skip to main content
DOE PAGES title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Controlling X-ray deformable mirrors during inspection

Abstract

The X-ray deformable mirror (XDM) is becoming widely used in the present synchrotron/free-electron laser facilities because of its flexibility in correcting wavefront errors or modification of the beam size at the sample location. Owing to coupling among the N actuators of an XDM, (N + 1) or (2N + 1) scans are required to learn the response of each actuator one by one. When the mirror has an important number of actuators (N) and the actuator response time including stabilization or the necessary metrology time is long, the learning process can be time consuming. In this paper, a fast and accurate method is presented to drive an XDM to a target shape usually with only three or four measurements during inspection. The metrology data are used as feedback to calculate the curvature discrepancy between the current and the target shapes. Three different derivative estimation methods are introduced to calculate the curvature from measured data. The mirror shape is becoming close to the target through iterative compensations. Finally, the feasibility of this simple and effective approach is demonstrated by a series of experiments.

Authors:
 [1];  [2];  [1]
  1. Brookhaven National Lab. (BNL), Upton, NY (United States). NSLS-II
  2. Brookhaven National Lab. (BNL), Upton, NY (United States). NSLS-II; Sichuan Univ., Chengdu (China)
Publication Date:
Research Org.:
Brookhaven National Lab. (BNL), Upton, NY (United States)
Sponsoring Org.:
USDOE Office of Science (SC), Basic Energy Sciences (BES) (SC-22)
Contributing Org.:
Sichuan Univ., Chengdu (China)
OSTI Identifier:
1341652
Report Number(s):
BNL-113376-2016-JA
Journal ID: ISSN 1600-5775; TRN: US1701519
Grant/Contract Number:  
AC02-98CH10886
Resource Type:
Accepted Manuscript
Journal Name:
Journal of Synchrotron Radiation (Online)
Additional Journal Information:
Journal Name: Journal of Synchrotron Radiation (Online); Journal Volume: 23; Journal Issue: 6; Journal ID: ISSN 1600-5775
Publisher:
International Union of Crystallography
Country of Publication:
United States
Language:
English
Subject:
42 ENGINEERING; x-ray deformable mirror; active optics; mirror inspection; windowed Fourier transform; B-spline curve fitting

Citation Formats

Huang, Lei, Xue, Junpeng, and Idir, Mourad. Controlling X-ray deformable mirrors during inspection. United States: N. p., 2016. Web. doi:10.1107/S1600577516014600.
Huang, Lei, Xue, Junpeng, & Idir, Mourad. Controlling X-ray deformable mirrors during inspection. United States. doi:10.1107/S1600577516014600.
Huang, Lei, Xue, Junpeng, and Idir, Mourad. Fri . "Controlling X-ray deformable mirrors during inspection". United States. doi:10.1107/S1600577516014600. https://www.osti.gov/servlets/purl/1341652.
@article{osti_1341652,
title = {Controlling X-ray deformable mirrors during inspection},
author = {Huang, Lei and Xue, Junpeng and Idir, Mourad},
abstractNote = {The X-ray deformable mirror (XDM) is becoming widely used in the present synchrotron/free-electron laser facilities because of its flexibility in correcting wavefront errors or modification of the beam size at the sample location. Owing to coupling among the N actuators of an XDM, (N + 1) or (2N + 1) scans are required to learn the response of each actuator one by one. When the mirror has an important number of actuators (N) and the actuator response time including stabilization or the necessary metrology time is long, the learning process can be time consuming. In this paper, a fast and accurate method is presented to drive an XDM to a target shape usually with only three or four measurements during inspection. The metrology data are used as feedback to calculate the curvature discrepancy between the current and the target shapes. Three different derivative estimation methods are introduced to calculate the curvature from measured data. The mirror shape is becoming close to the target through iterative compensations. Finally, the feasibility of this simple and effective approach is demonstrated by a series of experiments.},
doi = {10.1107/S1600577516014600},
journal = {Journal of Synchrotron Radiation (Online)},
number = 6,
volume = 23,
place = {United States},
year = {2016},
month = {10}
}

Journal Article:
Free Publicly Available Full Text
Publisher's Version of Record

Citation Metrics:
Cited by: 1 work
Citation information provided by
Web of Science

Save / Share:

Works referenced in this record:

Microstitching interferometry for x-ray reflective optics
journal, May 2003

  • Yamauchi, Kazuto; Yamamura, Kazuya; Mimura, Hidekazu
  • Review of Scientific Instruments, Vol. 74, Issue 5
  • DOI: 10.1063/1.1569405

Design Of A Long Trace Surface Profiler
conference, April 1987

  • Takacs, Peter Z.; Qian, Shi-nan; Colbert, Jeffrey
  • OE LASE'87 and EO Imaging Symp (January 1987, Los Angeles), SPIE Proceedings
  • DOI: 10.1117/12.939842

The Nanometer Optical Component Measuring Machine: a new Sub-nm Topography Measuring Device for X-ray Optics at BESSY
conference, January 2004

  • Siewert, Frank
  • SYNCHROTRON RADIATION INSTRUMENTATION: Eighth International Conference on Synchrotron Radiation Instrumentation, AIP Conference Proceedings
  • DOI: 10.1063/1.1757928

A 2 D high accuracy slope measuring system based on a Stitching Shack Hartmann Optical Head
journal, January 2014

  • Idir, Mourad; Kaznatcheev, Konstantine; Dovillaire, Guillaume
  • Optics Express, Vol. 22, Issue 3
  • DOI: 10.1364/OE.22.002770

B-spline signal processing. I. Theory
journal, January 1993

  • Unser, M.; Aldroubi, A.; Eden, M.
  • IEEE Transactions on Signal Processing, Vol. 41, Issue 2
  • DOI: 10.1109/78.193220

The penta‐prism LTP: A long‐trace‐profiler with stationary optical head and moving penta prism a)
journal, March 1995

  • Qian, Shinan; Jark, Werner; Takacs, Peter Z.
  • Review of Scientific Instruments, Vol. 66, Issue 3
  • DOI: 10.1063/1.1145658