Fabrication and characterization of a co-planar detector in diamond for low energy single ion implantation

Abraham, John Bishoy Sam; Pacheco, Jose L.; Aguirre, Brandon Adrian; Vizkelethy, Gyorgy; Bielejec, Edward S.

doi:10.1063/1.4960968

Title: Fabrication and characterization of a co-planar detector in diamond for low energy single ion implantation

Journal Article · 08 August 2016 · Applied Physics Letters

DOI: https://doi.org/10.1063/1.4960968 · OSTI ID:1301988

Abraham, John Bishoy Sam ^[1]; Pacheco, Jose L. ^[1]; Aguirre, Brandon Adrian ^[1]; Vizkelethy, Gyorgy ^[1]; Bielejec, Edward S. ^[1]

Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)

We demonstrate low energy single ion detection using a co-planar detector fabricated on a diamond substrate and characterized by ion beam induced charge collection. Histograms are taken with low fluence ion pulses illustrating quantized ion detection down to a single ion with a signal-to-noise ratio of approximately 10. We anticipate that this detection technique can serve as a basis to optimize the yield of single color centers in diamond. In conclusion, the ability to count ions into a diamond substrate is expected to reduce the uncertainty in the yield of color center formation by removing Poisson statistics from the implantation process.

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Research Organization:: Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)

Sponsoring Organization:: USDOE National Nuclear Security Administration (NNSA)

Grant/Contract Number:: AC04-94AL85000

OSTI ID:: 1301988

Alternate ID(s):: OSTI ID: 1367120; OSTI ID: 1287754

Report Number(s):: SAND--2016-4671J; 640339

Journal Information:: Applied Physics Letters, Journal Name: Applied Physics Letters Vol. 109; ISSN 0003-6951

Publisher:: American Institute of Physics (AIP)Copyright Statement

Country of Publication:: United States

Language:: English

References (29)

Depth distributions and range parameters for elements implanted into single-crystal diamonds and chemically vapor-deposited polycrystal diamond films Wilson, R. G. Surface and Coatings Technology, Vol. 47, Issue 1-3 https://doi.org/10.1016/0257-8972(91)90326-R	journal	August 1991
Spectroscopic response of coplanar diamond alpha particle detectors Sellin, P. J.; Breese, M. B. H. IEEE Transactions on Nuclear Science, Vol. 48, Issue 6 https://doi.org/10.1109/23.983257	journal	January 2001
Indistinguishable Photons from Separated Silicon-Vacancy Centers in Diamond Sipahigil, A.; Jahnke, K. D.; Rogers, L. J. Physical Review Letters, Vol. 113, Issue 11 https://doi.org/10.1103/PhysRevLett.113.113602	journal	September 2014
Single-protein spin resonance spectroscopy under ambient conditions Shi, F.; Zhang, Q.; Wang, P. Science, Vol. 347, Issue 6226 https://doi.org/10.1126/science.aaa2253	journal	March 2015
Enhanced generation of single optically active spins in diamond by ion implantation Naydenov, Boris; Richter, V.; Beck, Johannes Applied Physics Letters, Vol. 96, Issue 16 https://doi.org/10.1063/1.3409221	journal	April 2010
Room temperature single ion detection with Geiger mode avalanche diode detectors Seamons, J. A.; Bielejec, E.; Carroll, M. S. Applied Physics Letters, Vol. 93, Issue 4 https://doi.org/10.1063/1.2967211	journal	July 2008
Highly tunable formation of nitrogen-vacancy centers via ion implantation Sangtawesin, S.; Brundage, T. O.; Atkins, Z. J. Applied Physics Letters, Vol. 105, Issue 6 https://doi.org/10.1063/1.4892971	journal	August 2014
A general expression for electrostatic induction and its application to semiconductor devices Gunn, J. B. Solid-State Electronics, Vol. 7, Issue 10 https://doi.org/10.1016/0038-1101(64)90031-0	journal	October 1964
High-quality diamond grown by chemical-vapor deposition: Improved collection efficiency in α-particle detection Marinelli, Marco; Milani, E.; Paoletti, A. Applied Physics Letters, Vol. 75, Issue 20 https://doi.org/10.1063/1.125282	journal	November 1999
Single ion implantation for single donor devices using Geiger mode detectors Bielejec, E.; Seamons, J. A.; Carroll, M. S. Nanotechnology, Vol. 21, Issue 8 https://doi.org/10.1088/0957-4484/21/8/085201	journal	January 2010
Effects of low-energy electron irradiation on formation of nitrogen–vacancy centers in single-crystal diamond Schwartz, J.; Aloni, S.; Ogletree, D. F. New Journal of Physics, Vol. 14, Issue 4 https://doi.org/10.1088/1367-2630/14/4/043024	journal	April 2012
Controlled shallow single-ion implantation in silicon using an active substrate for sub-20‐keV ions Jamieson, D. N.; Yang, C.; Hopf, T. Applied Physics Letters, Vol. 86, Issue 20 https://doi.org/10.1063/1.1925320	journal	May 2005
Creation and nature of optical centres in diamond for single-photon emission—overview and critical remarks Pezzagna, Sébastien; Rogalla, Detlef; Wildanger, Dominik New Journal of Physics, Vol. 13, Issue 3 https://doi.org/10.1088/1367-2630/13/3/035024	journal	March 2011
Nitrogen-Vacancy Centers in Diamond: Nanoscale Sensors for Physics and Biology Schirhagl, Romana; Chang, Kevin; Loretz, Michael Annual Review of Physical Chemistry, Vol. 65, Issue 1 https://doi.org/10.1146/annurev-physchem-040513-103659	journal	April 2014
A 3-dimensional interdigitated electrode geometry for the enhancement of charge collection efficiency in diamond detectors Forneris, J.; Lo Giudice, A.; Olivero, P. EPL (Europhysics Letters), Vol. 108, Issue 1 https://doi.org/10.1209/0295-5075/108/18001	journal	September 2014
A review of ion beam induced charge microscopy Breese, M. B. H.; Vittone, E.; Vizkelethy, G. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Vol. 264, Issue 2 https://doi.org/10.1016/j.nimb.2007.09.031	journal	November 2007
Focused ion beam fabrication and IBIC characterization of a diamond detector with buried electrodes Olivero, P.; Forneris, J.; Jakšić, M. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Vol. 269, Issue 20 https://doi.org/10.1016/j.nimb.2011.02.021	journal	October 2011
Effect of dislocations on charge carrier mobility–lifetime product in synthetic single crystal diamond Lohstroh, A.; Sellin, P. J.; Wang, S. G. Applied Physics Letters, Vol. 90, Issue 10 https://doi.org/10.1063/1.2711754	journal	March 2007
Statistical investigations on nitrogen-vacancy center creation Antonov, D.; Häußermann, T.; Aird, A. Applied Physics Letters, Vol. 104, Issue 1 https://doi.org/10.1063/1.4860997	journal	January 2014
Single Defect Centers in Diamond Jelezko, Fedor; Wrachtrup, Jörg Physics and Applications of CVD Diamond https://doi.org/10.1002/9783527623174.ch10	book	August 2008
Semiconductor characterization by scanning ion beam induced charge (IBIC) microscopy Vittone, E.; Pastuovic, Z.; Olivero, P. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Vol. 266, Issue 8 https://doi.org/10.1016/j.nimb.2007.12.083	journal	April 2008
Narrow-Linewidth Homogeneous Optical Emitters in Diamond Nanostructures via Silicon Ion Implantation Evans, Ruffin E.; Sipahigil, Alp; Sukachev, Denis D. Physical Review Applied, Vol. 5, Issue 4 https://doi.org/10.1103/PhysRevApplied.5.044010	journal	April 2016
Coherent Optical Transitions in Implanted Nitrogen Vacancy Centers Chu, Y.; de Leon, N. P.; Shields, B. J. Nano Letters, Vol. 14, Issue 4 https://doi.org/10.1021/nl404836p	journal	March 2014
Diamond-based alpha particle detectors with coplanar geometry Wang, S. G.; Zhang, Qing; Wang, Q. Diamond and Related Materials, Vol. 12, Issue 3-7 https://doi.org/10.1016/S0925-9635(03)00043-8	journal	March 2003
Vibronic spectra of impurity-related optical centers in diamond Zaitsev, A. M. Physical Review B, Vol. 61, Issue 19 https://doi.org/10.1103/PhysRevB.61.12909	journal	May 2000
Creation efficiency of nitrogen-vacancy centres in diamond Pezzagna, S.; Naydenov, B.; Jelezko, F. New Journal of Physics, Vol. 12, Issue 6 https://doi.org/10.1088/1367-2630/12/6/065017	journal	June 2010
Radiation-assisted Frenkel-Poole transport in single-crystal diamond Girolami, M.; Bellucci, A.; Calvani, P. Applied Physics Letters, Vol. 103, Issue 8 https://doi.org/10.1063/1.4818904	journal	August 2013
Diamond as an electronic material Wort, Chris J. H.; Balmer, Richard S. Materials Today, Vol. 11, Issue 1-2 https://doi.org/10.1016/S1369-7021(07)70349-8	journal	January 2008
Array of bright silicon-vacancy centers in diamond fabricated by low-energy focused ion beam implantation Tamura, Syuto; Koike, Godai; Komatsubara, Akira Applied Physics Express, Vol. 7, Issue 11 https://doi.org/10.7567/APEX.7.115201	journal	October 2014

Cited By (6)

Quantum Micro–Nano Devices Fabricated in Diamond by Femtosecond Laser and Ion Irradiation Eaton, Shane M.; Hadden, John P.; Bharadwaj, Vibhav Advanced Quantum Technologies, Vol. 2, Issue 5-6 https://doi.org/10.1002/qute.201900006	journal	April 2019
Scalable focused ion beam creation of nearly lifetime-limited single quantum emitters in diamond nanostructures Schröder, Tim; Trusheim, Matthew E.; Walsh, Michael Nature Communications, Vol. 8, Issue 1 https://doi.org/10.1038/ncomms15376	journal	May 2017
Mapping the Local Spatial Charge in Defective Diamond by Means of N- V Sensors—A Self-Diagnostic Concept Forneris, J.; Ditalia Tchernij, S.; Traina, P. Physical Review Applied, Vol. 10, Issue 1 https://doi.org/10.1103/physrevapplied.10.014024	journal	July 2018
Quantum nanophotonics with group IV defects in diamond Bradac, Carlo; Gao, Weibo; Forneris, Jacopo Nature Communications, Vol. 10, Issue 1 https://doi.org/10.1038/s41467-019-13332-w	journal	December 2019
Scalable Focused Ion Beam Creation of Nearly Lifetime-Limited Single Quantum Emitters in Diamond Nanostructures Schröder, Tim; Trusheim, Matthew E.; Walsh, Michael arXiv https://doi.org/10.48550/arxiv.1610.09492	text	January 2016
Quantum Nanophotonics with Group IV defects in Diamond Bradac, Carlo; Gao, Weibo; Forneris, Jacopo arXiv https://doi.org/10.48550/arxiv.1906.10992	text	January 2019

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