How reduced vacuum pumping capability in a coating chamber affects the laser damage resistance of HfO2/SiO2 antireflection and high reflection coatings.
Abstract
Optical coatings with the highest laser damage thresholds rely on clean conditions in the vacuum chamber during the coating deposition process. A low base pressure in the coating chamber, as well as the ability of the vacuum system to maintain the required pressure during deposition, are important aspects of limiting the amount of defects in an optical coating that could induce laser damage. Our large optics coating chamber at Sandia National Laboratories normally relies on three cryo pumps to maintain low pressures for e-beam coating processes. However, on occasion, one or more of the cryo pumps have been out of commission. In light of this circumstance, we explored how deposition under compromised vacuum conditions resulting from the use of only one or two cryo pumps affects the laser-induced damage thresholds of optical coatings. Finally, the coatings of this study consist of HfO2 and SiO2 layer materials and include antireflection coatings for 527 nm at normal incidence, and high reflection coatings for 527 nm, 45⁰ angle of incidence (AOI), in P-polarization (P-pol).
- Authors:
-
- Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
- Publication Date:
- Research Org.:
- Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
- Sponsoring Org.:
- USDOE National Nuclear Security Administration (NNSA)
- OSTI Identifier:
- 1259475
- Report Number(s):
- SAND-2016-5601J
Journal ID: ISSN 0277-786X; 642192
- Grant/Contract Number:
- AC04-94AL85000
- Resource Type:
- Accepted Manuscript
- Journal Name:
- Proceedings of SPIE - The International Society for Optical Engineering
- Additional Journal Information:
- Journal Volume: 9632; Journal ID: ISSN 0277-786X
- Publisher:
- SPIE
- Country of Publication:
- United States
- Language:
- English
Citation Formats
Field, Ella Suzanne, Bellum, John Curtis, and Kletecka, Damon E. How reduced vacuum pumping capability in a coating chamber affects the laser damage resistance of HfO2/SiO2 antireflection and high reflection coatings.. United States: N. p., 2016.
Web. doi:10.1117/12.2194131.
Field, Ella Suzanne, Bellum, John Curtis, & Kletecka, Damon E. How reduced vacuum pumping capability in a coating chamber affects the laser damage resistance of HfO2/SiO2 antireflection and high reflection coatings.. United States. https://doi.org/10.1117/12.2194131
Field, Ella Suzanne, Bellum, John Curtis, and Kletecka, Damon E. Wed .
"How reduced vacuum pumping capability in a coating chamber affects the laser damage resistance of HfO2/SiO2 antireflection and high reflection coatings.". United States. https://doi.org/10.1117/12.2194131. https://www.osti.gov/servlets/purl/1259475.
@article{osti_1259475,
title = {How reduced vacuum pumping capability in a coating chamber affects the laser damage resistance of HfO2/SiO2 antireflection and high reflection coatings.},
author = {Field, Ella Suzanne and Bellum, John Curtis and Kletecka, Damon E.},
abstractNote = {Optical coatings with the highest laser damage thresholds rely on clean conditions in the vacuum chamber during the coating deposition process. A low base pressure in the coating chamber, as well as the ability of the vacuum system to maintain the required pressure during deposition, are important aspects of limiting the amount of defects in an optical coating that could induce laser damage. Our large optics coating chamber at Sandia National Laboratories normally relies on three cryo pumps to maintain low pressures for e-beam coating processes. However, on occasion, one or more of the cryo pumps have been out of commission. In light of this circumstance, we explored how deposition under compromised vacuum conditions resulting from the use of only one or two cryo pumps affects the laser-induced damage thresholds of optical coatings. Finally, the coatings of this study consist of HfO2 and SiO2 layer materials and include antireflection coatings for 527 nm at normal incidence, and high reflection coatings for 527 nm, 45⁰ angle of incidence (AOI), in P-polarization (P-pol).},
doi = {10.1117/12.2194131},
journal = {Proceedings of SPIE - The International Society for Optical Engineering},
number = ,
volume = 9632,
place = {United States},
year = {Wed Jun 01 00:00:00 EDT 2016},
month = {Wed Jun 01 00:00:00 EDT 2016}
}
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Works referenced in this record:
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journal, January 2011
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Works referencing / citing this record:
Effect of interfacial SiO2−y layer and defect in HfO2−x film on flat-band voltage of HfO2−x/SiO2−y stacks for backside-illuminated CMOS image sensors
journal, February 2018
- Na, Heedo; Lee, Jimin; Jeong, Juyoung
- Applied Physics A, Vol. 124, Issue 3