Title: Linear chirped slope profile for spatial calibration in slope measuring deflectometry

Abstract

Slope measuring deflectometry is commonly used by the X-ray optics community to measure the long-spatial-wavelength surface figure error of optical components dedicated to guide and focus X-rays under grazing incidence condition at synchrotron and free electron laser beamlines. The best performing instruments of this kind are capable of absolute accuracy on the level of 30-50 nrad. However, the exact bandwidth of the measurements, determined at the higher spatial frequencies by the instrument's spatial resolution, or more generally by the instrument's modulation transfer function (MTF) is hard to determine. An MTF calibration method based on application of a test surface with a one-dimensional (1D) chirped height profile of constant amplitude was suggested in the past. In this work, we propose a new approach to designing the test surfaces with a 2D-chirped topography, specially optimized for MTF characterization of slope measuring instruments. The design of the developed MTF test samples based on the proposed linear chirped slope profiles (LCSPs) is free of the major drawback of the 1D chirped height profiles, where in the slope domain, the amplitude strongly increases with the local spatial frequency of the profile. We provide the details of fabrication of the LCSP samples. The results of firstmore » application of the developed test samples to measure the spatial resolution of the BESSY-NOM at different experimental arrangements are also presented and discussed.« less

Authors:

Siewert, F.; Zeschke, T.; Arnold, T.; Paetzelt, H.; Yashchuk, V. V.

Publication Date:

Sun May 01 00:00:00 EDT 2016

Research Org.:

Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA (United States)

Sponsoring Org.:

USDOE Office of Science (SC), Basic Energy Sciences (BES)

OSTI Identifier:

1254334

Alternate Identifier(s):

OSTI ID: 1420627; OSTI ID: 1530234

Grant/Contract Number:  

AC02-05CH11231

Resource Type:

Published Article

Journal Name:

Review of Scientific Instruments

Additional Journal Information:

Journal Name: Review of Scientific Instruments Journal Volume: 87 Journal Issue: 5; Journal ID: ISSN 0034-6748

Publisher:

American Institute of Physics (AIP)

Country of Publication:

United States

Language:

English

Subject:

47 OTHER INSTRUMENTATION