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Title: New figuring model based on surface slope profile for grazing-incidence reflective optics

Surface slope profile is widely used in the metrology of grazing-incidence reflective optics instead of surface height profile. Nevertheless, the theoretical and experimental model currently used in deterministic optical figuring processes is based on surface height, not on surface slope. This means that the raw slope profile data from metrology need to be converted to height profile to perform the current height-based figuring processes. The inevitable measurement noise in the raw slope data will introduce significant cumulative error in the resultant height profiles. As a consequence, this conversion will degrade the determinism of the figuring processes, and will have an impact on the ultimate surface figuring results. To overcome this problem, an innovative figuring model is proposed, which directly uses the raw slope profile data instead of the usual height data as input for the deterministic process. In this article, first the influence of the measurement noise on the resultant height profile is analyzed, and then a new model is presented; finally a demonstration experiment is carried out using a one-dimensional ion beam figuring process to demonstrate the validity of our approach.
Authors:
 [1] ;  [2] ;  [2] ;  [2] ;  [2] ;  [3] ;  [3] ;  [2]
  1. National Univ. of Defense Technology, Changsha, Hunan (China). College of Mechatronic Engineering and Automation; Brookhaven National Lab. (BNL), Upton, NY (United States). National Synchrotron Light Source II (NSLS-II); Hu'nan Key Lab. of Ultra-precision Machining Technology, Changsha, Hunan (China)
  2. Brookhaven National Lab. (BNL), Upton, NY (United States). National Synchrotron Light Source II (NSLS-II)
  3. National Univ. of Defense Technology, Changsha, Hunan (China). College of Mechatronic Engineering and Automation; Hu'nan Key Lab. of Ultra-precision Machining Technology, Changsha, Hunan (China)
Publication Date:
Report Number(s):
BNL-113213-2016-JA
Journal ID: ISSN 1600-5775; JSYRES; TRN: US1701734
Grant/Contract Number:
SC0012704
Type:
Accepted Manuscript
Journal Name:
Journal of Synchrotron Radiation (Online)
Additional Journal Information:
Journal Name: Journal of Synchrotron Radiation (Online); Journal Volume: 23; Journal Issue: 5; Journal ID: ISSN 1600-5775
Publisher:
International Union of Crystallography
Research Org:
Brookhaven National Laboratory (BNL), Upton, NY (United States)
Sponsoring Org:
USDOE Office of Science (SC), Basic Energy Sciences (BES) (SC-22)
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; ion beam figuring; synchrotron optics; one-dimensional; surface slope
OSTI Identifier:
1340406