Damage-free laser patterning of silicon nitride on textured crystalline silicon using an amorphous silicon etch mask for Ni/Cu plated silicon solar cells

Bailly, Mark S.; Karas, Joseph; Jain, Harsh; Dauksher, William J.; Bowden, Stuart

doi:10.1016/j.tsf.2016.06.011

Title: Damage-free laser patterning of silicon nitride on textured crystalline silicon using an amorphous silicon etch mask for Ni/Cu plated silicon solar cells

Authors:: Bailly, Mark S.; Karas, Joseph; Jain, Harsh; Dauksher, William J.; Bowden, Stuart

Publication Date:: Mon Aug 01 00:00:00 EDT 2016

Sponsoring Org.:: USDOE Office of Energy Efficiency and Renewable Energy (EERE)

OSTI Identifier:: 1328527

Resource Type:: Publisher's Accepted Manuscript

Journal Name:: Thin Solid Films

Additional Journal Information:: Journal Name: Thin Solid Films Journal Volume: 612 Journal Issue: C; Journal ID: ISSN 0040-6090

Publisher:: Elsevier

Country of Publication:: Netherlands

Language:: English

Citation Formats


                    Bailly, Mark S., Karas, Joseph, Jain, Harsh, Dauksher, William J., and Bowden, Stuart. Damage-free laser patterning of silicon nitride on textured crystalline silicon using an amorphous silicon etch mask for Ni/Cu plated silicon solar cells.  Netherlands: N. p., 2016. 
Web.  doi:10.1016/j.tsf.2016.06.011.

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                    Bailly, Mark S., Karas, Joseph, Jain, Harsh, Dauksher, William J., & Bowden, Stuart. Damage-free laser patterning of silicon nitride on textured crystalline silicon using an amorphous silicon etch mask for Ni/Cu plated silicon solar cells.  Netherlands.  https://doi.org/10.1016/j.tsf.2016.06.011

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                    Bailly, Mark S., Karas, Joseph, Jain, Harsh, Dauksher, William J., and Bowden, Stuart. Mon .  
"Damage-free laser patterning of silicon nitride on textured crystalline silicon using an amorphous silicon etch mask for Ni/Cu plated silicon solar cells".  Netherlands.  https://doi.org/10.1016/j.tsf.2016.06.011.

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@article{osti_1328527,

  title        = {Damage-free laser patterning of silicon nitride on textured crystalline silicon using an amorphous silicon etch mask for Ni/Cu plated silicon solar cells},

  author       = {Bailly, Mark S. and Karas, Joseph and Jain, Harsh and Dauksher, William J. and Bowden, Stuart},

  abstractNote = {},

  doi          = {10.1016/j.tsf.2016.06.011},

  journal      = {Thin Solid Films},

  number       = C,

  volume       = 612,

  place        = {Netherlands},

  year         = {Mon Aug 01 00:00:00 EDT 2016},

  month        = {Mon Aug 01 00:00:00 EDT 2016}

}

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https://doi.org/10.1016/j.tsf.2016.06.011

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Cited by: 5 works

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Works referenced in this record:

Electrical and Mechanical Properties of Plated Ni/Cu Contacts for Si Solar Cells
journal, August 2015

Kluska, Sven; Bartsch, Jonas; Büchler, Andreas
Energy Procedia, Vol. 77
DOI: 10.1016/j.egypro.2015.07.104

Localization and characterization of annealing-induced shunts in Ni-plated monocrystalline silicon solar cells: Localization and characterization of annealing-induced shunts in Ni-plated monocrystalline silicon solar cells
journal, February 2014

Büchler, Andreas; Kluska, Sven; Kasemann, Martin
physica status solidi (RRL) - Rapid Research Letters, Vol. 8, Issue 5
DOI: 10.1002/pssr.201409036

Overcoming electrical and mechanical challenges of continuous wave laser processing for Ni–Cu plated solar cells
journal, February 2015

Geisler, C.; Hördt, W.; Kluska, S.
Solar Energy Materials and Solar Cells, Vol. 133
DOI: 10.1016/j.solmat.2014.11.010

Selective laser ablation of SiN _x layers on textured surfaces for low temperature front side metallizations: LASER ABLATION OF SiN _x ON TEXTURED SURFACES
journal, October 2008

Knorz, Annerose; Peters, Marius; Grohe, Andreas
Progress in Photovoltaics: Research and Applications, Vol. 17, Issue 2
DOI: 10.1002/pip.856

Impact of surface topography and laser pulse duration for laser ablation of solar cell front side passivating SiNx layers
journal, December 2010

Hermann, Sonja; Dezhdar, Tara; Harder, Nils-Peter
Journal of Applied Physics, Vol. 108, Issue 11
DOI: 10.1063/1.3493204

Guidelines for efficient direct ablation of dielectrics with single femtosecond pulses
journal, November 2013

Lebugle, M.; Sanner, N.; Utéza, O.
Applied Physics A, Vol. 114, Issue 1
DOI: 10.1007/s00339-013-8153-x

N2O plasma treatment for minimization of background plating in silicon solar cells with Ni–Cu front side metallization
journal, January 2016

Raval, Mehul C.; Saseendran, Sandeep S.; Suckow, Stephan
Solar Energy Materials and Solar Cells, Vol. 144
DOI: 10.1016/j.solmat.2015.10.002

The Origin of Background Plating
journal, January 2011

Braun, Stefan; Zuschlag, Annika; Raabe, Bernd
Energy Procedia, Vol. 8
DOI: 10.1016/j.egypro.2011.06.183

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Title: Damage-free laser patterning of silicon nitride on textured crystalline silicon using an amorphous silicon etch mask for Ni/Cu plated silicon solar cells

Citation Formats

Electrical and Mechanical Properties of Plated Ni/Cu Contacts for Si Solar Cells journal, August 2015

Localization and characterization of annealing-induced shunts in Ni-plated monocrystalline silicon solar cells: Localization and characterization of annealing-induced shunts in Ni-plated monocrystalline silicon solar cells journal, February 2014

Overcoming electrical and mechanical challenges of continuous wave laser processing for Ni–Cu plated solar cells journal, February 2015

Selective laser ablation of SiN x layers on textured surfaces for low temperature front side metallizations: LASER ABLATION OF SiN x ON TEXTURED SURFACES journal, October 2008

Impact of surface topography and laser pulse duration for laser ablation of solar cell front side passivating SiNx layers journal, December 2010

Guidelines for efficient direct ablation of dielectrics with single femtosecond pulses journal, November 2013

N2O plasma treatment for minimization of background plating in silicon solar cells with Ni–Cu front side metallization journal, January 2016

The Origin of Background Plating journal, January 2011

Electrical and Mechanical Properties of Plated Ni/Cu Contacts for Si Solar Cells
journal, August 2015

Localization and characterization of annealing-induced shunts in Ni-plated monocrystalline silicon solar cells: Localization and characterization of annealing-induced shunts in Ni-plated monocrystalline silicon solar cells
journal, February 2014

Overcoming electrical and mechanical challenges of continuous wave laser processing for Ni–Cu plated solar cells
journal, February 2015

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journal, October 2008

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journal, January 2016

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journal, January 2011