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This content will become publicly available on July 18, 2017

Title: Graphene processing using electron beam assisted metal deposition and masked chemical vapor deposition growth

Authors:
;
Publication Date:
OSTI Identifier:
1263710
Grant/Contract Number:
FG02-04ER46148
Type:
Publisher's Accepted Manuscript
Journal Name:
Journal of Vacuum Science and Technology. B, Nanotechnology and Microelectronics
Additional Journal Information:
Journal Volume: 34; Journal Issue: 4; Related Information: CHORUS Timestamp: 2016-12-27 20:17:16; Journal ID: ISSN 2166-2746
Publisher:
American Vacuum Society
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English