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This content will become publicly available on November 1, 2017

Title: Effect of the nature of the substrate on the surface chemistry of atomic layer deposition precursors

Authors:
; ; ;
Publication Date:
Grant/Contract Number:
FG02-03ER46599
Type:
Publisher's Accepted Manuscript
Journal Name:
Journal of Chemical Physics
Additional Journal Information:
Journal Volume: 146; Journal Issue: 5; Related Information: CHORUS Timestamp: 2017-06-24 22:32:15; Journal ID: ISSN 0021-9606
Publisher:
American Institute of Physics
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English
OSTI Identifier:
1330595
Alternate Identifier(s):
OSTI ID: 1330595