A High-Speed Large-Range Tip-Tilt-Piston Micromirror Array

Hopkins, Jonathan B.; Panas, Robert M.; Song, Yuanping; White, Carolyn D.

doi:10.1109/JMEMS.2016.2628723

Title: A High-Speed Large-Range Tip-Tilt-Piston Micromirror Array

Abstract

This work introduces the design of a high fill-factor (>99%) micromirror array (MMA) that consists of 1mm2 hexagonal mirrors, which are expected to each independently achieve continuous, closed-loop control of three degrees of freedom (DOFs)—tip, tilt, and piston—over large ranges (>±10o rotation and >±30μm translation) at high speeds (~45kHz for a 1o amplitude of rotational oscillation). The flexure topology of this array is designed using the Freedom, Actuation, and Constraint Topologies (FACT) synthesis approach, which utilizes geometric shapes to help designers rapidly consider every flexure topology that best achieves a desired set of DOFs driven by decoupled actuators. The geometry of this array’s comb-drive actuators are optimized in conjunction with the geometry of the system’s flexures using a novel approach. The analytical models underlying this approach are verified using finite element analysis (FEA) and validated using experimental data. The capabilities of this new mirror array will enable, or significantly improve, the performance of a variety of high-impact optical technologies such as advanced optical switches, spatial-light modulators, displays, and laser steering or scanning devices.

Authors:

^[1]; Panas, Robert M. ^[2]; Song, Yuanping ^[1]; White, Carolyn D. ^[3]

Univ. of California, Los Angeles, CA (United States)
Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
AM Fitzgerald & Associates, LLC, Burlingame, CA (United States)

Publication Date:: Thu Dec 01 00:00:00 EST 2016

Research Org.:: Lawrence Livermore National Laboratory (LLNL), Livermore, CA (United States)

Sponsoring Org.:: USDOE

OSTI Identifier:: 1349012

Report Number(s):: LLNL-JRNL-702806
Journal ID: ISSN 1057-7157

Grant/Contract Number:: AC52-07NA27344

Resource Type:: Accepted Manuscript

Journal Name:: Journal of Microelectromechanical Systems

Additional Journal Information:: Journal Volume: 26; Journal Issue: 1; Journal ID: ISSN 1057-7157

Publisher:: IEEE

Country of Publication:: United States

Language:: English

Subject:: 42 ENGINEERING; 71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS

Citation Formats


                    Hopkins, Jonathan B., Panas, Robert M., Song, Yuanping, and White, Carolyn D. A High-Speed Large-Range Tip-Tilt-Piston Micromirror Array.  United States: N. p., 2016. 
Web.  doi:10.1109/JMEMS.2016.2628723.

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                    Hopkins, Jonathan B., Panas, Robert M., Song, Yuanping, & White, Carolyn D. A High-Speed Large-Range Tip-Tilt-Piston Micromirror Array.  United States.  https://doi.org/10.1109/JMEMS.2016.2628723

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                    Hopkins, Jonathan B., Panas, Robert M., Song, Yuanping, and White, Carolyn D. Thu .  
"A High-Speed Large-Range Tip-Tilt-Piston Micromirror Array".  United States.  https://doi.org/10.1109/JMEMS.2016.2628723.  https://www.osti.gov/servlets/purl/1349012.

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@article{osti_1349012,

  title        = {A High-Speed Large-Range Tip-Tilt-Piston Micromirror Array},

  author       = {Hopkins, Jonathan B. and Panas, Robert M. and Song, Yuanping and White, Carolyn D.},

  abstractNote = {This work introduces the design of a high fill-factor (>99%) micromirror array (MMA) that consists of 1mm2 hexagonal mirrors, which are expected to each independently achieve continuous, closed-loop control of three degrees of freedom (DOFs)—tip, tilt, and piston—over large ranges (>±10o rotation and >±30μm translation) at high speeds (~45kHz for a 1o amplitude of rotational oscillation). The flexure topology of this array is designed using the Freedom, Actuation, and Constraint Topologies (FACT) synthesis approach, which utilizes geometric shapes to help designers rapidly consider every flexure topology that best achieves a desired set of DOFs driven by decoupled actuators. The geometry of this array’s comb-drive actuators are optimized in conjunction with the geometry of the system’s flexures using a novel approach. The analytical models underlying this approach are verified using finite element analysis (FEA) and validated using experimental data. The capabilities of this new mirror array will enable, or significantly improve, the performance of a variety of high-impact optical technologies such as advanced optical switches, spatial-light modulators, displays, and laser steering or scanning devices.},

  doi          = {10.1109/JMEMS.2016.2628723},

  journal      = {Journal of Microelectromechanical Systems},

  number       = 1,

  volume       = 26,

  place        = {United States},

  year         = {Thu Dec 01 00:00:00 EST 2016},

  month        = {Thu Dec 01 00:00:00 EST 2016}

}

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https://doi.org/10.1109/JMEMS.2016.2628723

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Works referencing / citing this record:

Nanolattices: An Emerging Class of Mechanical Metamaterials
journal, September 2017

Bauer, Jens; Meza, Lucas R.; Schaedler, Tobias A.
Advanced Materials, Vol. 29, Issue 40
DOI: 10.1002/adma.201701850

Nonlinear static modeling of a tip-tilt-piston micropositioning stage comprising leaf-spring flexure hinges
journal, January 2020

Chen, Guozhen; Liu, Pinkuan; Ding, Han
Proceedings of the Institution of Mechanical Engineers, Part C: Journal of Mechanical Engineering Science, Vol. 234, Issue 10
DOI: 10.1177/0954406220902173

Nanolattices - An Emerging Class of Mechanical Metamaterials
journalarticle, January 2017

Bauer, J.; Meza, Lr; Schaedler, Ta
Wiley-Blackwell
DOI: 10.17863/cam.10485

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