On-chip and freestanding elastic carbon films for micro-supercapacitors
Abstract
Integration of electrochemical capacitors with silicon-based electronics is a major challenge, limiting energy storage on a chip. We describe a wafer-scale process for manufacturing strongly adhering carbide-derived carbon films and interdigitated micro-supercapacitors with embedded titanium carbide current collectors, fully compatible with current microfabrication and silicon-based device technology. Capacitance of those films reaches 410 farads per cubic centimeter/200 millifarads per square centimeter in aqueous electrolyte and 170 farads per cubic centimeter/85 millifarads per square centimeter in organic electrolyte. We also demonstrate preparation of self-supported, mechanically stable, micrometer-thick porous carbon films with a Young’s modulus of 14.5 gigapascals, with the possibility of further transfer onto flexible substrates. Lastly, these materials are interesting for applications in structural energy storage, tribology, and gas separation.
- Authors:
-
- Univ. Paul Sabatier-Toulouse III, Toulouse (France); Reseau sur le Stockage Electrochimique de l'Energie (France)
- Reseau sur le Stockage Electrochimique de l'Energie (France); Univ. Lille 1 Science et Technologies, Villeneuve d'Ascq cedex (France)
- Univ. Paul Sabatier (IPS)-CNRS, Univ. de Toulouse, Toulouse (France)
- Univ. Paul Sabatier (IPS)-CNRS, Univ. de Toulouse, Toulouse (France); Univ. de Toulouse, Toulouse Cedex (France)
- Reseau sur le Stockage Electrochimique de l'Energie (France); Univ. de Picardie Jules Verne, Amiens (France)
- Drexel Univ., Philadelphia, PA (United States)
- Publication Date:
- Research Org.:
- Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States)
- Sponsoring Org.:
- USDOE Office of Science (SC)
- OSTI Identifier:
- 1346630
- Grant/Contract Number:
- AC05-00OR22725
- Resource Type:
- Accepted Manuscript
- Journal Name:
- Science
- Additional Journal Information:
- Journal Volume: 351; Journal Issue: 6274; Journal ID: ISSN 0036-8075
- Publisher:
- AAAS
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE
Citation Formats
Huang, Peihua, Lethien, C., Pinaud, S., Brousse, K., Laloo, R., Turq, V., Respaud, M., Demortiere, A., Daffos, B., Taberna, Pierre -Louis, Chaudret, B., Gogotsi, Yury G., and Simon, Patrice. On-chip and freestanding elastic carbon films for micro-supercapacitors. United States: N. p., 2016.
Web. doi:10.1126/science.aad3345.
Huang, Peihua, Lethien, C., Pinaud, S., Brousse, K., Laloo, R., Turq, V., Respaud, M., Demortiere, A., Daffos, B., Taberna, Pierre -Louis, Chaudret, B., Gogotsi, Yury G., & Simon, Patrice. On-chip and freestanding elastic carbon films for micro-supercapacitors. United States. doi:10.1126/science.aad3345.
Huang, Peihua, Lethien, C., Pinaud, S., Brousse, K., Laloo, R., Turq, V., Respaud, M., Demortiere, A., Daffos, B., Taberna, Pierre -Louis, Chaudret, B., Gogotsi, Yury G., and Simon, Patrice. Thu .
"On-chip and freestanding elastic carbon films for micro-supercapacitors". United States. doi:10.1126/science.aad3345. https://www.osti.gov/servlets/purl/1346630.
@article{osti_1346630,
title = {On-chip and freestanding elastic carbon films for micro-supercapacitors},
author = {Huang, Peihua and Lethien, C. and Pinaud, S. and Brousse, K. and Laloo, R. and Turq, V. and Respaud, M. and Demortiere, A. and Daffos, B. and Taberna, Pierre -Louis and Chaudret, B. and Gogotsi, Yury G. and Simon, Patrice},
abstractNote = {Integration of electrochemical capacitors with silicon-based electronics is a major challenge, limiting energy storage on a chip. We describe a wafer-scale process for manufacturing strongly adhering carbide-derived carbon films and interdigitated micro-supercapacitors with embedded titanium carbide current collectors, fully compatible with current microfabrication and silicon-based device technology. Capacitance of those films reaches 410 farads per cubic centimeter/200 millifarads per square centimeter in aqueous electrolyte and 170 farads per cubic centimeter/85 millifarads per square centimeter in organic electrolyte. We also demonstrate preparation of self-supported, mechanically stable, micrometer-thick porous carbon films with a Young’s modulus of 14.5 gigapascals, with the possibility of further transfer onto flexible substrates. Lastly, these materials are interesting for applications in structural energy storage, tribology, and gas separation.},
doi = {10.1126/science.aad3345},
journal = {Science},
number = 6274,
volume = 351,
place = {United States},
year = {2016},
month = {2}
}
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- Energy & Environmental Science, Vol. 12, Issue 1
Optimal structuring of nitrogen-doped hybrid-dimensional nanocarbons for high-performance flexible solid-state supercapacitors
journal, January 2019
- Cao, Xianyi; Jia, Shuai; Huang, Wei
- Journal of Materials Chemistry A, Vol. 7, Issue 13
Geometry modulation of ion diffusion through layered asymmetric graphene oxide membranes
journal, January 2019
- Yang, Jinlei; Zhang, Xiaopeng; Chen, Fengxiang
- Chemical Communications, Vol. 55, Issue 21
Ionogel-based sodium ion micro-batteries with a 3D Na-ion diffusion mechanism enable ultrahigh rate capability
journal, January 2020
- Zheng, Shuanghao; Huang, Huijuan; Dong, Yanfeng
- Energy & Environmental Science, Vol. 13, Issue 3
Novel insights into the charge storage mechanism in pseudocapacitive vanadium nitride thick films for high-performance on-chip micro-supercapacitors
journal, January 2020
- Robert, Kevin; Stiévenard, Didier; Deresmes, Dominique
- Energy & Environmental Science, Vol. 13, Issue 3
Layered coating of ultraflexible graphene-based electrodes for high-performance in-plane quasi-solid-state micro-supercapacitors
journal, January 2019
- Du, Jingwei; Mu, Xuemei; Zhao, Yirong
- Nanoscale, Vol. 11, Issue 30
Core–shell assembly of Co 3 O 4 @NiO-ZnO nanoarrays as battery-type electrodes for high-performance supercapatteries
journal, January 2019
- Chen, Hongmei; Zhou, Jiaojiao; Li, Qin
- Inorganic Chemistry Frontiers, Vol. 6, Issue 9
Development of pristine and Au-decorated Bi 2 O 3 /Bi 2 WO 6 nanocomposites for supercapacitor electrodes
journal, January 2019
- Gote, Gorkshnath H.; Pathak, Mansi; More, Mahendra A.
- RSC Advances, Vol. 9, Issue 56
Unique MOF-derived hierarchical MnO 2 nanotubes@NiCo-LDH/CoS 2 nanocage materials as high performance supercapacitors
journal, January 2019
- Wang, Xiuhua; Huang, Feifei; Rong, Fang
- Journal of Materials Chemistry A, Vol. 7, Issue 19
Ionic liquid pre-intercalated MXene films for ionogel-based flexible micro-supercapacitors with high volumetric energy density
journal, January 2019
- Zheng, Shuanghao; Zhang, Chuanfang (John); Zhou, Feng
- Journal of Materials Chemistry A, Vol. 7, Issue 16
Multivalent metal ion hybrid capacitors: a review with a focus on zinc-ion hybrid capacitors
journal, January 2019
- Dong, Liubing; Yang, Wang; Yang, Wu
- Journal of Materials Chemistry A, Vol. 7, Issue 23
An interfacial polymerization strategy towards high-performance flexible supercapacitors
journal, January 2019
- Lu, Chao; Chen, Xi
- Journal of Materials Chemistry A, Vol. 7, Issue 35
Energy storage on demand: ultra-high-rate and high-energy-density inkjet-printed NiO micro-supercapacitors
journal, January 2019
- Giannakou, Pavlos; Masteghin, Mateus G.; Slade, Robert C. T.
- Journal of Materials Chemistry A, Vol. 7, Issue 37
Carbide-derived carbons for dense and tunable 3D graphene networks
journal, June 2018
- de Tomas, Carla; Suarez-Martinez, Irene; Marks, Nigel A.
- Applied Physics Letters, Vol. 112, Issue 25
Challenges and opportunities for supercapacitors
journal, October 2019
- Huang, Shifei; Zhu, Xianglin; Sarkar, Samrat
- APL Materials, Vol. 7, Issue 10
Ultrathin, flexible and transparent graphene-based triboelectric nanogenerators for attachable curvature monitoring
journal, June 2019
- Liu, Zhaoxian; Zhao, Zhizhen; Zeng, Xiangwen
- Journal of Physics D: Applied Physics, Vol. 52, Issue 31
Flexible micro-supercapacitors assembled via chemically reduced graphene oxide films assisted by a laser printer
journal, August 2018
- Zhong, Min; Zhang, Fangwei; Yu, Youyi
- Nanotechnology, Vol. 29, Issue 43
In situ growth of CuCo 2 S 4 nanocrystals on N, S-codoped reduced graphene oxide nanosheets for supercapacitors
journal, May 2019
- Li, Zhongchun; Lv, Hongying; Wang, Zhixian
- Materials Research Express, Vol. 6, Issue 8
“Pickles Method” Inspired Tomato Derived Hierarchical Porous Carbon for High-Performance and Safer Capacitive Output
journal, January 2018
- Wang, Chao; Xiong, Ye; Wang, Hanwei
- Journal of The Electrochemical Society, Vol. 165, Issue 5
Integration of Porous Carbon Nanowrinkles into Carbon Micropost Array for Microsupercapacitors
journal, January 2018
- Xi, Shuang; Liu, Ying; Zhu, Yinlong
- Journal of Nanomaterials, Vol. 2018
Hierarchical Porous Carbon Derived from Sichuan Pepper for High-Performance Symmetric Supercapacitor with Decent Rate Capability and Cycling Stability
journal, April 2019
- Zhang, Hengshuo; Xiao, Wei; Zhou, Wenjie
- Nanomaterials, Vol. 9, Issue 4
Nitridation Temperature Effect on Carbon Vanadium Oxynitrides for a Symmetric Supercapacitor
journal, December 2019
- Ndiaye, Ndeye M.; Sylla, Ndeye F.; Ngom, Balla D.
- Nanomaterials, Vol. 9, Issue 12