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Title: One-dimensional stitching interferometry assisted by a triple-beam interferometer

Abstract

In this work, we proposed for stitching interferometry to use a triple-beam interferometer to measure both the distance and the tilt for all sub-apertures before the stitching process. The relative piston between two neighboring sub-apertures is then calculated by using the data in the overlapping area. Comparisons are made between our method, and the classical least-squares principle stitching method. Our method can improve the accuracy and repeatability of the classical stitching method when a large number of sub-aperture topographies are taken into account. Our simulations and experiments on flat and spherical mirrors indicate that our proposed method can decrease the influence of the interferometer error from the stitched result. The comparison of stitching system with Fizeau interferometry data is about 2 nm root mean squares and the repeatability is within ± 2.5 nm peak to valley.

Authors:
 [1];  [2];  [3];  [2];  [2]
  1. Brookhaven National Lab. (BNL), Upton, NY (United States). National Synchrotron Light Source II (NSLS-II); Sichuan Univ., Chengdu (China). School of Aeronautics and Astronautics
  2. Brookhaven National Lab. (BNL), Upton, NY (United States). National Synchrotron Light Source II (NSLS-II)
  3. Brookhaven National Lab. (BNL), Upton, NY (United States). National Synchrotron Light Source II (NSLS-II); Chinese Academy of Sciences (CAS), Shanghai (China). Shanghai Inst. of Applied Physics; Univ. of Chinese Academy of Sciences, Beijing (China)
Publication Date:
Research Org.:
Brookhaven National Lab. (BNL), Upton, NY (United States); Chinese Academy of Sciences (CAS), Shanghai (China)
Sponsoring Org.:
USDOE Office of Science (SC), Basic Energy Sciences (BES); Chinese Scholarship Council; China Central Universities (China)
Contributing Org.:
Sichuan Univ., Chengdu (China); Univ. of Chinese Academy of Sciences, Beijing (China)
OSTI Identifier:
1354698
Report Number(s):
BNL-113801-2017-JA
Journal ID: ISSN 1094-4087
Grant/Contract Number:  
AC02-98CH10886; SCU2015D014
Resource Type:
Accepted Manuscript
Journal Name:
Optics Express
Additional Journal Information:
Journal Volume: 25; Journal Issue: 8; Journal ID: ISSN 1094-4087
Publisher:
Optical Society of America (OSA)
Country of Publication:
United States
Language:
English
Subject:
47 OTHER INSTRUMENTATION; Fizeau interferometry; Interference; Spatial resolution; Stitching interferometry; Systems design; Temperature; Instrumentation, measurement, and metrology; Metrology; X-ray mirrors

Citation Formats

Xue, Junpeng, Huang, Lei, Gao, Bo, Kaznatcheev, Konstantine, and Idir, Mourad. One-dimensional stitching interferometry assisted by a triple-beam interferometer. United States: N. p., 2017. Web. https://doi.org/10.1364/OE.25.009393.
Xue, Junpeng, Huang, Lei, Gao, Bo, Kaznatcheev, Konstantine, & Idir, Mourad. One-dimensional stitching interferometry assisted by a triple-beam interferometer. United States. https://doi.org/10.1364/OE.25.009393
Xue, Junpeng, Huang, Lei, Gao, Bo, Kaznatcheev, Konstantine, and Idir, Mourad. Thu . "One-dimensional stitching interferometry assisted by a triple-beam interferometer". United States. https://doi.org/10.1364/OE.25.009393. https://www.osti.gov/servlets/purl/1354698.
@article{osti_1354698,
title = {One-dimensional stitching interferometry assisted by a triple-beam interferometer},
author = {Xue, Junpeng and Huang, Lei and Gao, Bo and Kaznatcheev, Konstantine and Idir, Mourad},
abstractNote = {In this work, we proposed for stitching interferometry to use a triple-beam interferometer to measure both the distance and the tilt for all sub-apertures before the stitching process. The relative piston between two neighboring sub-apertures is then calculated by using the data in the overlapping area. Comparisons are made between our method, and the classical least-squares principle stitching method. Our method can improve the accuracy and repeatability of the classical stitching method when a large number of sub-aperture topographies are taken into account. Our simulations and experiments on flat and spherical mirrors indicate that our proposed method can decrease the influence of the interferometer error from the stitched result. The comparison of stitching system with Fizeau interferometry data is about 2 nm root mean squares and the repeatability is within ± 2.5 nm peak to valley.},
doi = {10.1364/OE.25.009393},
journal = {Optics Express},
number = 8,
volume = 25,
place = {United States},
year = {2017},
month = {4}
}

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