Optical and electrical properties of indium tin oxide films near their laser damage threshold [Electrical and optical properties of indium tin oxide films under multi-pulse laser irradiation at 1064 nm]
Abstract
In this paper, we investigated whether the optical and electrical properties of indium tin oxide (ITO) films are degraded under laser irradiation below their laser ablation threshold. While performing multi-pulse laser damage experiments on a single ITO film (4.7 ns, 1064 nm, 10 Hz), we examined the optical and electrical properties in situ. A decrease in reflectance was observed prior to laser damage initiation. However, under sub-damage threshold irradiation, conductivity and reflectance of the film were maintained without measurable degradation. This indicates that ITO films in optoelectronic devices may be operated below their lifetime laser damage threshold without noticeable performance degradation.
- Authors:
-
- Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
- Publication Date:
- Research Org.:
- Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
- Sponsoring Org.:
- USDOE National Nuclear Security Administration (NNSA)
- OSTI Identifier:
- 1345329
- Report Number(s):
- LLNL-JRNL-712977
Journal ID: ISSN 2159-3930
- Grant/Contract Number:
- AC52-07NA27344
- Resource Type:
- Accepted Manuscript
- Journal Name:
- Optical Materials Express
- Additional Journal Information:
- Journal Volume: 7; Journal Issue: 3; Journal ID: ISSN 2159-3930
- Publisher:
- Optical Society of America (OSA)
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE; 42 ENGINEERING; lasers and laser optics; laser materials; laser damage; optics at surfaces
Citation Formats
Yoo, Jae -Hyuck, Lange, Andrew, Bude, Jeff, and Elhadj, Selim. Optical and electrical properties of indium tin oxide films near their laser damage threshold [Electrical and optical properties of indium tin oxide films under multi-pulse laser irradiation at 1064 nm]. United States: N. p., 2017.
Web. doi:10.1364/OME.7.000817.
Yoo, Jae -Hyuck, Lange, Andrew, Bude, Jeff, & Elhadj, Selim. Optical and electrical properties of indium tin oxide films near their laser damage threshold [Electrical and optical properties of indium tin oxide films under multi-pulse laser irradiation at 1064 nm]. United States. https://doi.org/10.1364/OME.7.000817
Yoo, Jae -Hyuck, Lange, Andrew, Bude, Jeff, and Elhadj, Selim. Fri .
"Optical and electrical properties of indium tin oxide films near their laser damage threshold [Electrical and optical properties of indium tin oxide films under multi-pulse laser irradiation at 1064 nm]". United States. https://doi.org/10.1364/OME.7.000817. https://www.osti.gov/servlets/purl/1345329.
@article{osti_1345329,
title = {Optical and electrical properties of indium tin oxide films near their laser damage threshold [Electrical and optical properties of indium tin oxide films under multi-pulse laser irradiation at 1064 nm]},
author = {Yoo, Jae -Hyuck and Lange, Andrew and Bude, Jeff and Elhadj, Selim},
abstractNote = {In this paper, we investigated whether the optical and electrical properties of indium tin oxide (ITO) films are degraded under laser irradiation below their laser ablation threshold. While performing multi-pulse laser damage experiments on a single ITO film (4.7 ns, 1064 nm, 10 Hz), we examined the optical and electrical properties in situ. A decrease in reflectance was observed prior to laser damage initiation. However, under sub-damage threshold irradiation, conductivity and reflectance of the film were maintained without measurable degradation. This indicates that ITO films in optoelectronic devices may be operated below their lifetime laser damage threshold without noticeable performance degradation.},
doi = {10.1364/OME.7.000817},
journal = {Optical Materials Express},
number = 3,
volume = 7,
place = {United States},
year = {Fri Feb 10 00:00:00 EST 2017},
month = {Fri Feb 10 00:00:00 EST 2017}
}
Web of Science
Works referenced in this record:
Room temperature indium tin oxide by XeCl excimer laser annealing for flexible display
journal, July 2004
- Chung, Wonsuk; Thompson, Michael O.; Wickboldt, Paul
- Thin Solid Films, Vol. 460, Issue 1-2
Superior local conductivity in self-organized nanodots on indium-tin-oxide films induced by femtosecond laser pulses
journal, January 2011
- Wang, Chih; Wang, Hsuan-I; Tang, Wei-Tsung
- Optics Express, Vol. 19, Issue 24
A simplified reactive thermal evaporation method for indium tin oxide electrodes
journal, November 2008
- Belo, G. S.; da Silva, B. J. P.; de Vasconcelos, E. A.
- Applied Surface Science, Vol. 255, Issue 3
Past achievements and future challenges in the development of optically transparent electrodes
journal, November 2012
- Ellmer, Klaus
- Nature Photonics, Vol. 6, Issue 12
Band gap shift in the indium-tin-oxide films on polyethylene napthalate after thermal annealing in air
journal, October 2006
- Han, H.; Mayer, J. W.; Alford, T. L.
- Journal of Applied Physics, Vol. 100, Issue 8
Laser‐induced damage to spray pyrolysis deposited transparent conducting films
journal, February 1986
- Radhakrishnan, P.; Sathianandan, K.; Subhash, N.
- Journal of Applied Physics, Vol. 59, Issue 3
Ultrashort-laser-pulse damage threshold of transparent materials and the role of incubation
journal, December 1999
- Rosenfeld, A.; Lorenz, M.; Stoian, R.
- Applied Physics A: Materials Science & Processing, Vol. 69, Issue 7
Diffractive beam shaping for enhanced laser polymer welding
conference, March 2015
- Rauschenberger, J.; Vogler, D.; Raab, C.
- SPIE LASE, SPIE Proceedings
Determination of Optical Constants and Carrier Effective Mass of Semiconductors
journal, June 1957
- Spitzer, W. G.; Fan, H. Y.
- Physical Review, Vol. 106, Issue 5
The influence of deposition parameters on the optical and electrical properties of r.f.-sputter- deposited indium tin oxide films
journal, April 1986
- Naseem, S.; Coutts, T. J.
- Thin Solid Films, Vol. 138, Issue 1
Transparent conducting oxide semiconductors for transparent electrodes
journal, March 2005
- Minami, Tadatsugu
- Semiconductor Science and Technology, Vol. 20, Issue 4
Thickness effect on laser-induced-damage threshold of indium-tin oxide films at 1064 nm
journal, December 2011
- Wang, Haifeng; Huang, Zhimeng; Zhang, Dayong
- Journal of Applied Physics, Vol. 110, Issue 11
Characteristics of indium tin oxide thin films prepared using electron beam evaporation
journal, January 2004
- Yamaguchi, Mika; Ide-Ektessabi, Ari; Nomura, Hiroshi
- Thin Solid Films, Vol. 447-448
D.C. magnetron sputter deposition of indium tin oxide films
journal, September 1981
- Karulkar, P. C.; McCoy, M. E.
- Thin Solid Films, Vol. 83, Issue 2
Electrical, structural, and optical properties of ITO thin films prepared at room temperature by pulsed laser deposition
journal, April 2006
- Kim, Jong Hoon; Jeon, Kyung Ah; Kim, Gun Hee
- Applied Surface Science, Vol. 252, Issue 13
Femtosecond laser ablation properties of borosilicate glass
journal, November 2004
- Ben-Yakar, Adela; Byer, Robert L.
- Journal of Applied Physics, Vol. 96, Issue 9
Incubation effect and its influence on laser patterning of ITO thin film
journal, March 2012
- Xiao, Shizhou; Gurevich, Evgeny L.; Ostendorf, Andreas
- Applied Physics A, Vol. 107, Issue 2
Anisotropic optical transmission of femtosecond laser induced periodic surface nanostructures on indium-tin-oxide films
journal, September 2012
- Wang, Chih; Wang, Hsuan-I; Luo, Chih-Wei
- Applied Physics Letters, Vol. 101, Issue 10
A programmable beam shaping system for tailoring the profile of high fluence laser beams
conference, November 2010
- Heebner, John; Borden, Michael; Miller, Phil
- Laser Damage Symposium XLII: Annual Symposium on Optical Materials for High Power Lasers, SPIE Proceedings
Laser‐induced damage to transparent conducting SnO 2 films at 1062 nm
journal, January 1983
- Subhash, N.; Sathianandan, K.
- Journal of Applied Physics, Vol. 54, Issue 1
Real-time evolution of the indium tin oxide film properties and structure during annealing in vacuum
journal, July 2004
- Rogozin, A.; Shevchenko, N.; Vinnichenko, M.
- Applied Physics Letters, Vol. 85, Issue 2
In situ monitoring of excimer laser annealing of tin-doped indium oxide films for the development of a low-temperature fabrication process
journal, February 2014
- Shinoda, Kentaro; Nakajima, Tomohiko; Tsuchiya, Tetsuo
- Applied Surface Science, Vol. 292
Transparent and conducting ITO films: new developments and applications
journal, May 2002
- Granqvist, C. G.; Hultåker, A.
- Thin Solid Films, Vol. 411, Issue 1
Ultrashort-pulse laser ablation of indium phosphide in air
journal, January 2001
- Bonse, J.; Wrobel, J. M.; Krüger, J.
- Applied Physics A Materials Science & Processing, Vol. 72, Issue 1
Improvement in the device performance of tin-doped indium oxide transistor by oxygen high pressure annealing at 150 °C
journal, April 2012
- Yeob Park, Se; Hwan Ji, Kwang; Yoon Jung, Hong
- Applied Physics Letters, Vol. 100, Issue 16
Excimer laser processing of indium‐tin‐oxide films: An optical investigation
journal, November 1995
- Szörényi, T.; Laude, L. D.; Bertóti, I.
- Journal of Applied Physics, Vol. 78, Issue 10
Laser‐damage‐resistant transparent conductive indium tin oxide coatings
journal, February 1979
- Pawlewicz, W. T.; Mann, I. B.; Lowdermilk, W. H.
- Applied Physics Letters, Vol. 34, Issue 3
Simple technique for measurements of pulsed Gaussian-beam spot sizes
journal, January 1982
- Liu, J. M.
- Optics Letters, Vol. 7, Issue 5
Effects of laser irradiation energy density on the properties of pulsed laser deposited ITO thin films
journal, October 2005
- Adurodija, F. O.; Brüning, R.; Asia, I. O.
- Applied Physics A, Vol. 81, Issue 5
Optical and electrical properties of transparent conductive ITO thin films deposited by sol–gel process
journal, December 2000
- Alam, M. J.; Cameron, D. C.
- Thin Solid Films, Vol. 377-378
Works referencing / citing this record:
A Survey of Transparent Conducting Films and Optoelectrical Materials for High Optical Power Applications
journal, September 2019
- Yoo, Jae-Hyuck; Lange, Andrew; Chesser, John
- physica status solidi (a), Vol. 216, Issue 22
Lifetime laser damage performance of β-Ga 2 O 3 for high power applications
journal, March 2018
- Yoo, Jae-Hyuck; Rafique, Subrina; Lange, Andrew
- APL Materials, Vol. 6, Issue 3
A Survey of Transparent Conducting Films and Optoelectrical Materials for High Optical Power Applications
journal, September 2019
- Yoo, Jae-Hyuck; Lange, Andrew; Chesser, John
- physica status solidi (a), Vol. 216, Issue 22