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Title: Laser damage mechanisms in conductive widegap semiconductor films

Abstract

Here, laser damage mechanisms of two conductive wide-bandgap semiconductor films - indium tin oxide (ITO) and silicon doped GaN (Si:GaN) were studied via microscopy, spectroscopy, photoluminescence (PL), and elemental analysis. Nanosecond laser pulse exposures with a laser photon energy (1.03 eV, 1064 nm) smaller than the conductive films bandgaps were applied and radically different film damage morphologies were produced. The laser damaged ITO film exhibited deterministic features of thermal degradation. In contrast, laser damage in the Si:GaN film resulted in highly localized eruptions originating at interfaces. For ITO, thermally driven damage was related to free carrier absorption and, for GaN, carbon complexes were proposed as potential damage precursors or markers.

Authors:
 [1];  [1];  [1];  [1];  [1];  [1];  [1];  [2];  [3];  [1];  [1]
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  1. Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
  2. Cornell Univ., Ithaca, NY (United States)
  3. Univ. of Rochester, Rochester, NY (United States)
Publication Date:
Research Org.:
Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1313552
Report Number(s):
LLNL-JRNL-694293
Journal ID: ISSN 1094-4087; OPEXFF
Grant/Contract Number:  
AC52-07NA27344
Resource Type:
Accepted Manuscript
Journal Name:
Optics Express
Additional Journal Information:
Journal Volume: 24; Journal Issue: 16; Journal ID: ISSN 1094-4087
Publisher:
Optical Society of America (OSA)
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; lasers and laser optics; laser materials; laser damage; optics at surfaces

Citation Formats

Yoo, Jae-Hyuck, Menor, Marlon G., Adams, John J., Raman, Rajesh N., Lee, Jonathan R. I., Olson, Tammy Y., Shen, Nan, Suh, Joonki, Demos, Stavros G., Bude, Jeff, and Elhadj, Selim. Laser damage mechanisms in conductive widegap semiconductor films. United States: N. p., 2016. Web. doi:10.1364/OE.24.017616.
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Yoo, Jae-Hyuck, Menor, Marlon G., Adams, John J., Raman, Rajesh N., Lee, Jonathan R. I., Olson, Tammy Y., Shen, Nan, Suh, Joonki, Demos, Stavros G., Bude, Jeff, & Elhadj, Selim. Laser damage mechanisms in conductive widegap semiconductor films. United States. https://doi.org/10.1364/OE.24.017616
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Yoo, Jae-Hyuck, Menor, Marlon G., Adams, John J., Raman, Rajesh N., Lee, Jonathan R. I., Olson, Tammy Y., Shen, Nan, Suh, Joonki, Demos, Stavros G., Bude, Jeff, and Elhadj, Selim. Mon . "Laser damage mechanisms in conductive widegap semiconductor films". United States. https://doi.org/10.1364/OE.24.017616. https://www.osti.gov/servlets/purl/1313552.
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@article{osti_1313552,
title = {Laser damage mechanisms in conductive widegap semiconductor films},
author = {Yoo, Jae-Hyuck and Menor, Marlon G. and Adams, John J. and Raman, Rajesh N. and Lee, Jonathan R. I. and Olson, Tammy Y. and Shen, Nan and Suh, Joonki and Demos, Stavros G. and Bude, Jeff and Elhadj, Selim},
abstractNote = {Here, laser damage mechanisms of two conductive wide-bandgap semiconductor films - indium tin oxide (ITO) and silicon doped GaN (Si:GaN) were studied via microscopy, spectroscopy, photoluminescence (PL), and elemental analysis. Nanosecond laser pulse exposures with a laser photon energy (1.03 eV, 1064 nm) smaller than the conductive films bandgaps were applied and radically different film damage morphologies were produced. The laser damaged ITO film exhibited deterministic features of thermal degradation. In contrast, laser damage in the Si:GaN film resulted in highly localized eruptions originating at interfaces. For ITO, thermally driven damage was related to free carrier absorption and, for GaN, carbon complexes were proposed as potential damage precursors or markers.},
doi = {10.1364/OE.24.017616},
journal = {Optics Express},
number = 16,
volume = 24,
place = {United States},
year = {Mon Jul 25 00:00:00 EDT 2016},
month = {Mon Jul 25 00:00:00 EDT 2016}
}
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Journal Article:
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Publisher's Version of Record
https://doi.org/10.1364/OE.24.017616
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Cited by: 25 works
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Figures / Tables:

Table 1 Table 1: Single shot laser damage characterization as a function of laser fluence.
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    Works referencing / citing this record:

    A Survey of Transparent Conducting Films and Optoelectrical Materials for High Optical Power Applications
    journal, September 2019

    • Yoo, Jae-Hyuck; Lange, Andrew; Chesser, John
    • physica status solidi (a), Vol. 216, Issue 22
    • DOI: 10.1002/pssa.201970073

    Mid-infrared femtosecond laser-induced damages in As2S3 and As2Se3 chalcogenide glasses
    journal, July 2017

    Lifetime laser damage performance of β-Ga 2 O 3 for high power applications
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    • Yoo, Jae-Hyuck; Rafique, Subrina; Lange, Andrew
    • APL Materials, Vol. 6, Issue 3
    • DOI: 10.1063/1.5021603

    Thermally ruggedized ITO transparent electrode films for high power optoelectronics
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    • Yoo, Jae-Hyuck; Matthews, Manyalibo; Ramsey, Phil
    • Optics Express, Vol. 25, Issue 21
    • DOI: 10.1364/oe.25.025533

    A Survey of Transparent Conducting Films and Optoelectrical Materials for High Optical Power Applications
    journal, September 2019

    • Yoo, Jae-Hyuck; Lange, Andrew; Chesser, John
    • physica status solidi (a), Vol. 216, Issue 22
    • DOI: 10.1002/pssa.201900459
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      Figures / Tables found in this record:

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