-8223; 651397; TRN: US1702154
Grant/Contract Number:
AC04-94AL85000
Type:
Accepted Manuscript
Journal Name:
IEEE Transactions on Applied Superconductivity
Additional Journal Information:
Journal Volume: 27; Journal Issue: 4; Journal ID: ISSN 1051-8223
Publisher:
Institute of Electrical and Electronics Engineers (IEEE)
Research Org:
Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
Sponsoring Org:
USDOE National Nuclear Security Administration (NNSA)
Country of Publication:
United States
Language:
English
Subject:
97 MATHEMATICS AND COMPUTING; dielectric losses; flip-chip devices; quantum computing; wafer scale integration
OSTI Identifier:
1356209

Lewis, Rupert M., Henry, Michael David, and Schroeder, Katlin. Vacuum Gap Microstrip Microwave Resonators for 2.5-D Integration in Quantum Computing. United States: N. p., Web. doi:10.1109/TASC.2017.2672719.
Lewis, Rupert M., Henry, Michael David, & Schroeder, Katlin. Vacuum Gap Microstrip Microwave Resonators for 2.5-D Integration in Quantum Computing. United States. doi:10.1109/TASC.2017.2672719.
Lewis, Rupert M., Henry, Michael David, and Schroeder, Katlin. 2017. "Vacuum Gap Microstrip Microwave Resonators for 2.5-D Integration in Quantum Computing". United States. doi:10.1109/TASC.2017.2672719. https://www.osti.gov/servlets/purl/1356209.
@article{osti_1356209,
title = {Vacuum Gap Microstrip Microwave Resonators for 2.5-D Integration in Quantum Computing},
author = {Lewis, Rupert M. and Henry, Michael David and Schroeder, Katlin},
abstractNote = {We demonstrate vacuum gap λ/2 microwave resonators as a route toward higher integration in superconducting qubit circuits. The resonators are fabricated from pieces on two silicon chips bonded together with an In-Sb bond. Measurements of the devices yield resonant frequencies in good agreement with simulations. Furthermore, we discuss creating low loss circuits in this geometry.},
doi = {10.1109/TASC.2017.2672719},
journal = {IEEE Transactions on Applied Superconductivity},
number = 4,
volume = 27,
place = {United States},
year = {2017},
month = {2}
}