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Title: Optical constants of SrF2 thin films in the 25-780-eV spectral range

Abstract

The transmittance and the optical constants of SrF2 thin films, a candidate material for multilayer coatings operating in the extreme ultraviolet and soft x-rays, have been determined in the spectral range of 25–780 eV, in most of which no experimental data were previously available. SrF2 films of various thicknesses were deposited by evaporation onto room-temperature, thin Al support films, and their transmittance was measured with synchrotron radiation. The transmittance as a function of film thickness was used to calculate the extinction coefficient k at each photon energy. A decrease in density with increasing SrF2 film thickness was observed. In the calculation of k, this effect was circumvented by fitting the transmittance versus the product of thickness and density. The real part of the refractive index of SrF2 films was calculated from k with Kramers-Krönig analysis, for which the measured spectral range was extended both to lower and to higher photon energies with data in the literature combined with interpolations and extrapolations. In conclusion, with the application of f- and inertial sum rules, the consistency of the compiled data was found to be excellent.

Authors:
 [1];  [1];  [1];  [2];  [2];  [1];  [2];  [3]
  1. GOLD-Instituto de Optica-Consejo Superior de Investigaciones Cientificas, Madrid (Spain)
  2. Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
  3. Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
Publication Date:
Research Org.:
Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1266685
Report Number(s):
LLNL-JRNL-643835
Journal ID: ISSN 0021-8979
Grant/Contract Number:  
AC52-07NA27344
Resource Type:
Accepted Manuscript
Journal Name:
Journal of Applied Physics
Additional Journal Information:
Journal Volume: 113; Journal Issue: 14; Journal ID: ISSN 0021-8979
Publisher:
American Institute of Physics (AIP)
Country of Publication:
United States
Language:
English
Subject:
74 ATOMIC AND MOLECULAR PHYSICS; 36 MATERIALS SCIENCE; thin films; photons; optical constants; extreme ultraviolet radiation; refractive index

Citation Formats

Rodriguez-de Marcos, Luis, Larraguert, Juan I., Aznarez, Jose A., Fernandez-Perea, Monica, Soufli, Regina, Mendez, Jose A., Baker, Sherry L., and Gullikson, Eric M. Optical constants of SrF2 thin films in the 25-780-eV spectral range. United States: N. p., 2013. Web. doi:10.1063/1.4800099.
Rodriguez-de Marcos, Luis, Larraguert, Juan I., Aznarez, Jose A., Fernandez-Perea, Monica, Soufli, Regina, Mendez, Jose A., Baker, Sherry L., & Gullikson, Eric M. Optical constants of SrF2 thin films in the 25-780-eV spectral range. United States. doi:10.1063/1.4800099.
Rodriguez-de Marcos, Luis, Larraguert, Juan I., Aznarez, Jose A., Fernandez-Perea, Monica, Soufli, Regina, Mendez, Jose A., Baker, Sherry L., and Gullikson, Eric M. Mon . "Optical constants of SrF2 thin films in the 25-780-eV spectral range". United States. doi:10.1063/1.4800099. https://www.osti.gov/servlets/purl/1266685.
@article{osti_1266685,
title = {Optical constants of SrF2 thin films in the 25-780-eV spectral range},
author = {Rodriguez-de Marcos, Luis and Larraguert, Juan I. and Aznarez, Jose A. and Fernandez-Perea, Monica and Soufli, Regina and Mendez, Jose A. and Baker, Sherry L. and Gullikson, Eric M.},
abstractNote = {The transmittance and the optical constants of SrF2 thin films, a candidate material for multilayer coatings operating in the extreme ultraviolet and soft x-rays, have been determined in the spectral range of 25–780 eV, in most of which no experimental data were previously available. SrF2 films of various thicknesses were deposited by evaporation onto room-temperature, thin Al support films, and their transmittance was measured with synchrotron radiation. The transmittance as a function of film thickness was used to calculate the extinction coefficient k at each photon energy. A decrease in density with increasing SrF2 film thickness was observed. In the calculation of k, this effect was circumvented by fitting the transmittance versus the product of thickness and density. The real part of the refractive index of SrF2 films was calculated from k with Kramers-Krönig analysis, for which the measured spectral range was extended both to lower and to higher photon energies with data in the literature combined with interpolations and extrapolations. In conclusion, with the application of f- and inertial sum rules, the consistency of the compiled data was found to be excellent.},
doi = {10.1063/1.4800099},
journal = {Journal of Applied Physics},
number = 14,
volume = 113,
place = {United States},
year = {2013},
month = {4}
}

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Works referenced in this record:

Spectra of Electronic Excitations in CaF2, SrF2, and BaF2 in the 8 to 150 eV Range
journal, October 1972


Structure of thin fluoride films deposited on amorphous substrates
journal, September 1992


Vacuum Deposition of Dielectric and Semiconductor Films by a CO_2 Laser
journal, January 1969


Vacuum ultraviolet loss in magnesium fluoride films
journal, January 1984

  • Wood, Obert R.; Craighead, Harold G.; Sweeney, Jane E.
  • Applied Optics, Vol. 23, Issue 20
  • DOI: 10.1364/AO.23.003644

High-resolution, high-flux, user friendly VLS beamline at the ALS for the 50–1300eV energy region
journal, May 1998

  • Underwood, J. H.; Gullikson, E. M.
  • Journal of Electron Spectroscopy and Related Phenomena, Vol. 92, Issue 1-3
  • DOI: 10.1016/S0368-2048(98)00134-0

Recent developments in EUV reflectometry at the Advanced Light Source
conference, August 2001

  • Gullikson, Eric M.; Mrowka, Stanley; Kaufmann, Benjamin B.
  • 26th Annual International Symposium on Microlithography, SPIE Proceedings
  • DOI: 10.1117/12.436712

Transmittance and optical constants of Sr films in the 6–1220 eV spectral range
journal, June 2012

  • Rodríguez-de Marcos, Luis; Larruquert, Juan I.; Aznárez, José A.
  • Journal of Applied Physics, Vol. 111, Issue 11
  • DOI: 10.1063/1.4729487

IMD—Software for modeling the optical properties of multilayer films
journal, January 1998


X-Ray Interactions: Photoabsorption, Scattering, Transmission, and Reflection at E = 50-30,000 eV, Z = 1-92
journal, July 1993

  • Henke, B. L.; Gullikson, E. M.; Davis, J. C.
  • Atomic Data and Nuclear Data Tables, Vol. 54, Issue 2, p. 181-342
  • DOI: 10.1006/adnd.1993.1013

Generation and application of a high-average-power polarized soft-x-ray laser beam
journal, January 2001

  • Benware, B. R.; Seminario, M.; Lecher, A. L.
  • Journal of the Optical Society of America B, Vol. 18, Issue 7
  • DOI: 10.1364/JOSAB.18.001041

Optical Studies of Alkali Fluorides and Alkaline Earth Fluorides in VUV Region
journal, September 1969

  • Tomiki, Tetsuhiko; Miyata, Takeo
  • Journal of the Physical Society of Japan, Vol. 27, Issue 3
  • DOI: 10.1143/JPSJ.27.658

Photoacoustic measurements of surface and bulk absorption in HF/DF laser window materials
journal, January 1977


Ultraviolet–visible absorption in highly transparent solids by laser calorimetry and wavelength modulation spectroscopy
journal, January 1978

  • Harrington, James A.; Bobbs, Bradley L.; Braunstein, Morris
  • Applied Optics, Vol. 17, Issue 10
  • DOI: 10.1364/AO.17.001541

Infrared reflectance spectroscopy for surface topographic analysis of reststrahlen materials
conference, November 1994

  • Andersson, Stefan K.; Ribbing, Carl-Gustaf
  • 1994 International Symposium on Optical Interference Coatings, SPIE Proceedings
  • DOI: 10.1117/12.192048

Options for reststrahlen materials in optical surfaces and f ilters [光学表面与滤光片的剩余射线材料选择]
journal, January 2010


Infrared Properties of Ca F 2 , Sr F 2 , and Ba F 2
journal, September 1962


Far-Infrared Optical Properties of Ca F 2 , Sr F 2 , Ba F 2 , and Cd F 2
journal, May 1967


Theoretical Form Factor, Attenuation, and Scattering Tabulation for Z =1–92 from E =1–10 eV to E =0.4–1.0 MeV
journal, January 1995

  • Chantler, C. T.
  • Journal of Physical and Chemical Reference Data, Vol. 24, Issue 1
  • DOI: 10.1063/1.555974

Self-consistency and sum-rule tests in the Kramers-Kronig analysis of optical data: Applications to aluminum
journal, August 1980


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    Y 2 O 3 optical constants between 5 nm and 50 nm
    journal, January 2019

    • Muhlestein, Joseph B.; Smith, Benjamin D.; Miles, Margaret
    • Optics Express, Vol. 27, Issue 3
    • DOI: 10.1364/oe.27.003324

    Y 2 O 3 optical constants between 5 nm and 50 nm
    journal, January 2019

    • Muhlestein, Joseph B.; Smith, Benjamin D.; Miles, Margaret
    • Optics Express, Vol. 27, Issue 3
    • DOI: 10.1364/oe.27.003324