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Title: Aperture alignment in autocollimator-based deflectometric profilometers

Authors:
ORCiD logo [1] ;  [2] ;  [2] ;  [1] ;  [2] ;  [1] ;  [3] ;  [2]
  1. Physikalisch-Technische Bundesanstalt, Bundesallee 100, 38116 Braunschweig, Germany
  2. Advanced Light Source, Lawrence Berkeley National Laboratory, 1 Cyclotron Road, Berkeley, California 94720, USA
  3. Engineering Division, Lawrence Berkeley National Laboratory, 1 Cyclotron Road, Berkeley, California 94720, USA
Publication Date:
Grant/Contract Number:
AC02-05CH11231
Type:
Publisher's Accepted Manuscript
Journal Name:
Review of Scientific Instruments
Additional Journal Information:
Journal Name: Review of Scientific Instruments Journal Volume: 87 Journal Issue: 5; Journal ID: ISSN 0034-6748
Publisher:
American Institute of Physics
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English
OSTI Identifier:
1254335

Geckeler, R. D., Artemiev, N. A., Barber, S. K., Just, A., Lacey, I., Kranz, O., Smith, B. V., and Yashchuk, V. V.. Aperture alignment in autocollimator-based deflectometric profilometers. United States: N. p., Web. doi:10.1063/1.4950734.
Geckeler, R. D., Artemiev, N. A., Barber, S. K., Just, A., Lacey, I., Kranz, O., Smith, B. V., & Yashchuk, V. V.. Aperture alignment in autocollimator-based deflectometric profilometers. United States. doi:10.1063/1.4950734.
Geckeler, R. D., Artemiev, N. A., Barber, S. K., Just, A., Lacey, I., Kranz, O., Smith, B. V., and Yashchuk, V. V.. 2016. "Aperture alignment in autocollimator-based deflectometric profilometers". United States. doi:10.1063/1.4950734.
@article{osti_1254335,
title = {Aperture alignment in autocollimator-based deflectometric profilometers},
author = {Geckeler, R. D. and Artemiev, N. A. and Barber, S. K. and Just, A. and Lacey, I. and Kranz, O. and Smith, B. V. and Yashchuk, V. V.},
abstractNote = {},
doi = {10.1063/1.4950734},
journal = {Review of Scientific Instruments},
number = 5,
volume = 87,
place = {United States},
year = {2016},
month = {5}
}