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Title: Nuclear reaction analysis for H, Li, Be, B, C, N, O and F with an RBS check

Abstract

In this paper, 15N nuclear reaction analysis (NRA) for H is combined with 1.2 MeV deuteron (D) NRA which provides a simultaneous analysis for Li, Be, B, C, N, O and F. The energy dependence of the D NRA has been measured and used to correct for the D energy loss in film being analyzed. A 2 MeV He RBS measurement is made. Film composition is determined by a self-consistent analysis of the light element NRA data combined with an RBS analysis for heavy elements. This composition is used to simulate, with no adjustable parameters, the complete RBS spectrum. Finally, comparison of this simulated RBS spectrum with the measured spectrum provides a powerful check of the analysis.

Authors:
 [1];  [1];  [2];  [2];  [2];  [3];  [3];  [3];  [4];  [4];  [4];  [5];  [5];  [6];  [6];  [7];  [7];  [7]
  1. Univ. at Albany, SUNY, NY (United States). Physics Dept.
  2. Univ. of Missouri-Kansas City, MO (United States). Dept. of Physics and Astronomy
  3. Univ. of Helsinki (Finland). Dept. of Chemistry
  4. Univ. of Oslo (Norway). Dept. of Chemistry
  5. Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States). Solid State Division
  6. Univ. of Texas, Austin, TX (United States). Dept. of Electrical and Computer Engineering
  7. Intel Corporation, Hillsboro, OR (United States). Logic Technology Development
Publication Date:
Research Org.:
Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1261264
Grant/Contract Number:  
AC05-00OR22725
Resource Type:
Accepted Manuscript
Journal Name:
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
Additional Journal Information:
Journal Volume: 371; Journal ID: ISSN 0168-583X
Publisher:
Elsevier
Country of Publication:
United States
Language:
English
Subject:
73 NUCLEAR PHYSICS AND RADIATION PHYSICS; 38 RADIATION CHEMISTRY, RADIOCHEMISTRY, AND NUCLEAR CHEMISTRY; NRA; Light elements; Electronic materials

Citation Formats

Lanford, W. A., Parenti, M., Nordell, B. J., Paquette, M. M., Caruso, A. N., Mäntymäki, M., Hämäläinen, J., Ritala, M., Klepper, K. B., Miikkulainen, V., Nilsen, O., Tenhaeff, Wyatt E., Dudney, Nancy J., Koh, D., Banerjee, S. K., Mays, E., Bielefeld, J., and King, S. W.. Nuclear reaction analysis for H, Li, Be, B, C, N, O and F with an RBS check. United States: N. p., 2015. Web. https://doi.org/10.1016/j.nimb.2015.10.052.
Lanford, W. A., Parenti, M., Nordell, B. J., Paquette, M. M., Caruso, A. N., Mäntymäki, M., Hämäläinen, J., Ritala, M., Klepper, K. B., Miikkulainen, V., Nilsen, O., Tenhaeff, Wyatt E., Dudney, Nancy J., Koh, D., Banerjee, S. K., Mays, E., Bielefeld, J., & King, S. W.. Nuclear reaction analysis for H, Li, Be, B, C, N, O and F with an RBS check. United States. https://doi.org/10.1016/j.nimb.2015.10.052
Lanford, W. A., Parenti, M., Nordell, B. J., Paquette, M. M., Caruso, A. N., Mäntymäki, M., Hämäläinen, J., Ritala, M., Klepper, K. B., Miikkulainen, V., Nilsen, O., Tenhaeff, Wyatt E., Dudney, Nancy J., Koh, D., Banerjee, S. K., Mays, E., Bielefeld, J., and King, S. W.. Thu . "Nuclear reaction analysis for H, Li, Be, B, C, N, O and F with an RBS check". United States. https://doi.org/10.1016/j.nimb.2015.10.052. https://www.osti.gov/servlets/purl/1261264.
@article{osti_1261264,
title = {Nuclear reaction analysis for H, Li, Be, B, C, N, O and F with an RBS check},
author = {Lanford, W. A. and Parenti, M. and Nordell, B. J. and Paquette, M. M. and Caruso, A. N. and Mäntymäki, M. and Hämäläinen, J. and Ritala, M. and Klepper, K. B. and Miikkulainen, V. and Nilsen, O. and Tenhaeff, Wyatt E. and Dudney, Nancy J. and Koh, D. and Banerjee, S. K. and Mays, E. and Bielefeld, J. and King, S. W.},
abstractNote = {In this paper, 15N nuclear reaction analysis (NRA) for H is combined with 1.2 MeV deuteron (D) NRA which provides a simultaneous analysis for Li, Be, B, C, N, O and F. The energy dependence of the D NRA has been measured and used to correct for the D energy loss in film being analyzed. A 2 MeV He RBS measurement is made. Film composition is determined by a self-consistent analysis of the light element NRA data combined with an RBS analysis for heavy elements. This composition is used to simulate, with no adjustable parameters, the complete RBS spectrum. Finally, comparison of this simulated RBS spectrum with the measured spectrum provides a powerful check of the analysis.},
doi = {10.1016/j.nimb.2015.10.052},
journal = {Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms},
number = ,
volume = 371,
place = {United States},
year = {2015},
month = {11}
}

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    Works referencing / citing this record:

    Thermal conductivity-structure-processing relationships for amorphous nano-porous organo-silicate thin films
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