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Title: Scanning electron microscope measurement of width and shape of 10nm patterned lines using a JMONSEL-modeled library

Authors:
; ; ; ; ; ;
Publication Date:
OSTI Identifier:
1254034
Grant/Contract Number:
AC02-06CH11357
Type:
Publisher's Accepted Manuscript
Journal Name:
Ultramicroscopy
Additional Journal Information:
Journal Volume: 154; Journal Issue: C; Related Information: CHORUS Timestamp: 2016-09-14 19:21:46; Journal ID: ISSN 0304-3991
Publisher:
Elsevier
Sponsoring Org:
USDOE
Country of Publication:
Netherlands
Language:
English