Efficient linear phase contrast in scanning transmission electron microscopy with matched illumination and detector interferometry

Ophus, Colin; Ciston, Jim; Pierce, Jordan; Harvey, Tyler R.; Chess, Jordan; McMorran, Benjamin J.; Czarnik, Cory; Rose, Harald H.; Ercius, Peter

doi:10.1038/ncomms10719

Title: Efficient linear phase contrast in scanning transmission electron microscopy with matched illumination and detector interferometry

Journal Article · 28 February 2016 · Nature Communications

DOI: https://doi.org/10.1038/ncomms10719 · OSTI ID:1255550

Ophus, Colin ^[1]; Ciston, Jim ^[1]; Pierce, Jordan ^[2]; Harvey, Tyler R. ^[2]; Chess, Jordan ^[2]; McMorran, Benjamin J. ^[2]; Czarnik, Cory ^[3]; Rose, Harald H. ^[4]; Ercius, Peter ^[1]

Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
Univ. of Oregon, Eugene, OR (United States)
Gatan Inc., Pleasanton, CA (United States)
Ulm Univ., Ulm (Germany)

The ability to image light elements in soft matter at atomic resolution enables unprecedented insight into the structure and properties of molecular heterostructures and beam-sensitive nanomaterials. In this study, we introduce a scanning transmission electron microscopy technique combining a pre-specimen phase plate designed to produce a probe with structured phase with a high-speed direct electron detector to generate nearly linear contrast images with high efficiency. We demonstrate this method by using both experiment and simulation to simultaneously image the atomic-scale structure of weakly scattering amorphous carbon and strongly scattering gold nanoparticles. Our method demonstrates strong contrast for both materials, making it a promising candidate for structural determination of heterogeneous soft/hard matter samples even at low electron doses comparable to traditional phase-contrast transmission electron microscopy. Ultimately, simulated images demonstrate the extension of this technique to the challenging problem of structural determination of biological material at the surface of inorganic crystals.

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Research Organization:: Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States); Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA (United States)

Sponsoring Organization:: USDOE Office of Science (SC), Basic Energy Sciences (BES) (SC-22)

Grant/Contract Number:: AC02-05CH11231; SC0010466

OSTI ID:: 1255550

Journal Information:: Nature Communications, Journal Name: Nature Communications Vol. 7; ISSN 2041-1723

Publisher:: Nature Publishing GroupCopyright Statement

Country of Publication:: United States

Language:: English

References (58)

Mechanisms of radiation damage in beam-sensitive specimens, for TEM accelerating voltages between 10 and 300 kV Egerton, R. F. Microscopy Research and Technique, Vol. 75, Issue 11 https://doi.org/10.1002/jemt.22099	journal	July 2012
A versatile, software configurable multichannel STEM detector for angle-resolved imaging Haider, M.; Epstein, A.; Jarron, P. Ultramicroscopy, Vol. 54, Issue 1 https://doi.org/10.1016/0304-3991(94)90091-4	journal	May 1994
Radiation damage in the TEM and SEM Egerton, R. F.; Li, P.; Malac, M. Micron, Vol. 35, Issue 6 https://doi.org/10.1016/j.micron.2004.02.003	journal	August 2004
Prospects for aberration-free electron microscopy Rose, H. Ultramicroscopy, Vol. 103, Issue 1 https://doi.org/10.1016/j.ultramic.2004.11.017	journal	April 2005
Restoration of weak phase-contrast images recorded with a high degree of defocus: The “twin image” problem associated with CTF correction Downing, Kenneth H.; Glaeser, Robert M. Ultramicroscopy, Vol. 108, Issue 9 https://doi.org/10.1016/j.ultramic.2008.03.004	journal	August 2008
Dynamics of annular bright field imaging in scanning transmission electron microscopy Findlay, S. D.; Shibata, N.; Sawada, H. Ultramicroscopy, Vol. 110, Issue 7 https://doi.org/10.1016/j.ultramic.2010.04.004	journal	June 2010
Efficient elastic imaging of single atoms on ultrathin supports in a scanning transmission electron microscope Hovden, Robert; Muller, David A. Ultramicroscopy, Vol. 123 https://doi.org/10.1016/j.ultramic.2012.04.014	journal	December 2012
Efficient phase contrast imaging in STEM using a pixelated detector. Part 1: Experimental demonstration at atomic resolution Pennycook, Timothy J.; Lupini, Andrew R.; Yang, Hao Ultramicroscopy, Vol. 151, p. 160-167 https://doi.org/10.1016/j.ultramic.2014.09.013	journal	April 2015
Efficient phase contrast imaging in STEM using a pixelated detector. Part II: Optimisation of imaging conditions Yang, Hao; Pennycook, Timothy J.; Nellist, Peter D. Ultramicroscopy, Vol. 151 https://doi.org/10.1016/j.ultramic.2014.10.013	journal	April 2015
Limitations to significant information in biological electron microscopy as a result of radiation damage Glaeser, Robert M. Journal of Ultrastructure Research, Vol. 36, Issue 3-4 https://doi.org/10.1016/s0022-5320(71)80118-1	journal	August 1971
Materials science: The hole story Peplow, Mark Nature, Vol. 520, Issue 7546 https://doi.org/10.1038/520148a	journal	April 2015
Sub-ångstrom resolution using aberration corrected electron optics Batson, P. E.; Dellby, N.; Krivanek, O. L. Nature, Vol. 418, Issue 6898 https://doi.org/10.1038/nature00972	journal	August 2002
Production and application of electron vortex beams Verbeeck, J.; Tian, H.; Schattschneider, P. Nature, Vol. 467, Issue 7313 https://doi.org/10.1038/nature09366	journal	September 2010
Ptychographic electron microscopy using high-angle dark-field scattering for sub-nanometre resolution imaging Humphry, M. J.; Kraus, B.; Hurst, A. C. Nature Communications, Vol. 3, Issue 1 https://doi.org/10.1038/ncomms1733	journal	January 2012
Integrative, dynamic structural biology at atomic resolution—it's about time van den Bedem, Henry; Fraser, James S. Nature Methods, Vol. 12, Issue 4 https://doi.org/10.1038/nmeth.3324	journal	March 2015
Direct least square fitting of ellipses Fitzgibbon, A.; Pilu, M.; Fisher, R. B. IEEE Transactions on Pattern Analysis and Machine Intelligence, Vol. 21, Issue 5, p. 476-480 https://doi.org/10.1109/34.765658	journal	May 1999
Single-Particle Imaging of Macromolecules by Cryo-Electron Microscopy Frank, Joachim Annual Review of Biophysics and Biomolecular Structure, Vol. 31, Issue 1 https://doi.org/10.1146/annurev.biophys.31.082901.134202	journal	June 2002
Quantitative phase imaging via Fourier ptychographic microscopy Ou, Xiaoze; Horstmeyer, Roarke; Yang, Changhuei Optics Letters, Vol. 38, Issue 22 https://doi.org/10.1364/ol.38.004845	journal	January 2013
Direct mapping of Li-enabled octahedral tilt ordering and associated strain in nanostructured perovskites Zhu, Ye; Withers, Ray; Bourgeois, Laure European Microscopy Congress 2016: Proceedings https://doi.org/10.1002/9783527808465.emc2016.5796	book	December 2016
Mechanisms of radiation damage in beam-sensitive specimens, for TEM accelerating voltages between 10 and 300 kV Egerton, R. F. Microscopy Research and Technique, Vol. 75, Issue 11 https://doi.org/10.1002/jemt.22099	journal	July 2012
Advanced Computing in Electron Microscopy Kirkland, Earl J. https://doi.org/10.1007/978-1-4419-6533-2	book	January 2010
Scanning Transmission Electron Microscopy Pennycook, Stephen J.; Nellist, Peter D. https://doi.org/10.1007/978-1-4419-7200-2	book	January 2011
Advanced Computing in Electron Microscopy Kirkland, Earl J. https://doi.org/10.1007/978-1-4757-4406-4	book	January 1998
Advanced Computing in Electron Microscopy Kirkland, Earl J. Springer Cham https://doi.org/10.1007/978-3-030-33260-0	book	January 2020
A versatile, software configurable multichannel STEM detector for angle-resolved imaging Haider, M.; Epstein, A.; Jarron, P. Ultramicroscopy, Vol. 54, Issue 1 https://doi.org/10.1016/0304-3991(94)90091-4	journal	May 1994
Limitations to significant information in biological electron microscopy as a result of radiation damage Glaeser, Robert M. Journal of Ultrastructure Research, Vol. 36, Issue 3-4 https://doi.org/10.1016/S0022-5320(71)80118-1	journal	August 1971
Nonstandard imaging methods in electron microscopy Rose, H. Ultramicroscopy, Vol. 2 https://doi.org/10.1016/S0304-3991(76)91538-2	journal	January 1976
Radiation damage in the TEM and SEM Egerton, R. F.; Li, P.; Malac, M. Micron, Vol. 35, Issue 6 https://doi.org/10.1016/j.micron.2004.02.003	journal	August 2004
Prospects for aberration-free electron microscopy Rose, H. Ultramicroscopy, Vol. 103, Issue 1 https://doi.org/10.1016/j.ultramic.2004.11.017	journal	April 2005
Restoration of weak phase-contrast images recorded with a high degree of defocus: The “twin image” problem associated with CTF correction Downing, Kenneth H.; Glaeser, Robert M. Ultramicroscopy, Vol. 108, Issue 9 https://doi.org/10.1016/j.ultramic.2008.03.004	journal	August 2008
Dynamics of annular bright field imaging in scanning transmission electron microscopy Findlay, S. D.; Shibata, N.; Sawada, H. Ultramicroscopy, Vol. 110, Issue 7 https://doi.org/10.1016/j.ultramic.2010.04.004	journal	June 2010
Efficient elastic imaging of single atoms on ultrathin supports in a scanning transmission electron microscope Hovden, Robert; Muller, David A. Ultramicroscopy, Vol. 123 https://doi.org/10.1016/j.ultramic.2012.04.014	journal	December 2012
Efficient phase contrast imaging in STEM using a pixelated detector. Part 1: Experimental demonstration at atomic resolution Pennycook, Timothy J.; Lupini, Andrew R.; Yang, Hao Ultramicroscopy, Vol. 151, p. 160-167 https://doi.org/10.1016/j.ultramic.2014.09.013	journal	April 2015
Efficient phase contrast imaging in STEM using a pixelated detector. Part II: Optimisation of imaging conditions Yang, Hao; Pennycook, Timothy J.; Nellist, Peter D. Ultramicroscopy, Vol. 151 https://doi.org/10.1016/j.ultramic.2014.10.013	journal	April 2015
The potential and limitations of neutrons, electrons and X-rays for atomic resolution microscopy of unstained biological molecules Henderson, Richard Quarterly Reviews of Biophysics, Vol. 28, Issue 2 https://doi.org/10.1017/S003358350000305X	journal	May 1995
Efficient Diffractive Phase Optics for Electrons Pierce, Jordan; Harvey, Tyler; Agrawal, Amit Microscopy and Microanalysis, Vol. 20, Issue S3 https://doi.org/10.1017/s143192761400350x	journal	August 2014
Resolution beyond the 'information limit' in transmission electron microscopy Nellist, P. D.; McCallum, B. C.; Rodenburg, J. M. Nature, Vol. 374, Issue 6523 https://doi.org/10.1038/374630a0	journal	April 1995
Materials science: The hole story Peplow, Mark Nature, Vol. 520, Issue 7546 https://doi.org/10.1038/520148a	journal	April 2015
Sub-ångstrom resolution using aberration corrected electron optics Batson, P. E.; Dellby, N.; Krivanek, O. L. Nature, Vol. 418, Issue 6898 https://doi.org/10.1038/nature00972	journal	August 2002
Production and application of electron vortex beams Verbeeck, J.; Tian, H.; Schattschneider, P. Nature, Vol. 467, Issue 7313 https://doi.org/10.1038/nature09366	journal	September 2010
Ptychographic electron microscopy using high-angle dark-field scattering for sub-nanometre resolution imaging Humphry, M. J.; Kraus, B.; Hurst, A. C. Nature Communications, Vol. 3, Issue 1 https://doi.org/10.1038/ncomms1733	journal	January 2012
Imaging screw dislocations at atomic resolution by aberration-corrected electron optical sectioning Yang, H.; Lozano, J. G.; Pennycook, T. J. Nature Communications, Vol. 6, Issue 1 https://doi.org/10.1038/ncomms8266	journal	June 2015
Structure and bonding at the atomic scale by scanning transmission electron microscopy Muller, David A. Nature Materials, Vol. 8, Issue 4 https://doi.org/10.1038/nmat2380	journal	April 2009
Direct mapping of Li-enabled octahedral tilt ordering and associated strain in nanostructured perovskites Zhu, Ye; Withers, Ray L.; Bourgeois, Laure Nature Materials, Vol. 14, Issue 11 https://doi.org/10.1038/nmat4390	journal	August 2015
Integrative, dynamic structural biology at atomic resolution—it's about time van den Bedem, Henry; Fraser, James S. Nature Methods, Vol. 12, Issue 4 https://doi.org/10.1038/nmeth.3324	journal	March 2015
Molecular structure of the intact bacterial flagellar basal body Johnson, Steven; Furlong, Emily J.; Deme, Justin C. Nature Microbiology, Vol. 6, Issue 6 https://doi.org/10.1038/s41564-021-00895-y	journal	April 2021
Random vs realistic amorphous carbon models for high resolution microscopy and electron diffraction Ricolleau, C.; Le Bouar, Y.; Amara, H. Journal of Applied Physics, Vol. 114, Issue 21 https://doi.org/10.1063/1.4831669	journal	December 2013
Efficient diffractive phase optics for electrons R. Harvey, Tyler; S. Pierce, Jordan; K. Agrawal, Amit New Journal of Physics, Vol. 16, Issue 9 https://doi.org/10.1088/1367-2630/16/9/093039	journal	September 2014
Three-Dimensional Electron Microscopy of Macromolecular Assemblies Frank, Joachim Oxford University Press https://doi.org/10.1093/acprof:oso/9780195182187.001.0001	book	January 2006
Background, status and future of the Transmission Electron Aberration-corrected Microscope project Dahmen, U.; Erni, R.; Radmilovic, V. Philosophical Transactions of the Royal Society A: Mathematical, Physical and Engineering Sciences, Vol. 367, Issue 1903, p. 3795-3808 https://doi.org/10.1098/rsta.2009.0094	journal	August 2009
Wave-front phase retrieval in transmission electron microscopy via ptychography Hüe, F.; Rodenburg, J. M.; Maiden, A. M. Physical Review B, Vol. 82, Issue 12 https://doi.org/10.1103/PhysRevB.82.121415	journal	September 2010
Direct least square fitting of ellipses Fitzgibbon, A.; Pilu, M.; Fisher, R. B. IEEE Transactions on Pattern Analysis and Machine Intelligence, Vol. 21, Issue 5, p. 476-480 https://doi.org/10.1109/34.765658	journal	May 1999
Electron Vortex Beams with High Quanta of Orbital Angular Momentum McMorran, B. J.; Agrawal, A.; Anderson, I. M. Science, Vol. 331, Issue 6014, p. 192-195 https://doi.org/10.1126/science.1198804	journal	January 2011
Polymer Electrolytes Hallinan, Daniel T.; Balsara, Nitash P. Annual Review of Materials Research, Vol. 43, Issue 1 https://doi.org/10.1146/annurev-matsci-071312-121705	journal	July 2013
Single-Particle Imaging of Macromolecules by Cryo-Electron Microscopy Frank, Joachim Annual Review of Biophysics and Biomolecular Structure, Vol. 31, Issue 1 https://doi.org/10.1146/annurev.biophys.31.082901.134202	journal	June 2002
Quantitative phase imaging via Fourier ptychographic microscopy Ou, Xiaoze; Horstmeyer, Roarke; Yang, Changhuei Optics Letters, Vol. 38, Issue 22 https://doi.org/10.1364/OL.38.004845	journal	January 2013
Polymer electrolytes: Fundamentals and applications Sequeira, César; Santos, Diogo https://doi.org/10.1533/9781845699772	book	December 2009
Electron Beam Excitation and Damage of Biological Molecules; Its Implications for Specimen Damage in Electron Microscopy Isaacson, M.; Johnson, D.; Crewe, A. V. Radiation Research, Vol. 55, Issue 2 https://doi.org/10.2307/3573678	journal	August 1973

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