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Title: Scanning electron microscope measurement of width and shape of 10 nm patterned lines using a JMONSEL-modeled library

Authors:
; ; ; ; ; ;
Publication Date:
Grant/Contract Number:
AC02-06CH11357
Type:
Publisher's Accepted Manuscript
Journal Name:
Ultramicroscopy
Additional Journal Information:
Journal Name: Ultramicroscopy Journal Volume: 154 Journal Issue: C; Journal ID: ISSN 0304-3991
Publisher:
Elsevier
Sponsoring Org:
USDOE
Country of Publication:
Netherlands
Language:
English
OSTI Identifier:
1254034

Villarrubia, J. S., Vladár, A. E., Ming, B., Kline, R. J., Sunday, D. F., Chawla, J. S., and List, S.. Scanning electron microscope measurement of width and shape of 10 nm patterned lines using a JMONSEL-modeled library. Netherlands: N. p., Web. doi:10.1016/j.ultramic.2015.01.004.
Villarrubia, J. S., Vladár, A. E., Ming, B., Kline, R. J., Sunday, D. F., Chawla, J. S., & List, S.. Scanning electron microscope measurement of width and shape of 10 nm patterned lines using a JMONSEL-modeled library. Netherlands. doi:10.1016/j.ultramic.2015.01.004.
Villarrubia, J. S., Vladár, A. E., Ming, B., Kline, R. J., Sunday, D. F., Chawla, J. S., and List, S.. 2015. "Scanning electron microscope measurement of width and shape of 10 nm patterned lines using a JMONSEL-modeled library". Netherlands. doi:10.1016/j.ultramic.2015.01.004.
@article{osti_1254034,
title = {Scanning electron microscope measurement of width and shape of 10 nm patterned lines using a JMONSEL-modeled library},
author = {Villarrubia, J. S. and Vladár, A. E. and Ming, B. and Kline, R. J. and Sunday, D. F. and Chawla, J. S. and List, S.},
abstractNote = {},
doi = {10.1016/j.ultramic.2015.01.004},
journal = {Ultramicroscopy},
number = C,
volume = 154,
place = {Netherlands},
year = {2015},
month = {7}
}