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Title: Tuning the transition temperature of WSi$$_{x}$$ alloys for use in cryogenic microcalorimeters

Here, microwave kinetic inductance detectors (MKID) provide a pathway to highly multiplexed, high-resolution, detectors. Over the past several years we have introduced the concept of the Thermal Kinetic Inductance Detector (TKID), which operates as a microcalorimeter. As with other microcalorimeters, the thermal noise of a TKID is reduced when the operating temperature is decreased. However, because the sensitivity of a TKID decreases as the operating temperature drops below 20% of T C, the T C of the resonator material must be tuned to match the desired operating temperature. We have investigated the WSi$$_{x}$$ alloy system as a material for these detectors. By co-sputtering from a Si andW2Si target, we have deposited WSi$$_{x}$$ films with a tunable T C that ranges from 5 K down to 500 mK. These films provide a large kinetic inductance fraction and relatively low noise levels. We provide results of these studies showing the T C, resistivity, quality factors, and noise as a function of deposition conditions. These results show that WSi$$_{x}$$ is a good candidate for TKIDs.
Authors:
 [1] ;  [1] ;  [1] ;  [2] ;  [1]
  1. Argonne National Lab. (ANL), Argonne, IL (United States)
  2. Argonne National Lab. (ANL), Argonne, IL (United States); Northwestern Univ., Evanston, IL (United States)
Publication Date:
Grant/Contract Number:
AC02-06CH11357
Type:
Accepted Manuscript
Journal Name:
Journal of Low Temperature Physics
Additional Journal Information:
Journal Volume: 184; Journal Issue: 1-2; Journal ID: ISSN 0022-2291
Publisher:
Plenum Press
Research Org:
Argonne National Lab. (ANL), Argonne, IL (United States)
Sponsoring Org:
USDOE Office of Science (SC), Basic Energy Sciences (BES) (SC-22)
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; low temperature detector; kinetic inductance detector; materials; tungsten silicide
OSTI Identifier:
1339420

Cecil, T., Gades, L., Madden, T., Yan, D., and Miceli, A.. Tuning the transition temperature of WSi$_{x}$ alloys for use in cryogenic microcalorimeters. United States: N. p., Web. doi:10.1007/s10909-016-1588-7.
Cecil, T., Gades, L., Madden, T., Yan, D., & Miceli, A.. Tuning the transition temperature of WSi$_{x}$ alloys for use in cryogenic microcalorimeters. United States. doi:10.1007/s10909-016-1588-7.
Cecil, T., Gades, L., Madden, T., Yan, D., and Miceli, A.. 2016. "Tuning the transition temperature of WSi$_{x}$ alloys for use in cryogenic microcalorimeters". United States. doi:10.1007/s10909-016-1588-7. https://www.osti.gov/servlets/purl/1339420.
@article{osti_1339420,
title = {Tuning the transition temperature of WSi$_{x}$ alloys for use in cryogenic microcalorimeters},
author = {Cecil, T. and Gades, L. and Madden, T. and Yan, D. and Miceli, A.},
abstractNote = {Here, microwave kinetic inductance detectors (MKID) provide a pathway to highly multiplexed, high-resolution, detectors. Over the past several years we have introduced the concept of the Thermal Kinetic Inductance Detector (TKID), which operates as a microcalorimeter. As with other microcalorimeters, the thermal noise of a TKID is reduced when the operating temperature is decreased. However, because the sensitivity of a TKID decreases as the operating temperature drops below 20% of TC, the TC of the resonator material must be tuned to match the desired operating temperature. We have investigated the WSi$_{x}$ alloy system as a material for these detectors. By co-sputtering from a Si andW2Si target, we have deposited WSi$_{x}$ films with a tunable TC that ranges from 5 K down to 500 mK. These films provide a large kinetic inductance fraction and relatively low noise levels. We provide results of these studies showing the TC, resistivity, quality factors, and noise as a function of deposition conditions. These results show that WSi$_{x}$ is a good candidate for TKIDs.},
doi = {10.1007/s10909-016-1588-7},
journal = {Journal of Low Temperature Physics},
number = 1-2,
volume = 184,
place = {United States},
year = {2016},
month = {3}
}