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Title: Si:SrTiO3-Al2O3-Si:SrTiO3 multi-dielectric architecture for metal-insulator-metal capacitor applications

Authors:
ORCiD logo [1] ; ORCiD logo [1] ; ORCiD logo [2] ;  [1]
  1. Department of Physics and Institute for Functional Nanomaterials, University of Puerto Rico, P.O. Box 70377, San Juan, Puerto Rico 00936-8377, USA
  2. Department of Physics and Institute for Functional Nanomaterials, University of Puerto Rico, P.O. Box 70377, San Juan, Puerto Rico 00936-8377, USA, School of Chemistry and Physics, St. Andrews University, St. Andrews, Scotland KY16 9ST, United Kingdom
Publication Date:
Grant/Contract Number:
FG02-08ER46526
Type:
Publisher's Accepted Manuscript
Journal Name:
Applied Physics Letters
Additional Journal Information:
Journal Volume: 109; Journal Issue: 21; Related Information: CHORUS Timestamp: 2018-03-09 12:27:06; Journal ID: ISSN 0003-6951
Publisher:
American Institute of Physics
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English
OSTI Identifier:
1333015