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Title: Simulation-Guided 3D Nanomanufacturing via Focused Electron Beam Induced Deposition

Abstract

Focused electron beam induced deposition (FEBID) is one of the few techniques that enables direct-write synthesis of free-standing 3D nanostructures. While the fabrication of simple architectures such as vertical or curving nanowires has been achieved by simple trial and error, processing complex 3D structures is not tractable with this approach. This is due, inpart, to the dynamic interplay between electron–solid interactions and the transient spatial distribution of absorbed precursor molecules on the solid surface. Here, we demonstrate the ability to controllably deposit 3D lattice structures at the micro/nanoscale, which have received recent interest owing to superior mechanical and optical properties. Moreover, a hybrid Monte Carlo–continuum simulation is briefly overviewed, and subsequently FEBID experiments and simulations are directly compared. Finally, a 3D computer-aided design (CAD) program is introduced, which generates the beam parameters necessary for FEBID by both simulation and experiment. In using this approach, we demonstrate the fabrication of various 3D lattice structures using Pt-, Au-, and W-based precursors.

Authors:
 [1];  [2];  [3];  [3];  [4];  [1]
  1. Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States); Univ. of Tennessee, Knoxville, TN (United States)
  2. Graz Center for Electron Microscopy (Austria)
  3. Univ. of Tennessee, Knoxville, TN (United States)
  4. Graz Center for Electron Microscopy (Austria); Graz Univ. of Technology (Austria)
Publication Date:
Research Org.:
Oak Ridge National Laboratory (ORNL), Oak Ridge, TN (United States). Center for Nanophase Materials Sciences (CNMS)
Sponsoring Org.:
USDOE Office of Science (SC)
OSTI Identifier:
1279399
Grant/Contract Number:  
AC05-00OR22725
Resource Type:
Accepted Manuscript
Journal Name:
ACS Nano
Additional Journal Information:
Journal Volume: 10; Journal Issue: 6; Journal ID: ISSN 1936-0851
Publisher:
American Chemical Society (ACS)
Country of Publication:
United States
Language:
English
Subject:
77 NANOSCIENCE AND NANOTECHNOLOGY; 3D nanoprinting; direct-write; focused electron beam induced deposition; nanofabrication

Citation Formats

Fowlkes, Jason D., Winkler, Robert, Lewis, Brett B., Stanford, Michael G., Plank, Harald, and Rack, Philip D. Simulation-Guided 3D Nanomanufacturing via Focused Electron Beam Induced Deposition. United States: N. p., 2016. Web. doi:10.1021/acsnano.6b02108.
Fowlkes, Jason D., Winkler, Robert, Lewis, Brett B., Stanford, Michael G., Plank, Harald, & Rack, Philip D. Simulation-Guided 3D Nanomanufacturing via Focused Electron Beam Induced Deposition. United States. doi:10.1021/acsnano.6b02108.
Fowlkes, Jason D., Winkler, Robert, Lewis, Brett B., Stanford, Michael G., Plank, Harald, and Rack, Philip D. Fri . "Simulation-Guided 3D Nanomanufacturing via Focused Electron Beam Induced Deposition". United States. doi:10.1021/acsnano.6b02108. https://www.osti.gov/servlets/purl/1279399.
@article{osti_1279399,
title = {Simulation-Guided 3D Nanomanufacturing via Focused Electron Beam Induced Deposition},
author = {Fowlkes, Jason D. and Winkler, Robert and Lewis, Brett B. and Stanford, Michael G. and Plank, Harald and Rack, Philip D.},
abstractNote = {Focused electron beam induced deposition (FEBID) is one of the few techniques that enables direct-write synthesis of free-standing 3D nanostructures. While the fabrication of simple architectures such as vertical or curving nanowires has been achieved by simple trial and error, processing complex 3D structures is not tractable with this approach. This is due, inpart, to the dynamic interplay between electron–solid interactions and the transient spatial distribution of absorbed precursor molecules on the solid surface. Here, we demonstrate the ability to controllably deposit 3D lattice structures at the micro/nanoscale, which have received recent interest owing to superior mechanical and optical properties. Moreover, a hybrid Monte Carlo–continuum simulation is briefly overviewed, and subsequently FEBID experiments and simulations are directly compared. Finally, a 3D computer-aided design (CAD) program is introduced, which generates the beam parameters necessary for FEBID by both simulation and experiment. In using this approach, we demonstrate the fabrication of various 3D lattice structures using Pt-, Au-, and W-based precursors.},
doi = {10.1021/acsnano.6b02108},
journal = {ACS Nano},
number = 6,
volume = 10,
place = {United States},
year = {2016},
month = {6}
}

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Cited by: 22 works
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Works referencing / citing this record:

Ultrafast magnetization dynamics in a nanoscale three-dimensional cobalt tetrapod structure
journal, January 2018

  • Sahoo, Sourav; Mondal, Sucheta; Williams, Gwilym
  • Nanoscale, Vol. 10, Issue 21
  • DOI: 10.1039/c7nr07843a

Fabrication of Scaffold-Based 3D Magnetic Nanowires for Domain Wall Applications
journal, June 2018

  • Sanz-Hernández, Dédalo; Hamans, Ruben; Osterrieth, Johannes
  • Nanomaterials, Vol. 8, Issue 7
  • DOI: 10.3390/nano8070483

Magnetic properties of optimized cobalt nanospheres grown by focused electron beam induced deposition (FEBID) on cantilever tips
journal, January 2017

  • Sangiao, Soraya; Magén, César; Mofakhami, Darius
  • Beilstein Journal of Nanotechnology, Vol. 8
  • DOI: 10.3762/bjnano.8.210

Direct writing of gold nanostructures with an electron beam: On the way to pure nanostructures by combining optimized deposition with oxygen-plasma treatment
journal, January 2017

  • Belić, Domagoj; Shawrav, Mostafa M.; Bertagnolli, Emmerich
  • Beilstein Journal of Nanotechnology, Vol. 8
  • DOI: 10.3762/bjnano.8.253

Pattern generation for direct-write three-dimensional nanoscale structures via focused electron beam induced deposition
journal, January 2018

  • Keller, Lukas; Huth, Michael
  • Beilstein Journal of Nanotechnology, Vol. 9
  • DOI: 10.3762/bjnano.9.240

Ultrafast magnetization dynamics in a nanoscale three-dimensional cobalt tetrapod structure
journal, January 2018

  • Sahoo, Sourav; Mondal, Sucheta; Williams, Gwilym
  • Nanoscale, Vol. 10, Issue 21
  • DOI: 10.1039/c7nr07843a

Fabrication of Scaffold-Based 3D Magnetic Nanowires for Domain Wall Applications
journal, June 2018

  • Sanz-Hernández, Dédalo; Hamans, Ruben; Osterrieth, Johannes
  • Nanomaterials, Vol. 8, Issue 7
  • DOI: 10.3390/nano8070483

Magnetic properties of optimized cobalt nanospheres grown by focused electron beam induced deposition (FEBID) on cantilever tips
journal, January 2017

  • Sangiao, Soraya; Magén, César; Mofakhami, Darius
  • Beilstein Journal of Nanotechnology, Vol. 8
  • DOI: 10.3762/bjnano.8.210

Direct writing of gold nanostructures with an electron beam: On the way to pure nanostructures by combining optimized deposition with oxygen-plasma treatment
journal, January 2017

  • Belić, Domagoj; Shawrav, Mostafa M.; Bertagnolli, Emmerich
  • Beilstein Journal of Nanotechnology, Vol. 8
  • DOI: 10.3762/bjnano.8.253

Pattern generation for direct-write three-dimensional nanoscale structures via focused electron beam induced deposition
journal, January 2018

  • Keller, Lukas; Huth, Michael
  • Beilstein Journal of Nanotechnology, Vol. 9
  • DOI: 10.3762/bjnano.9.240