Fundamental edge broadening effects during focused electron beam induced nanosynthesis
Abstract
In this study, we explore lateral broadening effects of 3D structures fabricated through focused electron beam induced deposition using MeCpPt(IV)Me3 precursor. In particular, the scaling behavior of proximity effects as a function of the primary electron energy and the deposit height is investigated through experiments and validated through simulations. Correlated Kelvin force microscopy and conductive atomic force microscopy measurements identified conductive and non-conductive proximity regions. It was determined that the highest primary electron energies enable the highest edge sharpness while lower energies contain a complex convolution of broadening effects. In addition, it is demonstrated that intermediate energies lead to even more complex proximity effects that significantly reduce lateral edge sharpness and thus should be avoided if desiring high lateral resolution.
- Authors:
-
- Graz Center for Electron Microscopy, Graz (Austria)
- Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States). Center for Nanophase Materials Science (CNMS); Univ. of Tennessee, Knoxville, TN (United States)
- Graz Center for Electron Microscopy, Graz (Austria) ; Graz Univ. of Technology (Austria)
- Publication Date:
- Research Org.:
- Oak Ridge National Laboratory (ORNL), Oak Ridge, TN (United States). Center for Nanophase Materials Sciences (CNMS)
- Sponsoring Org.:
- USDOE Office of Science (SC)
- OSTI Identifier:
- 1265378
- Grant/Contract Number:
- AC05-00OR22725
- Resource Type:
- Accepted Manuscript
- Journal Name:
- Beilstein Journal of Nanotechnology
- Additional Journal Information:
- Journal Volume: 6; Journal ID: ISSN 2190-4286
- Publisher:
- Beilstein Institute
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE; 77 NANOSCIENCE AND NANOTECHNOLOGY
Citation Formats
Schmied, Roland, Fowlkes, Jason Davidson, Winkler, Robert, Rack, Phillip D., and Plank, Harald. Fundamental edge broadening effects during focused electron beam induced nanosynthesis. United States: N. p., 2015.
Web. doi:10.3762/bjnano.6.47.
Schmied, Roland, Fowlkes, Jason Davidson, Winkler, Robert, Rack, Phillip D., & Plank, Harald. Fundamental edge broadening effects during focused electron beam induced nanosynthesis. United States. https://doi.org/10.3762/bjnano.6.47
Schmied, Roland, Fowlkes, Jason Davidson, Winkler, Robert, Rack, Phillip D., and Plank, Harald. Mon .
"Fundamental edge broadening effects during focused electron beam induced nanosynthesis". United States. https://doi.org/10.3762/bjnano.6.47. https://www.osti.gov/servlets/purl/1265378.
@article{osti_1265378,
title = {Fundamental edge broadening effects during focused electron beam induced nanosynthesis},
author = {Schmied, Roland and Fowlkes, Jason Davidson and Winkler, Robert and Rack, Phillip D. and Plank, Harald},
abstractNote = {In this study, we explore lateral broadening effects of 3D structures fabricated through focused electron beam induced deposition using MeCpPt(IV)Me3 precursor. In particular, the scaling behavior of proximity effects as a function of the primary electron energy and the deposit height is investigated through experiments and validated through simulations. Correlated Kelvin force microscopy and conductive atomic force microscopy measurements identified conductive and non-conductive proximity regions. It was determined that the highest primary electron energies enable the highest edge sharpness while lower energies contain a complex convolution of broadening effects. In addition, it is demonstrated that intermediate energies lead to even more complex proximity effects that significantly reduce lateral edge sharpness and thus should be avoided if desiring high lateral resolution.},
doi = {10.3762/bjnano.6.47},
journal = {Beilstein Journal of Nanotechnology},
number = ,
volume = 6,
place = {United States},
year = {Mon Feb 16 00:00:00 EST 2015},
month = {Mon Feb 16 00:00:00 EST 2015}
}
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