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Title: Vertical-Substrate MPCVD Epitaxial Nanodiamond Growth

Color center-containing nanodiamonds have many applications in quantum technologies and biology. Diamondoids, molecular-sized diamonds have been used as seeds in chemical vapor deposition (CVD) growth. However, optimizing growth conditions to produce high crystal quality nanodiamonds with color centers requires varying growth conditions that often leads to ad-hoc and time-consuming, one-at-a-time testing of reaction conditions. In order to rapidly explore parameter space, we developed a microwave plasma CVD technique using a vertical, rather than horizontally oriented stage-substrate geometry. With this configuration, temperature, plasma density, and atomic hydrogen density vary continuously along the vertical axis of the substrate. Finally, this variation allowed rapid identification of growth parameters that yield single crystal diamonds down to 10 nm in size and 75 nm diameter optically active center silicon-vacancy (Si-V) nanoparticles. Furthermore, this method may provide a means of incorporating a wide variety of dopants in nanodiamonds without ion irradiation damage.
Authors:
ORCiD logo [1] ;  [2] ;  [3] ;  [4] ;  [4] ;  [4] ;  [4] ;  [5] ;  [2] ;  [6] ;  [4] ;  [7]
  1. Stanford Univ., CA (United States). Dept. of Physics
  2. Stanford Univ., CA (United States). E. L. Ginzton Lab.
  3. Stanford Univ., CA (United States). Dept. of Physics; Stanford Univ., CA (United States). Geballe Lab. for Advanced Materials
  4. Stanford Univ., CA (United States). Geballe Lab. for Advanced Materials; SLAC National Accelerator Lab., Menlo Park, CA (United States). Stanford Institute for Materials and Energy Science (SIMES)
  5. Justus-Liebig Univ., Giessen (Germany). Inst. of Organic Chemistry
  6. Stanford Univ., CA (United States). Dept. of Physics; Stanford Univ., CA (United States). Geballe Lab. for Advanced Materials; SLAC National Accelerator Lab., Menlo Park, CA (United States). Stanford Institute for Materials and Energy Science (SIMES)
  7. Stanford Univ., CA (United States). Dept. of Physics; Stanford Univ., CA (United States). Dept. of Molecular and Cellular Physiology
Publication Date:
Grant/Contract Number:
AC02-76SF00515; 4309
Type:
Accepted Manuscript
Journal Name:
Nano Letters
Additional Journal Information:
Journal Volume: 17; Journal Issue: 3; Journal ID: ISSN 1530-6984
Publisher:
American Chemical Society
Research Org:
SLAC National Accelerator Lab., Menlo Park, CA (United States)
Sponsoring Org:
USDOE Laboratory Directed Research and Development (LDRD) Program; Moore Foundation
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; 37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CHEMISTRY; Cr-related center; MPCVD; nanodiamond; Si-V center; single-crystal diamond
OSTI Identifier:
1353196