skip to main content
DOE PAGES title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Spontaneously intermixed Al-Mg barriers enable corrosion-resistant Mg/SiC multilayer coatings

Abstract

Magnesium/silicon carbide (Mg/SiC) has the potential to be the best-performing reflective multilayercoating in the 25–80 nm wavelength region but suffers from Mg-related corrosion, an insidious problem which completely degrades reflectance. We have elucidated the origins and mechanisms of corrosion propagation within Mg/SiC multilayers. Based on our findings, we have demonstrated an efficient and simple-to-implement corrosion barrier for Mg/SiC multilayers. In conclusion, the barrier consists of nanometer-scale Mg and Al layers that intermix spontaneously to form a partially amorphous Al-Mg layer and is shown to prevent atmospheric corrosion while maintaining the unique combination of favorable Mg/SiC reflective properties.

Authors:
 [1];  [2];  [1];  [1];  [1];  [1]
  1. Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
  2. Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States); Consejo Superior de Investigaciones Cientificas, Madrid (Spain)
Publication Date:
Research Org.:
Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1266666
Report Number(s):
LLNL-JRNL-561992
Journal ID: ISSN 0003-6951
Grant/Contract Number:  
AC52-07NA27344
Resource Type:
Accepted Manuscript
Journal Name:
Applied Physics Letters
Additional Journal Information:
Journal Volume: 101; Journal Issue: 4; Journal ID: ISSN 0003-6951
Publisher:
American Institute of Physics (AIP)
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; 71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; magnesium; corrosion; multilayers; carbides; silicon

Citation Formats

Soufli, Regina, Fernandez-Perea, Monica, Baker, Sherry L., Robinson, Jeff C., Alameda, Jennifer, and Walton, Christopher C. Spontaneously intermixed Al-Mg barriers enable corrosion-resistant Mg/SiC multilayer coatings. United States: N. p., 2012. Web. doi:10.1063/1.4737649.
Soufli, Regina, Fernandez-Perea, Monica, Baker, Sherry L., Robinson, Jeff C., Alameda, Jennifer, & Walton, Christopher C. Spontaneously intermixed Al-Mg barriers enable corrosion-resistant Mg/SiC multilayer coatings. United States. doi:10.1063/1.4737649.
Soufli, Regina, Fernandez-Perea, Monica, Baker, Sherry L., Robinson, Jeff C., Alameda, Jennifer, and Walton, Christopher C. Tue . "Spontaneously intermixed Al-Mg barriers enable corrosion-resistant Mg/SiC multilayer coatings". United States. doi:10.1063/1.4737649. https://www.osti.gov/servlets/purl/1266666.
@article{osti_1266666,
title = {Spontaneously intermixed Al-Mg barriers enable corrosion-resistant Mg/SiC multilayer coatings},
author = {Soufli, Regina and Fernandez-Perea, Monica and Baker, Sherry L. and Robinson, Jeff C. and Alameda, Jennifer and Walton, Christopher C.},
abstractNote = {Magnesium/silicon carbide (Mg/SiC) has the potential to be the best-performing reflective multilayercoating in the 25–80 nm wavelength region but suffers from Mg-related corrosion, an insidious problem which completely degrades reflectance. We have elucidated the origins and mechanisms of corrosion propagation within Mg/SiC multilayers. Based on our findings, we have demonstrated an efficient and simple-to-implement corrosion barrier for Mg/SiC multilayers. In conclusion, the barrier consists of nanometer-scale Mg and Al layers that intermix spontaneously to form a partially amorphous Al-Mg layer and is shown to prevent atmospheric corrosion while maintaining the unique combination of favorable Mg/SiC reflective properties.},
doi = {10.1063/1.4737649},
journal = {Applied Physics Letters},
number = 4,
volume = 101,
place = {United States},
year = {2012},
month = {7}
}

Journal Article:
Free Publicly Available Full Text
Publisher's Version of Record

Citation Metrics:
Cited by: 12 works
Citation information provided by
Web of Science

Save / Share:

Works referenced in this record:

Soft-X-ray reflectivity and heat resistance of SiC/Mg multilayer
journal, June 2005

  • Takenaka, Hisataka; Ichimaru, Satoshi; Ohchi, Tadayuki
  • Journal of Electron Spectroscopy and Related Phenomena, Vol. 144-147
  • DOI: 10.1016/j.elspec.2005.01.227

Tri-material multilayer coatings with high reflectivity and wide bandwidth for 25 to 50 nm extreme ultraviolet light
journal, January 2009


The Origins of Hot Plasma in the Solar Corona
journal, January 2011


Measuring and controlling the birth of attosecond XUV pulses
journal, October 2006

  • Dudovich, N.; Smirnova, O.; Levesque, J.
  • Nature Physics, Vol. 2, Issue 11
  • DOI: 10.1038/nphys434

Generation of Spatially Coherent Light at Extreme Ultraviolet Wavelengths
journal, July 2002


Demonstration of a High Average Power Tabletop Soft X-Ray Laser
journal, December 1998


Single-shot extreme ultraviolet laser imaging of nanostructures with wavelength resolution
journal, January 2008

  • Brewer, Courtney A.; Brizuela, Fernando; Wachulak, Przemyslaw
  • Optics Letters, Vol. 33, Issue 5
  • DOI: 10.1364/OL.33.000518

Development and testing of EUV multilayer coatings for the atmospheric imaging assembly instrument aboard the Solar Dynamics Observatory
conference, August 2005

  • Soufli, Regina; Windt, David L.; Robinson, Jeff C.
  • Optics & Photonics 2005, SPIE Proceedings
  • DOI: 10.1117/12.617370

Initial Calibration of the Atmospheric Imaging Assembly (AIA) on the Solar Dynamics Observatory (SDO)
journal, July 2011


Long-term stability of Mg/SiC multilayers
journal, February 2012


Protective coatings on magnesium and its alloys — a critical review
journal, April 2002


Sub-diffraction-limited multilayer coatings for the 03 numerical aperture micro-exposure tool for extreme ultraviolet lithography
journal, January 2007

  • Soufli, Regina; Hudyma, Russell M.; Spiller, Eberhard
  • Applied Optics, Vol. 46, Issue 18
  • DOI: 10.1364/AO.46.003736

High-resolution, high-flux, user friendly VLS beamline at the ALS for the 50–1300eV energy region
journal, May 1998

  • Underwood, J. H.; Gullikson, E. M.
  • Journal of Electron Spectroscopy and Related Phenomena, Vol. 92, Issue 1-3
  • DOI: 10.1016/S0368-2048(98)00134-0

An XPS investigation of the oxidation/corrosion of melt-spun Mg
journal, May 2000


Morphology and Structure of Oxide Films Formed on Magnesium by Exposure to Air and Water
journal, October 1995

  • Nordlien, Jan Halvor; Ono, Sachiko; Masuko, Noburo
  • Journal of The Electrochemical Society, Vol. 142, Issue 10
  • DOI: 10.1149/1.2049981

MINCRYST: A crystallographic database for minerals, local and network (WWW) versions
journal, September 2001

  • Chichagov, A. V.; Varlamov, D. A.; Dilanyan, R. A.
  • Crystallography Reports, Vol. 46, Issue 5
  • DOI: 10.1134/1.1405882

Formation of an Amorphous Alloy by Solid-State Reaction of the Pure Polycrystalline Metals
journal, August 1983


IMD—Software for modeling the optical properties of multilayer films
journal, January 1998


Optical constants of magnetron-sputtered magnesium films in the 25–1300 eV energy range
journal, September 2010

  • Vidal-Dasilva, Manuela; Aquila, Andrew L.; Gullikson, Eric M.
  • Journal of Applied Physics, Vol. 108, Issue 6
  • DOI: 10.1063/1.3481457

Amorphous silicon carbide coatings for extreme ultraviolet optics
journal, January 1988


Self-consistency and sum-rule tests in the Kramers-Kronig analysis of optical data: Applications to aluminum
journal, August 1980