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Title: On-chip and freestanding elastic carbon films for micro-supercapacitors

Abstract

Integration of electrochemical capacitors with silicon-based electronics is a major challenge, limiting energy storage on a chip. We describe a wafer-scale process for manufacturing strongly adhering carbide-derived carbon films and interdigitated micro-supercapacitors with embedded titanium carbide current collectors, fully compatible with current microfabrication and silicon-based device technology. Capacitance of those films reaches 410 farads per cubic centimeter/200 millifarads per square centimeter in aqueous electrolyte and 170 farads per cubic centimeter/85 millifarads per square centimeter in organic electrolyte. We also demonstrate preparation of self-supported, mechanically stable, micrometer-thick porous carbon films with a Young’s modulus of 14.5 gigapascals, with the possibility of further transfer onto flexible substrates. Lastly, these materials are interesting for applications in structural energy storage, tribology, and gas separation.

Authors:
 [1];  [2];  [3];  [1];  [1];  [1];  [4];  [5];  [1];  [1];  [3];  [6];  [1]
+ Show Author Affiliations
  1. Univ. Paul Sabatier-Toulouse III, Toulouse (France); Reseau sur le Stockage Electrochimique de l'Energie (France)
  2. Reseau sur le Stockage Electrochimique de l'Energie (France); Univ. Lille 1 Science et Technologies, Villeneuve d'Ascq cedex (France)
  3. Univ. Paul Sabatier (IPS)-CNRS, Univ. de Toulouse, Toulouse (France)
  4. Univ. Paul Sabatier (IPS)-CNRS, Univ. de Toulouse, Toulouse (France); Univ. de Toulouse, Toulouse Cedex (France)
  5. Reseau sur le Stockage Electrochimique de l'Energie (France); Univ. de Picardie Jules Verne, Amiens (France)
  6. Drexel Univ., Philadelphia, PA (United States)
Publication Date:
Research Org.:
Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States)
Sponsoring Org.:
USDOE Office of Science (SC)
OSTI Identifier:
1346630
Grant/Contract Number:  
AC05-00OR22725
Resource Type:
Accepted Manuscript
Journal Name:
Science
Additional Journal Information:
Journal Volume: 351; Journal Issue: 6274; Journal ID: ISSN 0036-8075
Publisher:
AAAS
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE

Citation Formats

Huang, Peihua, Lethien, C., Pinaud, S., Brousse, K., Laloo, R., Turq, V., Respaud, M., Demortiere, A., Daffos, B., Taberna, Pierre -Louis, Chaudret, B., Gogotsi, Yury G., and Simon, Patrice. On-chip and freestanding elastic carbon films for micro-supercapacitors. United States: N. p., 2016. Web. doi:10.1126/science.aad3345.
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Huang, Peihua, Lethien, C., Pinaud, S., Brousse, K., Laloo, R., Turq, V., Respaud, M., Demortiere, A., Daffos, B., Taberna, Pierre -Louis, Chaudret, B., Gogotsi, Yury G., & Simon, Patrice. On-chip and freestanding elastic carbon films for micro-supercapacitors. United States. doi:10.1126/science.aad3345.
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Huang, Peihua, Lethien, C., Pinaud, S., Brousse, K., Laloo, R., Turq, V., Respaud, M., Demortiere, A., Daffos, B., Taberna, Pierre -Louis, Chaudret, B., Gogotsi, Yury G., and Simon, Patrice. Thu . "On-chip and freestanding elastic carbon films for micro-supercapacitors". United States. doi:10.1126/science.aad3345. https://www.osti.gov/servlets/purl/1346630.
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@article{osti_1346630,
title = {On-chip and freestanding elastic carbon films for micro-supercapacitors},
author = {Huang, Peihua and Lethien, C. and Pinaud, S. and Brousse, K. and Laloo, R. and Turq, V. and Respaud, M. and Demortiere, A. and Daffos, B. and Taberna, Pierre -Louis and Chaudret, B. and Gogotsi, Yury G. and Simon, Patrice},
abstractNote = {Integration of electrochemical capacitors with silicon-based electronics is a major challenge, limiting energy storage on a chip. We describe a wafer-scale process for manufacturing strongly adhering carbide-derived carbon films and interdigitated micro-supercapacitors with embedded titanium carbide current collectors, fully compatible with current microfabrication and silicon-based device technology. Capacitance of those films reaches 410 farads per cubic centimeter/200 millifarads per square centimeter in aqueous electrolyte and 170 farads per cubic centimeter/85 millifarads per square centimeter in organic electrolyte. We also demonstrate preparation of self-supported, mechanically stable, micrometer-thick porous carbon films with a Young’s modulus of 14.5 gigapascals, with the possibility of further transfer onto flexible substrates. Lastly, these materials are interesting for applications in structural energy storage, tribology, and gas separation.},
doi = {10.1126/science.aad3345},
journal = {Science},
number = 6274,
volume = 351,
place = {United States},
year = {2016},
month = {2}
}
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DOI:  10.1126/science.aad3345
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    Works referencing / citing this record:

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