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Title: Effect of the nature of the substrate on the surface chemistry of atomic layer deposition precursors

Authors:
 [1] ;  [2] ;  [2] ;  [1]
  1. Department of Chemistry, University of California, Riverside, California 92521, USA
  2. Department of Chemistry, Carleton University, Ottawa, Ontario K1S 5B6, Canada
Publication Date:
Grant/Contract Number:
FG02-03ER46599
Type:
Publisher's Accepted Manuscript
Journal Name:
The Journal of Chemical Physics
Additional Journal Information:
Journal Volume: 146; Journal Issue: 5; Related Information: CHORUS Timestamp: 2018-03-09 11:46:19; Journal ID: ISSN 0021-9606
Publisher:
American Institute of Physics
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English
OSTI Identifier:
1330595