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Title: An instrument for in situ coherent x-ray studies of metal-organic vapor phase epitaxy of III-nitrides

Here, we describe an instrument that exploits the ongoing revolution in synchrotron sources, optics, and detectors to enable in situ studies of metal-organic vapor phase epitaxy (MOVPE) growth of III-nitride materials using coherent x-ray methods. The system includes high-resolution positioning of the sample and detector including full rotations, an x-ray transparent chamber wall for incident and diffracted beam access over a wide angular range, and minimal thermal sample motion, giving the sub-micron positional stability and reproducibility needed for coherent x-ray studies. The instrument enables surface x-ray photon correlation spectroscopy, microbeam diffraction, and coherent diffraction imaging of atomic-scale surface and film structure and dynamics during growth, to provide fundamental understanding of MOVPE processes.
Authors:
 [1] ;  [1] ; ORCiD logo [1] ;  [2] ;  [1] ;  [1] ; ORCiD logo [3] ;  [1] ;  [1]
  1. Argonne National Lab. (ANL), Argonne, IL (United States)
  2. Northern Illinois Univ., DeKalb, IL (United States)
  3. Fairview Assoc., Jackson, WY (United States)
Publication Date:
Grant/Contract Number:
AC02-06CH11357
Type:
Accepted Manuscript
Journal Name:
Review of Scientific Instruments
Additional Journal Information:
Journal Volume: 88; Journal Issue: 3; Journal ID: ISSN 0034-6748
Publisher:
American Institute of Physics (AIP)
Research Org:
Argonne National Lab. (ANL), Argonne, IL (United States)
Sponsoring Org:
USDOE Office of Science (SC), Basic Energy Sciences (BES) (SC-22); Materials Sciences and Engineering Division
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; 46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY
OSTI Identifier:
1353038
Alternate Identifier(s):
OSTI ID: 1373969

Ju, Guangxu, Highland, Matthew J., Yanguas-Gil, Angel, Thompson, Carol, Eastman, Jeffrey A., Zhou, Hua, Brennan, Sean M., Stephenson, G. Brian, and Fuoss, Paul H.. An instrument for in situ coherent x-ray studies of metal-organic vapor phase epitaxy of III-nitrides. United States: N. p., Web. doi:10.1063/1.4978656.
Ju, Guangxu, Highland, Matthew J., Yanguas-Gil, Angel, Thompson, Carol, Eastman, Jeffrey A., Zhou, Hua, Brennan, Sean M., Stephenson, G. Brian, & Fuoss, Paul H.. An instrument for in situ coherent x-ray studies of metal-organic vapor phase epitaxy of III-nitrides. United States. doi:10.1063/1.4978656.
Ju, Guangxu, Highland, Matthew J., Yanguas-Gil, Angel, Thompson, Carol, Eastman, Jeffrey A., Zhou, Hua, Brennan, Sean M., Stephenson, G. Brian, and Fuoss, Paul H.. 2017. "An instrument for in situ coherent x-ray studies of metal-organic vapor phase epitaxy of III-nitrides". United States. doi:10.1063/1.4978656. https://www.osti.gov/servlets/purl/1353038.
@article{osti_1353038,
title = {An instrument for in situ coherent x-ray studies of metal-organic vapor phase epitaxy of III-nitrides},
author = {Ju, Guangxu and Highland, Matthew J. and Yanguas-Gil, Angel and Thompson, Carol and Eastman, Jeffrey A. and Zhou, Hua and Brennan, Sean M. and Stephenson, G. Brian and Fuoss, Paul H.},
abstractNote = {Here, we describe an instrument that exploits the ongoing revolution in synchrotron sources, optics, and detectors to enable in situ studies of metal-organic vapor phase epitaxy (MOVPE) growth of III-nitride materials using coherent x-ray methods. The system includes high-resolution positioning of the sample and detector including full rotations, an x-ray transparent chamber wall for incident and diffracted beam access over a wide angular range, and minimal thermal sample motion, giving the sub-micron positional stability and reproducibility needed for coherent x-ray studies. The instrument enables surface x-ray photon correlation spectroscopy, microbeam diffraction, and coherent diffraction imaging of atomic-scale surface and film structure and dynamics during growth, to provide fundamental understanding of MOVPE processes.},
doi = {10.1063/1.4978656},
journal = {Review of Scientific Instruments},
number = 3,
volume = 88,
place = {United States},
year = {2017},
month = {3}
}