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Title: Orientation epitaxy of Ge1–xSnx films grown on single crystal CaF2 substrates

Ge1–xSnx films were grown via physical vapor deposition below the crystallization temperature of Ge on single crystal (111) and (100) CaF2 substrates to assess the role of Sn alloying in Ge crystallization. By studying samples grown at several growth temperatures ranging from 250 °C to 400 °C we report temperature-dependent trends in several of the films' properties. X-ray diffraction theta vs. two-theta (θ/2θ) scans indicate single orientation Ge1–xSnx(111) films are grown on CaF2(111) substrates at each temperature, while a temperature-dependent superposition of (111) and (100) orientations are exhibited in films grown on CaF2(100) above 250 °C. This is the first report of (111) oriented Ge1–xSnx grown on a (100) oriented CaF2 substrate, which is successfully predicted by a superlattice area matching model. These results are confirmed by X-ray diffraction pole figure analysis. θ/2θ results indicate substitutional Sn alloying in each film of about 5%, corroborated by energy dispersive spectroscopy. In addition, morphological and electrical properties are measured by scanning electron microscopy, atomic force microscopy and Hall mobility measurements and are also shown to be dependent upon growth temperature.
;  [1] ;  [2] ;  [1] ;  [2]
  1. Brookhaven National Lab. (BNL), Upton, NY (United States)
  2. Rensselaer Polytechnic Inst., Troy, NY (United States)
Publication Date:
Report Number(s):
Journal ID: ISSN 1466-8033; CRECF4; R&D Project: 16060; KC0403020
Grant/Contract Number:
Accepted Manuscript
Journal Name:
Additional Journal Information:
Journal Volume: 18; Journal Issue: 15; Journal ID: ISSN 1466-8033
Royal Society of Chemistry
Research Org:
Brookhaven National Lab. (BNL), Upton, NY (United States). Center for Functional Nanomaterials (CFN)
Sponsoring Org:
USDOE Office of Science (SC), Basic Energy Sciences (BES) (SC-22)
Country of Publication:
United States
36 MATERIALS SCIENCE; Ge1-xSnx films; orientation epitaxy; X-ray diffraction; TEM and EDS; Center for Functional Nanomaterials
OSTI Identifier: