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Title: Impact of deposition-rate fluctuations on thin-film thickness and uniformity

Variations in deposition rate are superimposed on a thin-film–deposition model with planetary rotation to determine the impact on film thickness. Variations in magnitude and frequency of the fluctuations relative to the speed of planetary revolution lead to thickness errors and uniformity variations up to 3%. Sufficiently rapid oscillations in the deposition rate have a negligible impact, while slow oscillations are found to be problematic, leading to changes in the nominal film thickness. Finally, superimposing noise as random fluctuations in the deposition rate has a negligible impact, confirming the importance of any underlying harmonic oscillations in deposition rate or source operation.
Authors:
 [1]
  1. Univ. of Rochester, Rochester, NY (United States)
Publication Date:
Report Number(s):
1318
Journal ID: ISSN 0146-9592; OPLEDP; 2016-200; 1318; 2274
Grant/Contract Number:
NA0001944
Type:
Accepted Manuscript
Journal Name:
Optics Letters
Additional Journal Information:
Journal Volume: 41; Journal Issue: 22; Journal ID: ISSN 0146-9592
Publisher:
Optical Society of America (OSA)
Research Org:
Univ. of Rochester, Rochester, NY (United States). Laboratory for Laser Energetics
Sponsoring Org:
USDOE National Nuclear Security Administration (NNSA)
Contributing Orgs:
Laboratory for Laser Energetics, University of Rochester
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; thin films; deposition and fabrication; materials and process characterization
OSTI Identifier:
1342091
Alternate Identifier(s):
OSTI ID: 1330734