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Title: Investigation of the thermal stability of Mo-In0.45Ga0.47As for applications as source/drain contacts

Authors:
 [1] ;  [2] ;  [1] ;  [2] ;  [3] ;  [3] ;  [1]
  1. Department of Physical Sciences, Dublin City University, Glasnevin, Dublin 9, Ireland
  2. National Institute of Standards and Technology, Gaithersburg, Maryland 20899, USA
  3. SEMATECH, 257 Fuller Road, Suite 2200, Albany, New York 12203, USA
Publication Date:
Grant/Contract Number:
AC02-98CH10886
Type:
Publisher's Accepted Manuscript
Journal Name:
Journal of Applied Physics
Additional Journal Information:
Journal Name: Journal of Applied Physics Journal Volume: 120 Journal Issue: 13; Journal ID: ISSN 0021-8979
Publisher:
American Institute of Physics
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English
OSTI Identifier:
1328523

Walsh, Lee A., Weiland, Conan, McCoy, Anthony P., Woicik, Joseph C., Lee, Rinus T. P., Lysaght, Pat, and Hughes, Greg. Investigation of the thermal stability of Mo-In0.45Ga0.47As for applications as source/drain contacts. United States: N. p., Web. doi:10.1063/1.4964251.
Walsh, Lee A., Weiland, Conan, McCoy, Anthony P., Woicik, Joseph C., Lee, Rinus T. P., Lysaght, Pat, & Hughes, Greg. Investigation of the thermal stability of Mo-In0.45Ga0.47As for applications as source/drain contacts. United States. doi:10.1063/1.4964251.
Walsh, Lee A., Weiland, Conan, McCoy, Anthony P., Woicik, Joseph C., Lee, Rinus T. P., Lysaght, Pat, and Hughes, Greg. 2016. "Investigation of the thermal stability of Mo-In0.45Ga0.47As for applications as source/drain contacts". United States. doi:10.1063/1.4964251.
@article{osti_1328523,
title = {Investigation of the thermal stability of Mo-In0.45Ga0.47As for applications as source/drain contacts},
author = {Walsh, Lee A. and Weiland, Conan and McCoy, Anthony P. and Woicik, Joseph C. and Lee, Rinus T. P. and Lysaght, Pat and Hughes, Greg},
abstractNote = {},
doi = {10.1063/1.4964251},
journal = {Journal of Applied Physics},
number = 13,
volume = 120,
place = {United States},
year = {2016},
month = {10}
}