skip to main content
DOE PAGES title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: X-ray metrology and performance of a 45-cm long x-ray deformable mirror

Abstract

We describe experiments with a 45-cm long x-ray deformable mirror (XDM) that have been conducted in End Station 2, Beamline 5.3.1 at the Advanced Light Source. A detailed description of the hardware implementation is provided. We explain our one-dimensional Fresnel propagation code that correctly handles grazing incidence and includes a model of the XDM. This code is used to simulate and verify experimental results. Initial long trace profiler metrology of the XDM at 7.5 keV is presented. The ability to measure a large (150-nm amplitude) height change on the XDM is demonstrated. The results agree well with the simulated experiment at an error level of 1 μrad RMS. Lastly, direct imaging of the x-ray beam also shows the expected change in intensity profile at the detector.

Authors:
 [1]; ORCiD logo [1];  [1];  [1];  [1];  [2]; ORCiD logo [2]
  1. Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
  2. Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States). Advanced Light Source (ALS)
Publication Date:
Research Org.:
Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States); Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
Sponsoring Org.:
USDOE Office of Science (SC), Basic Energy Sciences (BES) (SC-22)
OSTI Identifier:
1260489
Alternate Identifier(s):
OSTI ID: 1440927
Report Number(s):
LLNL-JRNL-678726
Journal ID: ISSN 0034-6748; RSINAK
Grant/Contract Number:  
AC52-07NA27344; AC02-05CH11231
Resource Type:
Accepted Manuscript
Journal Name:
Review of Scientific Instruments
Additional Journal Information:
Journal Volume: 87; Journal Issue: 5; Journal ID: ISSN 0034-6748
Publisher:
American Institute of Physics (AIP)
Country of Publication:
United States
Language:
English
Subject:
71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; 46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY; deformable mirror; x-ray metrology; adaptive optics; mirrors; photons; metrology; x-ray detectors; charge coupled devices

Citation Formats

Poyneer, Lisa A., Brejnholt, Nicolai F., Hill, Randall, Jackson, Jessie, Hagler, Lisle, Celestre, Richard, and Feng, Jun. X-ray metrology and performance of a 45-cm long x-ray deformable mirror. United States: N. p., 2016. Web. doi:10.1063/1.4950739.
Poyneer, Lisa A., Brejnholt, Nicolai F., Hill, Randall, Jackson, Jessie, Hagler, Lisle, Celestre, Richard, & Feng, Jun. X-ray metrology and performance of a 45-cm long x-ray deformable mirror. United States. doi:10.1063/1.4950739.
Poyneer, Lisa A., Brejnholt, Nicolai F., Hill, Randall, Jackson, Jessie, Hagler, Lisle, Celestre, Richard, and Feng, Jun. Fri . "X-ray metrology and performance of a 45-cm long x-ray deformable mirror". United States. doi:10.1063/1.4950739. https://www.osti.gov/servlets/purl/1260489.
@article{osti_1260489,
title = {X-ray metrology and performance of a 45-cm long x-ray deformable mirror},
author = {Poyneer, Lisa A. and Brejnholt, Nicolai F. and Hill, Randall and Jackson, Jessie and Hagler, Lisle and Celestre, Richard and Feng, Jun},
abstractNote = {We describe experiments with a 45-cm long x-ray deformable mirror (XDM) that have been conducted in End Station 2, Beamline 5.3.1 at the Advanced Light Source. A detailed description of the hardware implementation is provided. We explain our one-dimensional Fresnel propagation code that correctly handles grazing incidence and includes a model of the XDM. This code is used to simulate and verify experimental results. Initial long trace profiler metrology of the XDM at 7.5 keV is presented. The ability to measure a large (150-nm amplitude) height change on the XDM is demonstrated. The results agree well with the simulated experiment at an error level of 1 μrad RMS. Lastly, direct imaging of the x-ray beam also shows the expected change in intensity profile at the detector.},
doi = {10.1063/1.4950739},
journal = {Review of Scientific Instruments},
number = 5,
volume = 87,
place = {United States},
year = {2016},
month = {5}
}

Journal Article:
Free Publicly Available Full Text
Publisher's Version of Record

Citation Metrics:
Cited by: 1 work
Citation information provided by
Web of Science

Save / Share:

Works referenced in this record:

Predicting the coherent X-ray wavefront focal properties at the Linac Coherent Light Source (LCLS) X-ray free electron laser
journal, January 2009

  • Barty, Anton; Soufli, Regina; McCarville, Tom
  • Optics Express, Vol. 17, Issue 18
  • DOI: 10.1364/OE.17.015508

A novel adaptive bimorph focusing mirror and wavefront corrector with sub-nanometre dynamical figure control
conference, August 2010

  • Sawhney, Kawal J. S.; Alcock, Simon G.; Signorato, Riccardo
  • SPIE Optical Engineering + Applications, SPIE Proceedings
  • DOI: 10.1117/12.861593

Wavefront measurement for a hard-X-ray nanobeam using single-grating interferometry
journal, January 2012

  • Matsuyama, Satoshi; Yokoyama, Hikaru; Fukui, Ryosuke
  • Optics Express, Vol. 20, Issue 22
  • DOI: 10.1364/OE.20.024977

Experimental methods for optimal tuning of bendable mirrors for diffraction-limited soft x-ray focusing
journal, March 2013


Multi-segmented piezoelectric mirrors as active/adaptive optics components
journal, May 1998

  • Signorato, Riccardo; Hignette, Olivier; Goulon, José
  • Journal of Synchrotron Radiation, Vol. 5, Issue 3
  • DOI: 10.1107/S0909049597012843

Development of single grating x-ray Talbot interferometer as a feedback loop sensor element of an adaptive x-ray mirror system
conference, September 2014

  • Marathe, Shashidhara; Shi, Xianbo; Khounsary, Ali M.
  • SPIE Optical Engineering + Applications, SPIE Proceedings
  • DOI: 10.1117/12.2062460

Breaking the 10 nm barrier in hard-X-ray focusing
journal, November 2009

  • Mimura, Hidekazu; Handa, Soichiro; Kimura, Takashi
  • Nature Physics, Vol. 6, Issue 2
  • DOI: 10.1038/nphys1457

Surface profiling of X-ray mirrors for shaping focused beams
journal, January 2015

  • Laundy, David; Alianelli, Lucia; Sutter, John
  • Optics Express, Vol. 23, Issue 2
  • DOI: 10.1364/OE.23.001576

Exploring the wavefront of hard X-ray free-electron laser radiation
journal, January 2012

  • Rutishauser, Simon; Samoylova, Liubov; Krzywinski, Jacek
  • Nature Communications, Vol. 3, Issue 1
  • DOI: 10.1038/ncomms1950

Reconstruction of an astigmatic hard X-ray beam and alignment of K-B mirrors from ptychographic coherent diffraction data
journal, January 2010

  • Kewish, Cameron M.; Guizar-Sicairos, Manuel; Liu, Chian
  • Optics Express, Vol. 18, Issue 22
  • DOI: 10.1364/OE.18.023420

Wave-optical simulation of hard-x-ray nanofocusing by precisely figured elliptical mirrors
journal, January 2007

  • Kewish, Cameron M.; Assoufid, Lahsen; Macrander, Albert T.
  • Applied Optics, Vol. 46, Issue 11
  • DOI: 10.1364/AO.46.002010

Fast calculation method for optical diffraction on tilted planes by use of the angular spectrum of plane waves
journal, January 2003

  • Matsushima, Kyoji; Schimmel, Hagen; Wyrowski, Frank
  • Journal of the Optical Society of America A, Vol. 20, Issue 9
  • DOI: 10.1364/JOSAA.20.001755

An adaptive optical system for sub-10nm hard x-ray focusing
conference, August 2010

  • Mimura, H.; Kimura, T.; Yokoyama, H.
  • SPIE Optical Engineering + Applications, SPIE Proceedings
  • DOI: 10.1117/12.862291

Propagation of aberrations through phase-induced amplitude apodization coronagraph
journal, January 2011

  • Pueyo, Laurent; Kasdin, N. Jeremy; Shaklan, Stuart
  • Journal of the Optical Society of America A, Vol. 28, Issue 2
  • DOI: 10.1364/JOSAA.28.000189

Hartmann wavefront sensor and adaptive x-ray optics developments for synchrotron applications
conference, August 2010

  • Mercère, Pascal; Idir, Mourad; Dovillaire, Guillaume
  • SPIE Optical Engineering + Applications, SPIE Proceedings
  • DOI: 10.1117/12.860990

Cross-check of ex-situ and in-situ metrology of a bendable temperature stabilized KB mirror
journal, April 2011

  • Yuan, Sheng; Goldberg, Kenneth A.; Yashchuk, Valeriy V.
  • Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, Vol. 635, Issue 1
  • DOI: 10.1016/j.nima.2010.09.120

Characterization of a next-generation piezo bimorph X-ray mirror for synchrotron beamlines
journal, January 2015

  • Alcock, Simon G.; Nistea, Ioana; Sutter, John P.
  • Journal of Synchrotron Radiation, Vol. 22, Issue 1
  • DOI: 10.1107/S1600577514020025

Sub-nanometer flattening of 45  cm long, 45 actuator x-ray deformable mirror
journal, January 2014

  • Poyneer, Lisa A.; McCarville, Thomas; Pardini, Tommaso
  • Applied Optics, Vol. 53, Issue 16
  • DOI: 10.1364/AO.53.003404

Control of a 45-cm long x-ray deformable mirror with either external or internal metrology
conference, September 2014

  • Poyneer, Lisa A.; Pardini, Tommaso; McCarville, Thomas
  • SPIE Optical Engineering + Applications, SPIE Proceedings
  • DOI: 10.1117/12.2062072

Comparison of centroid computation algorithms in a Shack-Hartmann sensor: Comparison of centroid computation algorithms
journal, August 2006


Analysis of wavefront propagation using the Talbot effect
journal, January 2010


Simulating wavefront correction via deformable mirrors at x-ray beamlines
conference, October 2012

  • Pardini, Tommaso; Poyneer, Lisa A.; Plinta, Audrey
  • SPIE Optical Engineering + Applications, SPIE Proceedings
  • DOI: 10.1117/12.947739

An active optics system for EUV/soft x-ray beam shaping
conference, October 2012

  • Svetina, C.; Cocco, D.; Di Cicco, A.
  • SPIE Optical Engineering + Applications, SPIE Proceedings
  • DOI: 10.1117/12.929701

Incoherent x-ray mirror surface metrology
conference, November 1997

  • Hignette, Olivier; Freund, Andreas K.; Chinchio, Elia
  • Optical Science, Engineering and Instrumentation '97, SPIE Proceedings
  • DOI: 10.1117/12.295559

Characterization of high-resolution diffractive X-ray optics by ptychographic coherent diffractive imaging
journal, January 2011

  • Vila-Comamala, Joan; Diaz, Ana; Guizar-Sicairos, Manuel
  • Optics Express, Vol. 19, Issue 22
  • DOI: 10.1364/OE.19.021333