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Title: Optimizing phosphorus diffusion for photovoltaic applications: Peak doping, inactive phosphorus, gettering, and contact formation

Authors:
 [1] ; ORCiD logo [2] ;  [3] ; ORCiD logo [1] ;  [2] ;  [2] ; ORCiD logo [4] ;  [1] ;  [5]
  1. Massachusetts Institute of Technology, Cambridge, Massachusetts 02139, USA
  2. Department of Physics, University of Konstanz, 78457 Konstanz, Germany
  3. Institute for Solar Energy Research Hamelin (ISFH), 31860 Emmerthal, Germany
  4. Massachusetts Institute of Technology, Cambridge, Massachusetts 02139, USA, Instituto de Energía Solar, Universidad Politécnica de Madrid, 28040 Madrid, Spain
  5. Department of Solar Energy, Institute of Solid-State Physics, University of Hannover, 30167 Hannover, Germany
Publication Date:
Grant/Contract Number:
EE0006335
Type:
Publisher's Accepted Manuscript
Journal Name:
Journal of Applied Physics
Additional Journal Information:
Journal Volume: 119; Journal Issue: 18; Related Information: CHORUS Timestamp: 2018-03-29 21:04:35; Journal ID: ISSN 0021-8979
Publisher:
American Institute of Physics
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English
OSTI Identifier:
1253075