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Title: Understanding the Rocksalt-to-Wurtzite phase transformation through microstructural analysis of (Al,Sc)N epitaxial thin films

Authors:
 [1];  [2];  [3];  [2];  [4]
  1. Department of Materials Science and Engineering, University of California, Berkeley, California 94720, USA
  2. School of Materials Engineering, Purdue University, West Lafayette, Indiana 47907, USA, Birck Nanotechnology Center, Purdue University, West Lafayette, Indiana 47907, USA
  3. Center for Functional Nanomaterials, Brookhaven National Laboratory, Upton, New York 11973-5000, USA
  4. Bradley Department of Electrical and Computer Engineering and Department of Materials Science and Engineering, Virginia Tech, Blacksburg, Virginia 24061, USA
Publication Date:
Sponsoring Org.:
USDOE
OSTI Identifier:
1330120
Grant/Contract Number:  
CBET-1048616; AC02-98CH10886
Resource Type:
Publisher's Accepted Manuscript
Journal Name:
Applied Physics Letters
Additional Journal Information:
Journal Name: Applied Physics Letters Journal Volume: 109 Journal Issue: 17; Journal ID: ISSN 0003-6951
Publisher:
American Institute of Physics
Country of Publication:
United States
Language:
English

Citation Formats

Saha, Bivas, Saber, Sammy, Stach, Eric A., Kvam, Eric P., and Sands, Timothy D. Understanding the Rocksalt-to-Wurtzite phase transformation through microstructural analysis of (Al,Sc)N epitaxial thin films. United States: N. p., 2016. Web. doi:10.1063/1.4966278.
Saha, Bivas, Saber, Sammy, Stach, Eric A., Kvam, Eric P., & Sands, Timothy D. Understanding the Rocksalt-to-Wurtzite phase transformation through microstructural analysis of (Al,Sc)N epitaxial thin films. United States. https://doi.org/10.1063/1.4966278
Saha, Bivas, Saber, Sammy, Stach, Eric A., Kvam, Eric P., and Sands, Timothy D. Wed . "Understanding the Rocksalt-to-Wurtzite phase transformation through microstructural analysis of (Al,Sc)N epitaxial thin films". United States. https://doi.org/10.1063/1.4966278.
@article{osti_1330120,
title = {Understanding the Rocksalt-to-Wurtzite phase transformation through microstructural analysis of (Al,Sc)N epitaxial thin films},
author = {Saha, Bivas and Saber, Sammy and Stach, Eric A. and Kvam, Eric P. and Sands, Timothy D.},
abstractNote = {},
doi = {10.1063/1.4966278},
journal = {Applied Physics Letters},
number = 17,
volume = 109,
place = {United States},
year = {Wed Oct 26 00:00:00 EDT 2016},
month = {Wed Oct 26 00:00:00 EDT 2016}
}

Journal Article:
Free Publicly Available Full Text
Publisher's Version of Record
https://doi.org/10.1063/1.4966278

Citation Metrics:
Cited by: 11 works
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