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Title: Optical nanoscopy of high Tc cuprate nanoconstriction devices patterned by helium ion beams

Journal Article · · Nano Letters
ORCiD logo [1];  [2];  [3];  [4]
  1. Yale Univ., New Haven, CT (United States)
  2. Harvard Univ., Cambridge, MA (United States); Brookhaven National Lab. (BNL), Upton, NY (United States)
  3. Harvard Univ., Cambridge, MA (United States)
  4. Yale Univ., New Haven, CT (United States); Brookhaven National Lab. (BNL), Upton, NY (United States)
+ Show Author Affiliations

Helium ion beams (HIB) focused to subnanometer scales have emerged as powerful tools for high-resolution imaging as well as nanoscale lithography, ion milling, or deposition. Quantifying irradiation effects is an essential step toward reliable device fabrication, but most of the depth profiling information is provided by computer simulations rather than the experiment. Here, we demonstrate the use of atomic force microscopy (AFM) combined with scanning near-field optical microscopy (SNOM) to provide three-dimensional (3D) dielectric characterization of high-temperature superconductor devices fabricated by HIB. By imaging the infrared dielectric response obtained from light demodulation at multiple harmonics of the AFM tapping frequency, we find that amorphization caused by the nominally 0.5 nm HIB extends throughout the entire 26.5 nm thickness of the cuprate film and by ~500 nm laterally. This unexpectedly widespread damage in morphology and electronic structure can be attributed to a helium depth distribution substantially modified by the internal device interfaces. Lastly, our study introduces AFM-SNOM as a quantitative tomographic technique for noninvasive 3D characterization of irradiation damage in a wide variety of nanoscale devices.

Research Organization:
Brookhaven National Laboratory (BNL), Upton, NY (United States)
Sponsoring Organization:
USDOE Office of Science (SC), Basic Energy Sciences (BES) (SC-22)
OSTI ID:
1345742
Report Number(s):
BNL--113584-2017-JA; KC0203020
Journal Information:
Nano Letters, Journal Name: Nano Letters Journal Issue: 3 Vol. 17; ISSN 1530-6984
Publisher:
American Chemical SocietyCopyright Statement
Country of Publication:
United States
Language:
English

References (38)

Recent Achievements on the Physics of High-T C Superconductor Josephson Junctions: Background, Perspectives and Inspiration journal October 2012
Near-field microscopy by elastic light scattering from a tip
  • Keilmann, Fritz; Hillenbrand, Rainer
  • Philosophical Transactions of the Royal Society of London. Series A: Mathematical, Physical and Engineering Sciences, Vol. 362, Issue 1817 https://doi.org/10.1098/rsta.2003.1347
journal April 2004
Atomic-layer engineering of superconducting oxides: yesterday, today, tomorrow journal March 2001
Enhanced resolution in subsurface near-field optical microscopy journal December 2011
Berechnung verschiedener physikalischer Konstanten von heterogenen Substanzen. I. Dielektrizitätskonstanten und Leitfähigkeiten der Mischkörper aus isotropen Substanzen journal January 1935
Focused helium-ion-beam-induced deposition journal September 2014
Recent Achievements on the Physics of High-T C Superconductor Josephson Junctions: Background, Perspectives and Inspiration journal October 2012
High temperature interface superconductivity journal February 2016
Quantitative Measurement of Local Infrared Absorption and Dielectric Function with Tip-Enhanced Near-Field Microscopy journal April 2013
Nano-optical Investigations of the Metal−Insulator Phase Behavior of Individual VO 2 Microcrystals journal May 2010
Recovery of Permittivity and Depth from Near-Field Data as a Step toward Infrared Nanotomography journal June 2014
Interplay of electron–lattice interactions and superconductivity in Bi2Sr2CaCu2O8+δ journal August 2006
Superconducting quantum bits journal June 2008
High-temperature interface superconductivity between metallic and insulating copper oxides journal October 2008
Plasmons in graphene moiré superlattices journal September 2015
Large oscillations of the magnetoresistance in nanopatterned high-temperature superconducting films journal June 2010
Nano Josephson superconducting tunnel junctions in YBa2Cu3O7–δ directly patterned with a focused helium ion beam journal April 2015
Superconducting emitters of THz radiation journal August 2013
Ultrafast optical switching of infrared plasmon polaritons in high-mobility graphene journal March 2016
Apertureless near-field optical microscopy: Tip–sample coupling in elastic light scattering journal December 2003
Far-infrared optical properties of SrLaAlO4 single crystal journal April 2004
Pseudoheterodyne detection for background-free near-field spectroscopy journal September 2006
Superconducting quantum interference device instruments and applications journal October 2006
YBa 2 Cu 3 O 7− δ superconducting quantum interference devices with metallic to insulating barriers written with a focused helium ion beam journal June 2015
Nano-optical imaging and spectroscopy of order, phases, and domains in complex solids journal December 2012
Precision cutting and patterning of graphene with helium ions journal October 2009
Near-field microscopy by elastic light scattering from a tip
  • Keilmann, Fritz; Hillenbrand, Rainer
  • Philosophical Transactions of the Royal Society of London. Series A: Mathematical, Physical and Engineering Sciences, Vol. 362, Issue 1817 https://doi.org/10.1098/rsta.2003.1347
journal April 2004
Optical spectra of La 2 − x Sr x CuO 4 : Effect of carrier doping on the electronic structure of the CuO 2 plane journal April 1991
Optical dielectric function of gold journal December 2012
Model for quantitative tip-enhanced spectroscopy and the extraction of nanoscale-resolved optical constants journal August 2014
Electron-Phonon Interactions in Superconducting La 1.84 Sr 0.16 CuO 4 Films journal December 2008
Atomic-layer engineering of superconducting oxides: yesterday, today, tomorrow journal March 2001
Helium ion microscope: A new tool for nanoscale microscopy and metrology
  • Ward, B. W.; Notte, John A.; Economou, N. P.
  • Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 24, Issue 6 https://doi.org/10.1116/1.2357967
journal January 2006
Subsurface damage from helium ions as a function of dose, beam energy, and dose rate
  • Livengood, Richard; Tan, Shida; Greenzweig, Yuval
  • Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 27, Issue 6 https://doi.org/10.1116/1.3237101
journal January 2009
Helium ion microscopy
  • Hlawacek, Gregor; Veligura, Vasilisa; van Gastel, Raoul
  • Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, Vol. 32, Issue 2 https://doi.org/10.1116/1.4863676
journal March 2014
High-Temperature Superconductivity in a Single Copper-Oxygen Plane journal October 2009
Analytical model for quantitative prediction of material contrasts in scattering-type near-field optical microscopy journal January 2007
Enhanced resolution in subsurface near-field optical microscopy journal December 2011

Cited By (4)

Surface Josephson plasma waves in a high-temperature superconductor journal October 2020
A liquid nitrogen cooled superconducting transition edge sensor with ultra-high responsivity and GHz operation speeds preprint January 2020
Modern Scattering‐Type Scanning Near‐Field Optical Microscopy for Advanced Material Research journal April 2019
Josephson Junctions and SQUIDs Created by Focused Helium-Ion-Beam Irradiation of Y Ba 2 Cu 3 O 7 journal April 2019

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75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
dielectric nanotomography
helium ion scattering and microscopy
nanopatterning
near-field microscopy
superconducting electronics