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Title: A High-Speed Large-Range Tip-Tilt-Piston Micromirror Array

This work introduces the design of a high fill-factor (>99%) micromirror array (MMA) that consists of 1mm2 hexagonal mirrors, which are expected to each independently achieve continuous, closed-loop control of three degrees of freedom (DOFs)—tip, tilt, and piston—over large ranges (>±10o rotation and >±30μm translation) at high speeds (~45kHz for a 1o amplitude of rotational oscillation). The flexure topology of this array is designed using the Freedom, Actuation, and Constraint Topologies (FACT) synthesis approach, which utilizes geometric shapes to help designers rapidly consider every flexure topology that best achieves a desired set of DOFs driven by decoupled actuators. The geometry of this array’s comb-drive actuators are optimized in conjunction with the geometry of the system’s flexures using a novel approach. The analytical models underlying this approach are verified using finite element analysis (FEA) and validated using experimental data. The capabilities of this new mirror array will enable, or significantly improve, the performance of a variety of high-impact optical technologies such as advanced optical switches, spatial-light modulators, displays, and laser steering or scanning devices.
Authors:
ORCiD logo [1] ;  [2] ;  [1] ;  [3]
  1. Univ. of California, Los Angeles, CA (United States)
  2. Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
  3. AM Fitzgerald & Associates, LLC, Burlingame, CA (United States)
Publication Date:
Report Number(s):
LLNL-JRNL-702806
Journal ID: ISSN 1057-7157
Grant/Contract Number:
AC52-07NA27344
Type:
Accepted Manuscript
Journal Name:
Journal of Microelectromechanical Systems
Additional Journal Information:
Journal Volume: 26; Journal Issue: 1; Journal ID: ISSN 1057-7157
Publisher:
IEEE
Research Org:
Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English
Subject:
42 ENGINEERING; 71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS
OSTI Identifier:
1349012