Damage-free laser patterning of silicon nitride on textured crystalline silicon using an amorphous silicon etch mask for Ni/Cu plated silicon solar cells

Bailly, Mark S.; Karas, Joseph; Jain, Harsh; Dauksher, William J.; Bowden, Stuart

doi:10.1016/j.tsf.2016.06.011

Title: Damage-free laser patterning of silicon nitride on textured crystalline silicon using an amorphous silicon etch mask for Ni/Cu plated silicon solar cells

Journal Article · 01 August 2016 · Thin Solid Films

DOI: https://doi.org/10.1016/j.tsf.2016.06.011 · OSTI ID:1328527

Bailly, Mark S.; Karas, Joseph; Jain, Harsh; Dauksher, William J.; Bowden, Stuart

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Sponsoring Organization:: USDOE Office of Energy Efficiency and Renewable Energy (EERE)

OSTI ID:: 1328527

Journal Information:: Thin Solid Films, Journal Name: Thin Solid Films Vol. 612 Journal Issue: C; ISSN 0040-6090

Publisher:: ElsevierCopyright Statement

Country of Publication:: Netherlands

Language:: English

References (8)

Electrical and Mechanical Properties of Plated Ni/Cu Contacts for Si Solar Cells Kluska, Sven; Bartsch, Jonas; Büchler, Andreas Energy Procedia, Vol. 77 https://doi.org/10.1016/j.egypro.2015.07.104	journal	August 2015
Localization and characterization of annealing-induced shunts in Ni-plated monocrystalline silicon solar cells: Localization and characterization of annealing-induced shunts in Ni-plated monocrystalline silicon solar cells Büchler, Andreas; Kluska, Sven; Kasemann, Martin physica status solidi (RRL) - Rapid Research Letters, Vol. 8, Issue 5 https://doi.org/10.1002/pssr.201409036	journal	February 2014
Overcoming electrical and mechanical challenges of continuous wave laser processing for Ni–Cu plated solar cells Geisler, C.; Hördt, W.; Kluska, S. Solar Energy Materials and Solar Cells, Vol. 133 https://doi.org/10.1016/j.solmat.2014.11.010	journal	February 2015
Selective laser ablation of SiN _x layers on textured surfaces for low temperature front side metallizations: LASER ABLATION OF SiN _x ON TEXTURED SURFACES Knorz, Annerose; Peters, Marius; Grohe, Andreas Progress in Photovoltaics: Research and Applications, Vol. 17, Issue 2 https://doi.org/10.1002/pip.856	journal	October 2008
Impact of surface topography and laser pulse duration for laser ablation of solar cell front side passivating SiNx layers Hermann, Sonja; Dezhdar, Tara; Harder, Nils-Peter Journal of Applied Physics, Vol. 108, Issue 11 https://doi.org/10.1063/1.3493204	journal	December 2010
Guidelines for efficient direct ablation of dielectrics with single femtosecond pulses Lebugle, M.; Sanner, N.; Utéza, O. Applied Physics A, Vol. 114, Issue 1 https://doi.org/10.1007/s00339-013-8153-x	journal	November 2013
N2O plasma treatment for minimization of background plating in silicon solar cells with Ni–Cu front side metallization Raval, Mehul C.; Saseendran, Sandeep S.; Suckow, Stephan Solar Energy Materials and Solar Cells, Vol. 144 https://doi.org/10.1016/j.solmat.2015.10.002	journal	January 2016
The Origin of Background Plating Braun, Stefan; Zuschlag, Annika; Raabe, Bernd Energy Procedia, Vol. 8 https://doi.org/10.1016/j.egypro.2011.06.183	journal	January 2011

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