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Title: Model polymer etching and surface modification by a time modulated RF plasma jet: role of atomic oxygen and water vapor

Authors:
; ; ; ; ;
Publication Date:
Grant/Contract Number:
SC0001939
Type:
Publisher's Accepted Manuscript
Journal Name:
Journal of Physics. D, Applied Physics
Additional Journal Information:
Journal Volume: 50; Journal Issue: 3; Related Information: CHORUS Timestamp: 2016-12-14 02:07:42; Journal ID: ISSN 0022-3727
Publisher:
IOP Publishing
Sponsoring Org:
USDOE
Country of Publication:
United Kingdom
Language:
English
OSTI Identifier:
1335531