skip to main content


Title: X-ray metrology and performance of a 45-cm long x-ray deformable mirror

We describe experiments with a 45-cm long x-ray deformable mirror (XDM) that have been conducted in End Station 2, Beamline 5.3.1 at the Advanced Light Source. A detailed description of the hardware implementation is provided. We explain our one-dimensional Fresnel propagation code that correctly handles grazing incidence and includes a model of the XDM. This code is used to simulate and verify experimental results. Initial long trace profiler metrology of the XDM at 7.5 keV is presented. The ability to measure a large (150-nm amplitude) height change on the XDM is demonstrated. The results agree well with the simulated experiment at an error level of 1 μrad RMS. Lastly, direct imaging of the x-ray beam also shows the expected change in intensity profile at the detector.
 [1] ; ORCiD logo [1] ;  [1] ;  [1] ;  [1] ;  [2] ; ORCiD logo [2]
  1. Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
  2. Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States). Advanced Light Source (ALS)
Publication Date:
Report Number(s):
Journal ID: ISSN 0034-6748; RSINAK
Grant/Contract Number:
AC52-07NA27344; AC02-05CH11231
Accepted Manuscript
Journal Name:
Review of Scientific Instruments
Additional Journal Information:
Journal Volume: 87; Journal Issue: 5; Journal ID: ISSN 0034-6748
American Institute of Physics (AIP)
Research Org:
Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States); Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
Sponsoring Org:
USDOE Office of Science (SC), Basic Energy Sciences (BES) (SC-22)
Country of Publication:
United States
71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; 46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY; deformable mirror; x-ray metrology; adaptive optics; mirrors; photons; metrology; x-ray detectors; charge coupled devices
OSTI Identifier:
Alternate Identifier(s):
OSTI ID: 1440927