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Title: Incomplete elimination of precursor ligands during atomic layer deposition of zinc-oxide, tin-oxide, and zinc-tin-oxide

Authors:
; ; ;
Publication Date:
Grant/Contract Number:
SC0004782
Type:
Publisher's Accepted Manuscript
Journal Name:
Journal of Chemical Physics
Additional Journal Information:
Journal Volume: 146; Journal Issue: 5; Related Information: CHORUS Timestamp: 2016-12-25 16:11:07; Journal ID: ISSN 0021-9606
Publisher:
American Institute of Physics
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English
OSTI Identifier:
1322424
Alternate Identifier(s):
OSTI ID: 1322424