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Title: On-chip and freestanding elastic carbon films for micro-supercapacitors

Abstract

Integration of electrochemical capacitors with silicon-based electronics is a major challenge, limiting energy storage on a chip. We describe a wafer-scale process for manufacturing strongly adhering carbide-derived carbon films and interdigitated micro-supercapacitors with embedded titanium carbide current collectors, fully compatible with current microfabrication and silicon-based device technology. Capacitance of those films reaches 410 farads per cubic centimeter/200 millifarads per square centimeter in aqueous electrolyte and 170 farads per cubic centimeter/85 millifarads per square centimeter in organic electrolyte. We also demonstrate preparation of self-supported, mechanically stable, micrometer-thick porous carbon films with a Young’s modulus of 14.5 gigapascals, with the possibility of further transfer onto flexible substrates. Lastly, these materials are interesting for applications in structural energy storage, tribology, and gas separation.

Authors:
 [1];  [2];  [3];  [1];  [1];  [1];  [4];  [5];  [1];  [1];  [3];  [6];  [1]
  1. Univ. Paul Sabatier-Toulouse III, Toulouse (France); Reseau sur le Stockage Electrochimique de l'Energie (France)
  2. Reseau sur le Stockage Electrochimique de l'Energie (France); Univ. Lille 1 Science et Technologies, Villeneuve d'Ascq cedex (France)
  3. Univ. Paul Sabatier (IPS)-CNRS, Univ. de Toulouse, Toulouse (France)
  4. Univ. Paul Sabatier (IPS)-CNRS, Univ. de Toulouse, Toulouse (France); Univ. de Toulouse, Toulouse Cedex (France)
  5. Reseau sur le Stockage Electrochimique de l'Energie (France); Univ. de Picardie Jules Verne, Amiens (France)
  6. Drexel Univ., Philadelphia, PA (United States)
Publication Date:
Research Org.:
Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States)
Sponsoring Org.:
USDOE Office of Science (SC)
OSTI Identifier:
1346630
Grant/Contract Number:  
AC05-00OR22725
Resource Type:
Accepted Manuscript
Journal Name:
Science
Additional Journal Information:
Journal Volume: 351; Journal Issue: 6274; Journal ID: ISSN 0036-8075
Publisher:
AAAS
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE

Citation Formats

Huang, Peihua, Lethien, C., Pinaud, S., Brousse, K., Laloo, R., Turq, V., Respaud, M., Demortiere, A., Daffos, B., Taberna, Pierre -Louis, Chaudret, B., Gogotsi, Yury G., and Simon, Patrice. On-chip and freestanding elastic carbon films for micro-supercapacitors. United States: N. p., 2016. Web. doi:10.1126/science.aad3345.
Huang, Peihua, Lethien, C., Pinaud, S., Brousse, K., Laloo, R., Turq, V., Respaud, M., Demortiere, A., Daffos, B., Taberna, Pierre -Louis, Chaudret, B., Gogotsi, Yury G., & Simon, Patrice. On-chip and freestanding elastic carbon films for micro-supercapacitors. United States. doi:10.1126/science.aad3345.
Huang, Peihua, Lethien, C., Pinaud, S., Brousse, K., Laloo, R., Turq, V., Respaud, M., Demortiere, A., Daffos, B., Taberna, Pierre -Louis, Chaudret, B., Gogotsi, Yury G., and Simon, Patrice. Thu . "On-chip and freestanding elastic carbon films for micro-supercapacitors". United States. doi:10.1126/science.aad3345. https://www.osti.gov/servlets/purl/1346630.
@article{osti_1346630,
title = {On-chip and freestanding elastic carbon films for micro-supercapacitors},
author = {Huang, Peihua and Lethien, C. and Pinaud, S. and Brousse, K. and Laloo, R. and Turq, V. and Respaud, M. and Demortiere, A. and Daffos, B. and Taberna, Pierre -Louis and Chaudret, B. and Gogotsi, Yury G. and Simon, Patrice},
abstractNote = {Integration of electrochemical capacitors with silicon-based electronics is a major challenge, limiting energy storage on a chip. We describe a wafer-scale process for manufacturing strongly adhering carbide-derived carbon films and interdigitated micro-supercapacitors with embedded titanium carbide current collectors, fully compatible with current microfabrication and silicon-based device technology. Capacitance of those films reaches 410 farads per cubic centimeter/200 millifarads per square centimeter in aqueous electrolyte and 170 farads per cubic centimeter/85 millifarads per square centimeter in organic electrolyte. We also demonstrate preparation of self-supported, mechanically stable, micrometer-thick porous carbon films with a Young’s modulus of 14.5 gigapascals, with the possibility of further transfer onto flexible substrates. Lastly, these materials are interesting for applications in structural energy storage, tribology, and gas separation.},
doi = {10.1126/science.aad3345},
journal = {Science},
number = 6274,
volume = 351,
place = {United States},
year = {2016},
month = {2}
}

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Cited by: 134 works
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Works referenced in this record:

Capacitive energy storage in micro-scale devices: recent advances in design and fabrication of micro-supercapacitors
journal, January 2014

  • Beidaghi, Majid; Gogotsi, Yury
  • Energy & Environmental Science, Vol. 7, Issue 3
  • DOI: 10.1039/c3ee43526a

Materials for electrochemical capacitors
journal, November 2008

  • Simon, Patrice; Gogotsi, Yury
  • Nature Materials, Vol. 7, Issue 11
  • DOI: 10.1038/nmat2297

Scalable fabrication of high-power graphene micro-supercapacitors for flexible and on-chip energy storage
journal, February 2013

  • El-Kady, Maher F.; Kaner, Richard B.
  • Nature Communications, Vol. 4, Issue 1
  • DOI: 10.1038/ncomms2446

Flexible and Stackable Laser-Induced Graphene Supercapacitors
journal, January 2015

  • Peng, Zhiwei; Lin, Jian; Ye, Ruquan
  • ACS Applied Materials & Interfaces, Vol. 7, Issue 5
  • DOI: 10.1021/am509065d

Laser Scribing of High-Performance and Flexible Graphene-Based Electrochemical Capacitors
journal, March 2012


Highly flexible, all solid-state micro-supercapacitors from vertically aligned carbon nanotubes
journal, January 2014


3-Dimensional Graphene Carbon Nanotube Carpet-Based Microsupercapacitors with High Electrochemical Performance
journal, December 2012

  • Lin, Jian; Zhang, Chenguang; Yan, Zheng
  • Nano Letters, Vol. 13, Issue 1
  • DOI: 10.1021/nl3034976

Monolithic Carbide-Derived Carbon Films for Micro-Supercapacitors
journal, April 2010


Micro-supercapacitors from carbide derived carbon (CDC) films on silicon chips
journal, March 2013


Asymmetric electrochemical capacitor microdevice designed with vanadium nitride and nickel oxide thin film electrodes
journal, March 2013


Fabrication of a symmetric micro supercapacitor based on tubular ruthenium oxide on silicon 3D microstructures
journal, April 2014


Highly active ruthenium oxide coating via ALD and electrochemical activation in supercapacitor applications
journal, January 2015

  • Warren, Roseanne; Sammoura, Firas; Tounsi, Fares
  • Journal of Materials Chemistry A, Vol. 3, Issue 30
  • DOI: 10.1039/C5TA03742E

Ultrathin Planar Graphene Supercapacitors
journal, April 2011

  • Yoo, Jung Joon; Balakrishnan, Kaushik; Huang, Jingsong
  • Nano Letters, Vol. 11, Issue 4
  • DOI: 10.1021/nl200225j

Engineering three-dimensional hybrid supercapacitors and microsupercapacitors for high-performance integrated energy storage
journal, March 2015

  • El-Kady, Maher F.; Ihns, Melanie; Li, Mengping
  • Proceedings of the National Academy of Sciences, Vol. 112, Issue 14
  • DOI: 10.1073/pnas.1420398112

Manganese oxide micro-supercapacitors with ultra-high areal capacitance
journal, January 2013

  • Wang, Xu; Myers, Benjamin D.; Yan, Jian
  • Nanoscale, Vol. 5, Issue 10
  • DOI: 10.1039/c3nr00210a

A high-energy-density micro supercapacitor of asymmetric MnO2–carbon configuration by using micro-fabrication technologies
journal, July 2013


Continuous carbide-derived carbon films with high volumetric capacitance
journal, January 2011

  • Heon, Min; Lofland, Samuel; Applegate, James
  • Energy Environ. Sci., Vol. 4, Issue 1
  • DOI: 10.1039/C0EE00404A

Anomalous Increase in Carbon Capacitance at Pore Sizes Less Than 1 Nanometer
journal, September 2006


Effect of various porous nanotextures on the reversible electrochemical sorption of hydrogen in activated carbons
journal, February 2006


True Performance Metrics in Electrochemical Energy Storage
journal, November 2011


Towards superior volumetric performance: design and preparation of novel carbon materials for energy storage
journal, January 2015

  • Zhang, Chen; Lv, Wei; Tao, Ying
  • Energy & Environmental Science, Vol. 8, Issue 5
  • DOI: 10.1039/C5EE00389J

Lithographically Patterned Thin Activated Carbon Films as a New Technology Platform for On-Chip Devices
journal, July 2013

  • Wei, Lu; Nitta, Naoki; Yushin, Gleb
  • ACS Nano, Vol. 7, Issue 8
  • DOI: 10.1021/nn4028129

Towards ultrahigh volumetric capacitance: graphene derived highly dense but porous carbons for supercapacitors
journal, October 2013

  • Tao, Ying; Xie, Xiaoying; Lv, Wei
  • Scientific Reports, Vol. 3, Issue 1
  • DOI: 10.1038/srep02975

Ultrasmall Integrated 3D Micro-Supercapacitors Solve Energy Storage for Miniature Devices
journal, December 2013

  • Meng, Chuizhou; Maeng, Jimin; John, Simon W. M.
  • Advanced Energy Materials, Vol. 4, Issue 7
  • DOI: 10.1002/aenm.201301269

Micro supercapacitors based on a 3D structure with symmetric graphene or activated carbon electrodes
journal, October 2013


Ultrahigh-power micrometre-sized supercapacitors based on onion-like carbon
journal, August 2010

  • Pech, David; Brunet, Magali; Durou, Hugo
  • Nature Nanotechnology, Vol. 5, Issue 9, p. 651-654
  • DOI: 10.1038/nnano.2010.162

A Review of Graphene-Based Electrochemical Microsupercapacitors
journal, November 2013

  • Xiong, Guoping; Meng, Chuizhou; Reifenberger, Ronald G.
  • Electroanalysis, Vol. 26, Issue 1
  • DOI: 10.1002/elan.201300238

3D RuO 2 Microsupercapacitors with Remarkable Areal Energy
journal, September 2015

  • Ferris, Anaïs; Garbarino, Sébastien; Guay, Daniel
  • Advanced Materials, Vol. 27, Issue 42
  • DOI: 10.1002/adma.201503054

Micro-supercapacitors based on three dimensional interdigital polypyrrole/C-MEMS electrodes
journal, October 2011


Conversion of silicon carbide to crystalline diamond-structured carbon at ambient pressure
journal, May 2001

  • Gogotsi, Yury; Welz, Sascha; Ersoy, Daniel A.
  • Nature, Vol. 411, Issue 6835
  • DOI: 10.1038/35077031

Three-dimensional thickness and property distribution of TiC films deposited by DC magnetron sputtering and HIPIMS
journal, July 2014


Biaxial alignment in sputter deposited thin films
journal, December 2006


The microstructure of sputter‐deposited coatings
journal, November 1986

  • Thornton, John A.
  • Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 4, Issue 6
  • DOI: 10.1116/1.573628

An improved technique for determining hardness and elastic modulus using load and displacement sensing indentation experiments
journal, June 1992

  • Oliver, W. C.; Pharr, G. M.
  • Journal of Materials Research, Vol. 7, Issue 06, p. 1564-1583
  • DOI: 10.1557/JMR.1992.1564

Adhesion evaluation of thin ceramic coatings on tool steel using the scratch testing technique
journal, January 1996


Mechanical characterization of micro/nanoscale structures for MEMS/NEMS applications using nanoindentation techniques
journal, October 2003


Relation between the Ion Size and Pore Size for an Electric Double-Layer Capacitor
journal, March 2008

  • Largeot, Celine; Portet, Cristelle; Chmiola, John
  • Journal of the American Chemical Society, Vol. 130, Issue 9
  • DOI: 10.1021/ja7106178

Solvent effect on the ion adsorption from ionic liquid electrolyte into sub-nanometer carbon pores
journal, November 2009


Microelectrode Study of Pore Size, Ion Size, and Solvent Effects on the Charge/Discharge Behavior of Microporous Carbons for Electrical Double-Layer Capacitors
journal, January 2009

  • Lin, R.; Taberna, P. L.; Chmiola, J.
  • Journal of The Electrochemical Society, Vol. 156, Issue 1, p. A7-A12
  • DOI: 10.1149/1.3002376

Electrochemical Quartz Crystal Microbalance (EQCM) Studies of Ions and Solvents Insertion into Highly Porous Activated Carbons
journal, September 2010

  • Levi, Mikhael D.; Levy, Naomi; Sigalov, Sergey
  • Journal of the American Chemical Society, Vol. 132, Issue 38
  • DOI: 10.1021/ja104391g

Ion Sieving Effects in the Electrical Double Layer of Porous Carbon Electrodes:  Estimating Effective Ion Size in Electrolytic Solutions
journal, July 2001

  • Eliad, Linoam; Salitra, Gregory; Soffer, Abraham
  • The Journal of Physical Chemistry B, Vol. 105, Issue 29
  • DOI: 10.1021/jp010086y

Desolvation of Ions in Subnanometer Pores and Its Effect on Capacitance and Double-Layer Theory
journal, April 2008

  • Chmiola, John; Largeot, Celine; Taberna, Pierre-Louis
  • Angewandte Chemie International Edition, Vol. 47, Issue 18
  • DOI: 10.1002/anie.200704894

    Works referencing / citing this record:

    The Road Towards Planar Microbatteries and Micro‐Supercapacitors: From 2D to 3D Device Geometries
    journal, June 2019