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Title: Model mismatch analysis and compensation for modal phase measuring deflectometry

The correspondence residuals due to the discrepancy between the reality and the shape model in use are analyzed for the modal phase measuring deflectometry. Slope residuals are calculated from these discrepancies between the modal estimation and practical acquisition. Since the shape mismatch mainly occurs locally, zonal integration methods which are good at dealing with local variations are used to reconstruct the height residual for compensation. Finally, results of both simulation and experiment indicate the proposed height compensation method is effective, which can be used as a post-complement for the modal phase measuring deflectometry.
Authors:
 [1] ;  [2] ;  [3] ;  [4] ;  [4] ;  [1]
  1. Brookhaven National Lab. (BNL), Upton, NY (United States). National Synchrotron Light Source II (NSLS-II)
  2. Brookhaven National Lab. (BNL), Upton, NY (United States). National Synchrotron Light Source II (NSLS-II); Sichuan Univ., Chengdu (China). School of Aeronautics and Astronautics
  3. Brookhaven National Lab. (BNL), Upton, NY (United States). National Synchrotron Light Source II (NSLS-II); Chinese Academy of Sciences (CAS), Shanghai (China). Shanghai Inst. of Applied Physics; Univ. of Chinese Academy of Sciences, Beijing (China)
  4. Arizona Optical Systems, Tucson, AZ (United States)
Publication Date:
Report Number(s):
BNL-113807-2017-JA
Journal ID: ISSN 1094-4087
Grant/Contract Number:
AC02-98CH10886
Type:
Accepted Manuscript
Journal Name:
Optics Express
Additional Journal Information:
Journal Volume: 25; Journal Issue: 2; Journal ID: ISSN 1094-4087
Publisher:
Optical Society of America (OSA)
Research Org:
Brookhaven National Lab. (BNL), Upton, NY (United States)
Sponsoring Org:
USDOE Office of Science (SC), Basic Energy Sciences (BES) (SC-22)
Contributing Orgs:
Sichuan Univ., Chengdu (China); Arizona Optical Systems, Tucson, AZ (United States); Univ. of Chinese Academy of Sciences, Beijing (China); Chinese Academy of Sciences (CAS), Shanghai (China)
Country of Publication:
United States
Language:
English
Subject:
47 OTHER INSTRUMENTATION; Camera calibration; Distortion; Fringes; Phase noise; Polarization mode dispersion; Ray tracing; Instrumentation, measurement, and metrology; Phase measurement; Metrology
OSTI Identifier:
1354707