On-chip and freestanding elastic carbon films for micro-supercapacitors
Abstract
Integration of electrochemical capacitors with silicon-based electronics is a major challenge, limiting energy storage on a chip. We describe a wafer-scale process for manufacturing strongly adhering carbide-derived carbon films and interdigitated micro-supercapacitors with embedded titanium carbide current collectors, fully compatible with current microfabrication and silicon-based device technology. Capacitance of those films reaches 410 farads per cubic centimeter/200 millifarads per square centimeter in aqueous electrolyte and 170 farads per cubic centimeter/85 millifarads per square centimeter in organic electrolyte. We also demonstrate preparation of self-supported, mechanically stable, micrometer-thick porous carbon films with a Young’s modulus of 14.5 gigapascals, with the possibility of further transfer onto flexible substrates. Lastly, these materials are interesting for applications in structural energy storage, tribology, and gas separation.
- Authors:
-
- Univ. Paul Sabatier-Toulouse III, Toulouse (France); Reseau sur le Stockage Electrochimique de l'Energie (France)
- Reseau sur le Stockage Electrochimique de l'Energie (France); Univ. Lille 1 Science et Technologies, Villeneuve d'Ascq cedex (France)
- Univ. Paul Sabatier (IPS)-CNRS, Univ. de Toulouse, Toulouse (France)
- Univ. Paul Sabatier (IPS)-CNRS, Univ. de Toulouse, Toulouse (France); Univ. de Toulouse, Toulouse Cedex (France)
- Reseau sur le Stockage Electrochimique de l'Energie (France); Univ. de Picardie Jules Verne, Amiens (France)
- Drexel Univ., Philadelphia, PA (United States)
- Publication Date:
- Research Org.:
- Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States)
- Sponsoring Org.:
- USDOE Office of Science (SC)
- OSTI Identifier:
- 1346630
- Grant/Contract Number:
- AC05-00OR22725
- Resource Type:
- Accepted Manuscript
- Journal Name:
- Science
- Additional Journal Information:
- Journal Volume: 351; Journal Issue: 6274; Journal ID: ISSN 0036-8075
- Publisher:
- AAAS
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE
Citation Formats
Huang, Peihua, Lethien, C., Pinaud, S., Brousse, K., Laloo, R., Turq, V., Respaud, M., Demortiere, A., Daffos, B., Taberna, Pierre -Louis, Chaudret, B., Gogotsi, Yury G., and Simon, Patrice. On-chip and freestanding elastic carbon films for micro-supercapacitors. United States: N. p., 2016.
Web. doi:10.1126/science.aad3345.
Huang, Peihua, Lethien, C., Pinaud, S., Brousse, K., Laloo, R., Turq, V., Respaud, M., Demortiere, A., Daffos, B., Taberna, Pierre -Louis, Chaudret, B., Gogotsi, Yury G., & Simon, Patrice. On-chip and freestanding elastic carbon films for micro-supercapacitors. United States. https://doi.org/10.1126/science.aad3345
Huang, Peihua, Lethien, C., Pinaud, S., Brousse, K., Laloo, R., Turq, V., Respaud, M., Demortiere, A., Daffos, B., Taberna, Pierre -Louis, Chaudret, B., Gogotsi, Yury G., and Simon, Patrice. Thu .
"On-chip and freestanding elastic carbon films for micro-supercapacitors". United States. https://doi.org/10.1126/science.aad3345. https://www.osti.gov/servlets/purl/1346630.
@article{osti_1346630,
title = {On-chip and freestanding elastic carbon films for micro-supercapacitors},
author = {Huang, Peihua and Lethien, C. and Pinaud, S. and Brousse, K. and Laloo, R. and Turq, V. and Respaud, M. and Demortiere, A. and Daffos, B. and Taberna, Pierre -Louis and Chaudret, B. and Gogotsi, Yury G. and Simon, Patrice},
abstractNote = {Integration of electrochemical capacitors with silicon-based electronics is a major challenge, limiting energy storage on a chip. We describe a wafer-scale process for manufacturing strongly adhering carbide-derived carbon films and interdigitated micro-supercapacitors with embedded titanium carbide current collectors, fully compatible with current microfabrication and silicon-based device technology. Capacitance of those films reaches 410 farads per cubic centimeter/200 millifarads per square centimeter in aqueous electrolyte and 170 farads per cubic centimeter/85 millifarads per square centimeter in organic electrolyte. We also demonstrate preparation of self-supported, mechanically stable, micrometer-thick porous carbon films with a Young’s modulus of 14.5 gigapascals, with the possibility of further transfer onto flexible substrates. Lastly, these materials are interesting for applications in structural energy storage, tribology, and gas separation.},
doi = {10.1126/science.aad3345},
journal = {Science},
number = 6274,
volume = 351,
place = {United States},
year = {2016},
month = {2}
}
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Novel insights into the charge storage mechanism in pseudocapacitive vanadium nitride thick films for high-performance on-chip micro-supercapacitors
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In situ growth of CuCo 2 S 4 nanocrystals on N, S-codoped reduced graphene oxide nanosheets for supercapacitors
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All-solid-state flexible planar lithium ion micro-capacitors
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Hierarchical Porous Carbon Derived from Sichuan Pepper for High-Performance Symmetric Supercapacitor with Decent Rate Capability and Cycling Stability
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High Areal Energy 3D-Interdigitated Micro-Supercapacitors in Aqueous and Ionic Liquid Electrolytes
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Design and integration of flexible planar micro-supercapacitors
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A Dendritic Nickel Cobalt Sulfide Nanostructure for Alkaline Battery Electrodes
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Design of Architectures and Materials in In-Plane Micro-supercapacitors: Current Status and Future Challenges
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All Pseudocapacitive MXene-RuO 2 Asymmetric Supercapacitors
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The Road Towards Planar Microbatteries and Micro‐Supercapacitors: From 2D to 3D Device Geometries
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Hollow TiN nanotrees derived from a surface-induced Kirkendall effect and their application in high-power supercapacitors
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Scalable Production of Graphene Inks via Wet‐Jet Milling Exfoliation for Screen‐Printed Micro‐Supercapacitors
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A true cable assembly with a carbon nanotube sheath and nickel wire core: a fully flexible electrode integrating energy storage and electrical conduction
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Nitrogen-rich hierarchical porous carbon materials with interconnected channels for high stability supercapacitors
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Surface-coating synthesis of nitrogen-doped inverse opal carbon materials with ultrathin micro/mesoporous graphene-like walls for oxygen reduction and supercapacitors
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3D-Printed, Superelastic Polypyrrole-Graphene Electrodes with Ultrahigh Areal Capacitance for Electrochemical Energy Storage
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Oxygen-Deficient Bismuth Oxide/Graphene of Ultrahigh Capacitance as Advanced Flexible Anode for Asymmetric Supercapacitors
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Direct Laser Etching Free‐Standing MXene‐MoS 2 Film for Highly Flexible Micro‐Supercapacitor
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Electropolymerization and energy storage of poly[Ni(salphen)]/MWCNT composite materials for supercapacitors
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2D Ultrathin MXene-Based Drug-Delivery Nanoplatform for Synergistic Photothermal Ablation and Chemotherapy of Cancer
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Planar integration of flexible micro-supercapacitors with ultrafast charge and discharge based on interdigital nanoporous gold electrodes on a chip
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Ultrafast All-Solid-State Coaxial Asymmetric Fiber Supercapacitors with a High Volumetric Energy Density
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Copper Hydroxide Porous Nanotube Arrays Grown on Copper Foils as High-Performance Integrated Electrodes for Supercapacitors
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Unique MOF-derived hierarchical MnO 2 nanotubes@NiCo-LDH/CoS 2 nanocage materials as high performance supercapacitors
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Coordination Polymer Framework Based On-Chip Micro-Supercapacitors with AC Line-Filtering Performance
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Flexible Ti 3 C 2 T x @Al electrodes with Ultrahigh Areal Capacitance: In Situ Regulation of Interlayer Conductivity and Spacing
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Microfluidic‐Architected Nanoarrays/Porous Core–Shell Fibers toward Robust Micro‐Energy‐Storage
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Nanoelectrode design from microminiaturized honeycomb monolith with ultrathin and stiff nanoscaffold for high-energy micro-supercapacitors
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A High-Performance Sodium-Ion Hybrid Capacitor Constructed by Metal-Organic Framework-Derived Anode and Cathode Materials
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A Flexible Quasi‐Solid‐State Bifunctional Device with Zinc‐Ion Microbattery and Photodetector
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Coordination Polymer Framework Based On-Chip Micro-Supercapacitors with AC Line-Filtering Performance
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Micro-supercapacitors based on oriented coordination polymer thin films for AC line-filtering
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Study of fractal electrode designs for buckypaper-based micro-supercapacitors
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