DOE PAGES title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Damage-free laser patterning of silicon nitride on textured crystalline silicon using an amorphous silicon etch mask for Ni/Cu plated silicon solar cells

Authors:
; ; ; ;
Publication Date:
Sponsoring Org.:
USDOE Office of Energy Efficiency and Renewable Energy (EERE)
OSTI Identifier:
1328527
Resource Type:
Publisher's Accepted Manuscript
Journal Name:
Thin Solid Films
Additional Journal Information:
Journal Name: Thin Solid Films Journal Volume: 612 Journal Issue: C; Journal ID: ISSN 0040-6090
Publisher:
Elsevier
Country of Publication:
Netherlands
Language:
English

Citation Formats

Bailly, Mark S., Karas, Joseph, Jain, Harsh, Dauksher, William J., and Bowden, Stuart. Damage-free laser patterning of silicon nitride on textured crystalline silicon using an amorphous silicon etch mask for Ni/Cu plated silicon solar cells. Netherlands: N. p., 2016. Web. doi:10.1016/j.tsf.2016.06.011.
Bailly, Mark S., Karas, Joseph, Jain, Harsh, Dauksher, William J., & Bowden, Stuart. Damage-free laser patterning of silicon nitride on textured crystalline silicon using an amorphous silicon etch mask for Ni/Cu plated silicon solar cells. Netherlands. https://doi.org/10.1016/j.tsf.2016.06.011
Bailly, Mark S., Karas, Joseph, Jain, Harsh, Dauksher, William J., and Bowden, Stuart. Mon . "Damage-free laser patterning of silicon nitride on textured crystalline silicon using an amorphous silicon etch mask for Ni/Cu plated silicon solar cells". Netherlands. https://doi.org/10.1016/j.tsf.2016.06.011.
@article{osti_1328527,
title = {Damage-free laser patterning of silicon nitride on textured crystalline silicon using an amorphous silicon etch mask for Ni/Cu plated silicon solar cells},
author = {Bailly, Mark S. and Karas, Joseph and Jain, Harsh and Dauksher, William J. and Bowden, Stuart},
abstractNote = {},
doi = {10.1016/j.tsf.2016.06.011},
journal = {Thin Solid Films},
number = C,
volume = 612,
place = {Netherlands},
year = {2016},
month = {8}
}

Journal Article:
Free Publicly Available Full Text
Publisher's Version of Record
https://doi.org/10.1016/j.tsf.2016.06.011

Citation Metrics:
Cited by: 5 works
Citation information provided by
Web of Science

Save / Share:

Works referenced in this record:

Electrical and Mechanical Properties of Plated Ni/Cu Contacts for Si Solar Cells
journal, August 2015


Overcoming electrical and mechanical challenges of continuous wave laser processing for Ni–Cu plated solar cells
journal, February 2015


Selective laser ablation of SiN x layers on textured surfaces for low temperature front side metallizations: LASER ABLATION OF SiN x ON TEXTURED SURFACES
journal, October 2008

  • Knorz, Annerose; Peters, Marius; Grohe, Andreas
  • Progress in Photovoltaics: Research and Applications, Vol. 17, Issue 2
  • DOI: 10.1002/pip.856

Impact of surface topography and laser pulse duration for laser ablation of solar cell front side passivating SiNx layers
journal, December 2010

  • Hermann, Sonja; Dezhdar, Tara; Harder, Nils-Peter
  • Journal of Applied Physics, Vol. 108, Issue 11
  • DOI: 10.1063/1.3493204

Guidelines for efficient direct ablation of dielectrics with single femtosecond pulses
journal, November 2013


N2O plasma treatment for minimization of background plating in silicon solar cells with Ni–Cu front side metallization
journal, January 2016

  • Raval, Mehul C.; Saseendran, Sandeep S.; Suckow, Stephan
  • Solar Energy Materials and Solar Cells, Vol. 144
  • DOI: 10.1016/j.solmat.2015.10.002

The Origin of Background Plating
journal, January 2011