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Title: Controlling X-ray deformable mirrors during inspection

The X-ray deformable mirror (XDM) is becoming widely used in the present synchrotron/free-electron laser facilities because of its flexibility in correcting wavefront errors or modification of the beam size at the sample location. Owing to coupling among the N actuators of an XDM, (N + 1) or (2N + 1) scans are required to learn the response of each actuator one by one. When the mirror has an important number of actuators (N) and the actuator response time including stabilization or the necessary metrology time is long, the learning process can be time consuming. In this paper, a fast and accurate method is presented to drive an XDM to a target shape usually with only three or four measurements during inspection. The metrology data are used as feedback to calculate the curvature discrepancy between the current and the target shapes. Three different derivative estimation methods are introduced to calculate the curvature from measured data. The mirror shape is becoming close to the target through iterative compensations. Finally, the feasibility of this simple and effective approach is demonstrated by a series of experiments.
 [1] ;  [2] ;  [1]
  1. Brookhaven National Lab. (BNL), Upton, NY (United States). NSLS-II
  2. Brookhaven National Lab. (BNL), Upton, NY (United States). NSLS-II; Sichuan Univ., Chengdu (China)
Publication Date:
Report Number(s):
Journal ID: ISSN 1600-5775; TRN: US1701519
Grant/Contract Number:
Accepted Manuscript
Journal Name:
Journal of Synchrotron Radiation (Online)
Additional Journal Information:
Journal Name: Journal of Synchrotron Radiation (Online); Journal Volume: 23; Journal Issue: 6; Journal ID: ISSN 1600-5775
International Union of Crystallography
Research Org:
Brookhaven National Lab. (BNL), Upton, NY (United States)
Sponsoring Org:
USDOE Office of Science (SC), Basic Energy Sciences (BES) (SC-22)
Contributing Orgs:
Sichuan Univ., Chengdu (China)
Country of Publication:
United States
42 ENGINEERING; x-ray deformable mirror; active optics; mirror inspection; windowed Fourier transform; B-spline curve fitting
OSTI Identifier: