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Title: Investigation of the thermal stability of Mo-In0.45Ga0.47As for applications as source/drain contacts

Authors:
 [1] ;  [2] ;  [1] ;  [2] ;  [3] ;  [3] ;  [1]
  1. Department of Physical Sciences, Dublin City University, Glasnevin, Dublin 9, Ireland
  2. National Institute of Standards and Technology, Gaithersburg, Maryland 20899, USA
  3. SEMATECH, 257 Fuller Road, Suite 2200, Albany, New York 12203, USA
Publication Date:
Grant/Contract Number:
AC02-98CH10886
Type:
Publisher's Accepted Manuscript
Journal Name:
Journal of Applied Physics
Additional Journal Information:
Journal Volume: 120; Journal Issue: 13; Related Information: CHORUS Timestamp: 2018-03-09 11:12:05; Journal ID: ISSN 0021-8979
Publisher:
American Institute of Physics
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English
OSTI Identifier:
1328523