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Title: Vacuum Gap Microstrip Microwave Resonators for 2.5-D Integration in Quantum Computing

We demonstrate vacuum gap λ/2 microwave resonators as a route toward higher integration in superconducting qubit circuits. The resonators are fabricated from pieces on two silicon chips bonded together with an In-Sb bond. Measurements of the devices yield resonant frequencies in good agreement with simulations. Furthermore, we discuss creating low loss circuits in this geometry.
Authors:
ORCiD logo [1] ;  [1] ;  [1]
  1. Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
Publication Date:
Report Number(s):
SAND2017-1982J
Journal ID: ISSN 1051-8223; 651397; TRN: US1702154
Grant/Contract Number:
AC04-94AL85000
Type:
Accepted Manuscript
Journal Name:
IEEE Transactions on Applied Superconductivity
Additional Journal Information:
Journal Volume: 27; Journal Issue: 4; Journal ID: ISSN 1051-8223
Publisher:
Institute of Electrical and Electronics Engineers (IEEE)
Research Org:
Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
Sponsoring Org:
USDOE National Nuclear Security Administration (NNSA)
Country of Publication:
United States
Language:
English
Subject:
97 MATHEMATICS AND COMPUTING; dielectric losses; flip-chip devices; quantum computing; wafer scale integration
OSTI Identifier:
1356209