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Title: Diamond synthesis at atmospheric pressure by microwave capillary plasma chemical vapor deposition

Abstract

Polycrystalline diamond has been successfully synthesized on silicon substrates at atmospheric pressure using a microwave capillary plasma chemical vapor deposition technique. The CH4/Ar plasma was generated inside of quartz capillary tubes using 2.45 GHz microwave excitation without adding H2 into the deposition gas chemistry. Electronically excited species of CN, C2, Ar, N2, CH, Hβ and Hα were observed in emission spectra. Raman measurements of deposited material indicate the formation of well-crystallized diamond, as evidenced by the sharp T2g phonon at 1333 cm-1 peak relative to the Raman features of graphitic carbon. Furthermore, field emission scanning electron microscopy (SEM) images reveal that, depending on the on growth conditions, the carbon microstructures of grown films exhibit “coral” and “cauliflower-like” morphologies or well-facetted diamond crystals with grain sizes ranging from 100 nm to 10 μm.

Authors:
ORCiD logo [1];  [1]; ORCiD logo [1]
  1. Carnegie Inst. of Washington, Washington, D.C. (United States)
Publication Date:
Research Org.:
Carnegie Inst. of Washington, Washington, DC (United States); Energy Frontier Research Centers (EFRC) (United States). Energy Frontier Research in Extreme Environments (EFree)
Sponsoring Org.:
USDOE National Nuclear Security Administration (NNSA)
OSTI Identifier:
1335449
Alternate Identifier(s):
OSTI ID: 1224932
Grant/Contract Number:  
NA0002006; SC0001057; W31P4Q1310005; NA-002006
Resource Type:
Accepted Manuscript
Journal Name:
Applied Physics Letters
Additional Journal Information:
Journal Volume: 107; Journal Issue: 18; Journal ID: ISSN 0003-6951
Publisher:
American Institute of Physics (AIP)
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; 70 PLASMA PHYSICS AND FUSION TECHNOLOGY; Methane; diamond; atmospheric pressure

Citation Formats

Gou, Huiyang, Hemley, Russell J., and Hemawan, Kadek W. Diamond synthesis at atmospheric pressure by microwave capillary plasma chemical vapor deposition. United States: N. p., 2015. Web. doi:10.1063/1.4934751.
Gou, Huiyang, Hemley, Russell J., & Hemawan, Kadek W. Diamond synthesis at atmospheric pressure by microwave capillary plasma chemical vapor deposition. United States. doi:10.1063/1.4934751.
Gou, Huiyang, Hemley, Russell J., and Hemawan, Kadek W. Mon . "Diamond synthesis at atmospheric pressure by microwave capillary plasma chemical vapor deposition". United States. doi:10.1063/1.4934751. https://www.osti.gov/servlets/purl/1335449.
@article{osti_1335449,
title = {Diamond synthesis at atmospheric pressure by microwave capillary plasma chemical vapor deposition},
author = {Gou, Huiyang and Hemley, Russell J. and Hemawan, Kadek W.},
abstractNote = {Polycrystalline diamond has been successfully synthesized on silicon substrates at atmospheric pressure using a microwave capillary plasma chemical vapor deposition technique. The CH4/Ar plasma was generated inside of quartz capillary tubes using 2.45 GHz microwave excitation without adding H2 into the deposition gas chemistry. Electronically excited species of CN, C2, Ar, N2, CH, Hβ and Hα were observed in emission spectra. Raman measurements of deposited material indicate the formation of well-crystallized diamond, as evidenced by the sharp T2g phonon at 1333 cm-1 peak relative to the Raman features of graphitic carbon. Furthermore, field emission scanning electron microscopy (SEM) images reveal that, depending on the on growth conditions, the carbon microstructures of grown films exhibit “coral” and “cauliflower-like” morphologies or well-facetted diamond crystals with grain sizes ranging from 100 nm to 10 μm.},
doi = {10.1063/1.4934751},
journal = {Applied Physics Letters},
number = 18,
volume = 107,
place = {United States},
year = {2015},
month = {11}
}

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    Works referencing / citing this record:

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